A coordinate calibration method of a manipulator is provided and includes steps of: (a) controlling the manipulator to move in accordance with a movement command, and acquiring the reference anchor points reached by the manipulator; (b) acquiring a rotation matrix and a translation vector according to the reference anchor points, and acquiring a reference coordinate system accordingly; (c) when the manipulator returning to the work space after temporarily leaving, controlling the manipulator to move in accordance with the movement command, and acquiring the actual anchor points reached by the manipulator; (d) acquiring a rotation matrix and a translation vector according to the actual anchor points, acquiring a corresponding actual coordinate system accordingly, and acquiring a coordinate compensation information by comparing the rotation matrixes and the translation vectors; and (e) adjusting the manipulator according to the coordinate compensation information, and maintaining the manipulator to operate in the reference coordinate system.

A method for automatically calibrating the position of a wafer handling robot relative to a wafer carrier. The method comprises providing a semiconductor processing assembly comprising the wafer carrier and the wafer handling robot having an end effector, placing a wafer on a wafer support surface of the end effector, moving the end effector to an end position adjacent the wafer carrier, determining a displacement of the wafer on the wafer support surface, repeating these steps until the magnitude of the displacement meets a set end criterion, and storing the latest used end position as a calibrated end position.

A mechanical arm calibration system and a mechanical arm calibration method are provided. The method includes: locating a position of an end point of a mechanical arm in a three-dimensional space to calculate an actual motion trajectory of the end point when the mechanical arm is operating; retrieving link parameters of the mechanical arm, randomly generating sets of particles including compensation amounts for the link parameters through particle swarm optimization (PSO), importing the compensation amounts of each of the sets of particles into forward kinematics after addition of the corresponding link parameters, to calculate an adaptive motion trajectory of the end point; calculating position errors between the adaptive motion trajectory and the actual motion trajectory of each of the sets of particles for a fitness value of the PSO to estimate a group best position; and updating the link parameters by the compensation amounts corresponding to the group best position.

A 3D position and orientation calculation and robotic application structure using an inertial measuring unit and string—encoder positions sensors.

The invention relates to the technical field of industrial robots, and particularly relates to a coordinate system calibration method, a device, and a computer readable medium. A coordinate calibration method comprising: rotating an actuator (20) about an z″ axis of an actual actuator coordinate system (63) to reach three different positions, and controlling a camera (10) to capture an image of a target object (60) on an operation platform (40) for each of the three reached positions; merging positions of the target object (60) in images captured at the three positions into one image, and determining coordinates of a center P3 of a circumcircle of the three positions of the target object (60) in the image under a camera coordinate system (62); enabling the actuator (20) to move along the z″ axis and contact the operation platform (40) with a terminal end, and labeling a contact point as a point P2; controlling the actuator (20) to return to a first position (71) along the z″ axis, and controlling the camera (10) to capture an image; determining coordinates of P2 under the camera coordinate system (62) according to the position of P2 in the image; and determining, according to the coordinates of P2 and P3 under the camera coordinate system (62) and a moved distance of the actuator (20) from the first position (71) along the z″ axis, a deviation of the z″ axis from a theoretical z axis of an actuator coordinate system (61). The invention has an advantage of operational simplicity.

A coordinate calibration method of a manipulator is provided and includes steps of: (a) controlling the manipulator to move in accordance with a movement command, and acquiring the reference anchor points reached by the manipulator; (b) acquiring a rotation matrix and a translation vector according to the reference anchor points, and acquiring a reference coordinate system accordingly; (c) when the manipulator returning to the work space after temporarily leaving, controlling the manipulator to move in accordance with the movement command, and acquiring the actual anchor points reached by the manipulator; (d) acquiring a rotation matrix and a translation vector according to the actual anchor points, acquiring a corresponding actual coordinate system accordingly, and acquiring a coordinate compensation information by comparing the rotation matrixes and the translation vectors; and (e) adjusting the manipulator according to the coordinate compensation information, and maintaining the manipulator to operate in the reference coordinate system.

In one embodiment, a method includes by a robotic system: sending, by an automatic tuning controller, driving commands to actuators of the robotic system, performing, for each of the actuators, one or more measurements of an actual pose of the respective actuator in response to the driving commands, generating, for each of the actuators, one or more configuration parameters for the respective actuator based on the one or more measurements, and storing the configuration parameters for the actuators in a data store of the robotic system.

A smart drilling system that includes a controller, a drilling machine with an optical marker, and a tracker station at a fixed spot of a construction site. The drilling machine includes an optical marker. The tracker station acquires the location of the drilling machine and its drill through tracking the optical marker. The drilling machine is moved into positions of multiple different work regions. The tracker station sequentially acquires the location of the multiple different work regions and transmits the acquired location information to the controller, such that, by using the transmitted locations, the controller converts drilling machine coordinates into desired perforation coordinates and recognizes an orientation of the drilling machine. The controller also recognizes a perforable point at a current position of the drilling machine through the location information of the drilling machine.

In some embodiments, correcting an alignment error between an end effector of a tool associated with a slave and a master actuator associated with a master in a robotic system involves receiving at the master, master actuator orientation signals (R.sub.MCURR) representing the orientation of the master actuator relative to a master reference frame and generating end effector orientation signals (R.sub.EENEW) representing the end effector orientation relative to a slave reference frame, producing control signals based on the end effector orientation signals, receiving an enablement signal for selectively enabling the control signals to be transmitted from the master to the slave, responsive to a transition of the enablement signal from not active state to active state, computing the master-slave misalignment signals (R.sub.Δ) as a difference between the master actuator orientation signals (R.sub.MCURR) and the end effector orientation signals (R.sub.EENEW), and adjusting the master-slave misalignment signals (R.sub.Δ) to reduce the alignment difference.

A method for aligning a robotic arm in a superordinate reference pose is specified, —where the robotic arm includes a plurality of robotic joints, each of which includes a drive device which enables rotation about an associated axis of rotation, where an associated eccentric lever element is formed for at least two selected robotic joints by one or more other partial elements of the robotic arm, the method including: aligning the drive device of a first selected robotic joint in an automated manner in a first target position in which the associated first eccentric lever element is disposed in a reversal position, aligning the drive device of a second selected robotic joint in an automated manner in a second target position in which the associated second eccentric lever element is disposed in a reversal position, where the sub-steps are repeated in an iterative loop until the change in angle effected in each sub-step falls below a predetermined limit value.