A method for calibrating a CNC processing apparatus is provided that can significantly reduce the amount of operation time required for sensor calibration. A method of the present invention for calibrating a non-contact sensor in a CNC processing apparatus 1 includes a first step, a second step and a third step. In the first step, the center coordinates of a reference instrument are measured with a contact probe and thereby the machine coordinates of the center of the reference instrument are determined. In the second step, after a non-contact sensor 110 is mounted onto a spindle 26, the center coordinates of the reference instrument are measured only one time with the non-contact sensor 110, and thereby the non-contact sensor coordinates of the center of the reference instrument are determined. In the third step, calculations are made to determine the amount of displacement required to bring the non-contact sensor coordinates obtained in the second step into agreement with the machine coordinates obtained with the contact probe in the first step.

A method for using a geometrical probe (5) with a spindle (3) of a machine tool (1), wherein a probe fetch waiting state of the machine tool (1), at least one temperature parameter related to a temperature of the spindle (3) of the machine tool (1) is determined by measuring at least one temperature value for the spindle (3), and time for fetching the geometrical probe (5) is determined depending on the at least one temperature parameter.

Embodiments of the present disclosure provide methodology to match and calibrate processing chamber performance in a processing chamber. In one embodiment, a method for calibrating a processing chamber for semiconductor manufacturing process includes performing a first predetermined process in a processing chamber, collecting a first set of signals transmitted from a first group of sensors disposed in the processing chamber to a controller while performing the predetermined process, analyzing the collected first set of signals, comparing the collected first set of signals with database stored in the controller to check sensor responses from the first group of sensors, calibrating sensors based on the collected first set of signals when a mismatch sensor response is found, subsequently performing a first series of processes in the processing chamber, and collecting a second set of signals transmitted from the sensors to the controller while performing the series of processes.

A method for setting a null position of a scanning probe mounted to the rotatable spindle of a machine tool. This method may be performed as part of a probe qualification process. The method includes setting the null position using probe measurement data collected by the scanning probe when mounted to the spindle. In one embodiment, a stylus tip of the scanning probe may be located in a conical recess whilst the probe measurement data is collected. The set null position is arranged to be away from the rest position of the scanning probe and to substantially coincide with the axis of rotation of the spindle. The need to measure and use a probe offset value in subsequent measurement cycles can thus be avoided.

Provided is a calibration device for three-dimensional imaging equipment including a first bead group including first beads arranged in a first pattern, and a second bead group including second beads arranged in a second pattern different from the first pattern, wherein the first and second bead groups have different cross ratios or different segment ratios from each other, the first beads are arranged in a line, and the second beads are arranged in a line.

A calibration device (30) for a machine tool is described that includes a base (36) attachable to a machine tool and a calibration artefact (32), such as a sphere of known radius. A deflection mechanism attaches the calibration artefact to the base and allows movement of the calibration artefact (32) relative to the base (36) when an external force is applied to the calibration artefact (32). The deflection mechanism also maintains the calibration artefact (32) in a defined rest position relative to the base (36) in the absence of an applied external force. A sensor (46) is provided for sensing the extent of movement of the calibration artefact (32) relative to the base (36). A method of using the device (30) with a reference tool to accurately determine a position of a calibration artefact (32) is also described.

A method and system for piece-picking or piece put-away within a logistics facility. The system includes a central server and at least one mobile manipulation robot. The central server is configured to communicate with the robots to send and receive piece-picking data which includes a unique identification for each piece to be picked, a location within the logistics facility of the pieces to be picked, and a route for the robot to take within the logistics facility. The robots can then autonomously navigate and position themselves within the logistics facility by recognition of landmarks by at least one of a plurality of sensors. The sensors also provide signals related to detection, identification, and location of a piece to be picked or put-away, and processors on the robots analyze the sensor information to generate movements of a unique articulated arm and end effector on the robot to pick or put-away the piece.

A method and a device for orienting an effector relative to a surface by means of a device comprising an articulated arm, at least one tool which is designed to carry out an assembly step, at least three sensors and a controller. The method comprises the steps of determining by the controller the position of the sensors on the effector and rotating the articulated arm according to at least one dimension, so as to orient the tool carried by the effector according to an angle which is predetermined relative to the normal to the surface.

A system and method for calibrating a manufacturing machine that includes a leveling device including a machine base interface to a manufacturing machine, a support system that comprises of a set of linearly actuating supports, a workpiece interface, and wherein actuation of supports collectively adjusts the orientation of the workpiece interface with two degrees of angular freedom; and a calibration system with sensors configured to measure the orientation of the workpiece interface.

A method and system for piece-picking or piece put-away within a logistics facility. The system includes a central server and at least one mobile manipulation robot. The central server is configured to communicate with the robots to send and receive piece-picking data which includes a unique identification for each piece to be picked, a location within the logistics facility of the pieces to be picked, and a route for the robot to take within the logistics facility. The robots can then autonomously navigate and position themselves within the logistics facility by recognition of landmarks by at least one of a plurality of sensors. The sensors also provide signals related to detection, identification, and location of a piece to be picked or put-away, and processors on the robots analyze the sensor information to generate movements of a unique articulated arm and end effector on the robot to pick or put-away the piece.