Systems and methods for controlling robots including industrial robots. A method includes executing (402) a program (550) to control a robot (102) by the robot control system (120, 500). The method includes receiving (404) robot state information (554). The method includes receiving (406) force torque feedback (556) inputs from a sensor (554) on the robot (102). The method includes producing (410) a robot control command for the robot (102) based on the robot state information (554) and the force torque feedback (556) inputs. The method includes controlling (412) the robot (102) using the robot control command.

A method of operating a polishing system includes training a plurality of models using a machine learning algorithm to generate a plurality of trained models, each trained model configured to determine a characteristic value of a layer of a substrate based on a monitoring signal from an in-situ monitoring system of a semiconductor processing system, storing the plurality of trained models, receiving data indicating a characteristic of a substrate to be processed, selecting one of the plurality of trained models based on the data, and passing the selected trained model to the processing system.

A system for controlling an operation of a machine including a plurality of actuators assisting one or multiple tools to perform one or multiple tasks, in response to receiving an acoustic mixture of signals generated by the tool performing a task and by the plurality of actuators actuating the tool, submit the acoustic mixture of signals into a neural network trained to separate from the acoustic mixture a signal generated by the tool performing the task from signals generated by the actuators actuating the tool to extract the signal generated by the tool performing the task from the acoustic mixture of signals, analyze the extracted signal to produce a state of performance of the task, and execute a control action selected according to the state of performance of the task.

An object recognition apparatus for automatic detection of an abnormal operation state of a machine including a machine tool operated in an operation space monitored by at least one camera configured to generate camera images of a current operation scene is provided. The generated camera images are supplied to a processor configured to analyze the current operation scene using a trained artificial intelligence module to detect objects present within the current operation scene. The processor is also configured to compare the detected objects with objects expected in an operation scene in a normal operation state of the machine to detect an abnormal operation state of the machine.

A machine learning device, which detects an operator, communicates with a database registering information concerning the operator, and learns display of an operation menu based on the information concerning the operator, includes a state observation unit which observes an operation history of the operation menu; and a learning unit which learns the display of the operation menu on the basis of the operation history of the operation menu observed by the state observation unit.

A scanner for image reconstruction of a structure of a target object uses a neural network trained to classify each segment of a sequence of segments of a modified wave into one or multiple classes. The sequence of segments corresponds to the sequence of layers of the target object, such that a segment of modified wave corresponds to a layer having the same index in the sequence of layers as an index of the segment in the sequence of segments. The scanner executes the neural network for each wave modified by penetration through the layers of the target object to produce the classes of segments of the modified waves. Next, the scanner selects the classes of segments of different modified waves corresponding to the same layer to produce an image of the layer of the target object with pixel values being functions of labels of the selected classes.

The current disclosure describes techniques for managing vertical alignment or overlay in semiconductor manufacturing using machine learning. Alignments of interconnection features in a fan-out WLP process are evaluated and managed through the disclosed techniques. Big data and neural networks system are used to correlate the overlay error source factors with overlay metrology categories. The overlay error source factors include tool related overlay source factors, wafer or die related overlay source factors and processing context related overlay error source factors.

A machine learning device acquires from a numerical controller information relating to machining when the machining is performed, and further acquires an actual delay time due to servo control and due to machine movement which are caused in the machining when the machining is performed. Then, the device performs supervised learning using the acquired machining-related information as input data, and using the acquired actual delay time due to servo control and due to machine movement as supervised data, and constructs a learning model, thereby predicting the machine delay time caused in a machine with high precision.

A scanner for image reconstruction of a structure of a target object uses a neural network trained to classify each segment of a sequence of segments of a modified wave into one or multiple classes. The sequence of segments corresponds to the sequence of layers of the target object, such that a segment of modified wave corresponds to a layer having the same index in the sequence of layers as an index of the segment in the sequence of segments. The scanner executes the neural network for each wave modified by penetration through the layers of the target object to produce the classes of segments of the modified waves. Next, the scanner selects the classes of segments of different modified waves corresponding to the same layer to produce an image of the layer of the target object with pixel values being functions of labels of the selected classes.

A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive training images of one or more features of a specimen from the characterization sub-system; receive training three-dimensional (3D) design images corresponding to the one or more features of the specimen; generate a deep learning predictive model based on the training images and the training 3D design images; receive product 3D design images of one or more features of a specimen; generate simulated images of the one or more features of the specimen based on the product 3D design images with the deep learning predictive model; and determine one or more characteristics of the specimen based on the one or more simulated images.