A robot control method includes a teaching step, first processing step, modifying step, second processing step, and third processing step. In the modifying step, a third teaching point is changed to a second modified point, a fourth teaching point to a third modified point, and a fifth teaching point to a fourth modified point, based on a difference between a second teaching point and a first modified point. A profile modifying control to change the position of a work tool is applied, using a sensor mounted on the processing advancing direction side of the work tool, in the first processing step and the third processing step. An attitude of the work tool is changed during the second processing step.

The invention concerns a method of programming an industrial robot, exhibiting the steps of selecting a program command, the assigned rigidity parameter of which is to be verified, changed and/or saved in the program mode; moving the manipulator arm into a test pose, in which the industrial robot is configured and/or arranged to manually touch and/or move the manipulator arm; and the automatic actuation of the manipulator arm by the control device such that the manipulator arm in the test pose exhibits the rigidity corresponding to the assigned rigidity parameter of the selected program command. The invention further concerns an industrial robot, exhibiting a control device designed and/or configured to execute such a method.

A teaching method for a transfer device provided with a pick configured to hold a substrate and a mapping sensor, includes detecting a position of an edge of the substrate arranged in a teaching target module by the mapping sensor and setting a teaching position in one horizontal direction, transferring the substrate from the teaching target module to a stage of an alignment device by the pick based on the set teaching position, rotating the stage by a predetermined angle and detecting a locus of the position of the edge of the substrate, and estimating an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.