The objective of the present invention is to provide a technology enabling interference between a robot and a peripheral object to be reliably avoided, while confirming the safety of a generated robot path. A robot control device 3 is provided with: a data transmitting and receiving unit 32 for acquiring a robot path generated in such a way as to avoid interference between a robot 30 and a peripheral object, on the basis of a three-dimensional model of the robot 30 and the peripheral object; an interference determining unit 35 for determining, for each prescribed sector, whether there is a high probability of the robot 30 interfering with the peripheral object when the robot 30 is moved in accordance with the acquired robot path; and an override changing unit 36 for lowering the speed of the robot 30 or stopping the movement of the robot 30 for sectors in which the interference determining unit 35 has determined that the probability of interference is high.

A system to process semiconductor wafers includes an end effector, a proximity sensor and a controller. The end effector may be adapted to handle a semiconductor wafer. The proximity sensor may be attached to the end effector and may output a first sensor signal if a distance between the end effector and an object separated from the end effector is less than or equal to a first predetermined distance. The controller is responsive to the first sensor signal to slow a movement of the end effector. The proximity sensor further outputs a second sensor signal if the distance between the end effector and the object is less than or equal to a second predetermined distance in which the second predetermined distance being less than the first predetermined distance. The controller is responsive to the second sensor signal to stop movement of the end effector.

A security check instrument motion control system includes an FPGA control chip that receives motion instructions, comprising angle, direction, speed and the like, from an upper computer via an upper computer communication module, realizes quick control to a rotation motion module, and controls a motion state of the rotation motion module according to real-time motion information of the rotation motion module detected by a positioning detection module. The motion state includes a motion stop state and a normal rotation state. The FPGA control chip detects the working state of each module in the security check instrument motion control system in real time, and once the security check instrument motion control system has a fault, each module can be subjected to debugging, repairing and maintenance respectively. If the positioning detection module detects that the rotation motion module is abnormal, the FPGA control chip controls the rotation motion module to stop moving.

A robotic system includes: at least one robot; a robot controller for controlling an operation of the at least one robot; a robot sensor system with at least one robot sensor, the robot sensor system being coupled to the robot controller to detect a presence of an object in a robot safety zone, which robot safety zone at least partially surrounds the at least one robot; and at least one automated vehicle for supplying the at least one robot. The at least one vehicle has at least one vehicle sensor for detecting a presence of an object in a vehicle safety zone, which vehicle safety zone at least partially surrounds the at least one vehicle. The robot controller determines an entry of the at least one vehicle into the robot safety zone. The robot controller adjusts at least a part of the robot safety zone.

A robot includes a base; an articulated arm provided on the base; a sensor that is provided on the base and detects external force applied to the articulated arm; a controller that causes the articulated arm to perform a stop motion on a basis of a detected value of the sensor; and a cable having one end connected to devices mounted on a tip-side arm member of the articulated arm, and having the other end connected to the controller that controls the devices wherein the cable enters into the articulated arm from an arm member, passes through arm members which are disposed closer to the base side than the arm member is, and is connected to the controller.

A method and a system have at least one sensor for monitoring a plurality of protected zones for infringement by at least one object. A controller controls a plant to be safeguarded having a mechanically movable part, having the sensor for the at least planar monitoring of the protected zones by a control and evaluation unit for evaluating. The received signals of the sensor determine which of the protected zones has been infringed by the object and which protected zone the object has left. The controller generates and outputs a switch signal that is a release signal for the release of the plant operation. The mechanically movable part is either in a first working zone or in a second working zone, with the first working zone and the second working zone each being associated with a first protected zone and a second protected zone, respectively.

A system to process semiconductor wafers includes an end effector, a proximity sensor and a controller. The end effector may be adapted to handle a semiconductor wafer. The proximity sensor may be attached to the end effector and may output a first sensor signal if a distance between the end effector and an object separated from the end effector is less than or equal to a first predetermined distance. The controller is responsive to the first sensor signal to slow a movement of the end effector. The proximity sensor further outputs a second sensor signal if the distance between the end effector and the object is less than or equal to a second predetermined distance in which the second predetermined distance being less than the first predetermined distance. The controller is responsive to the second sensor signal to stop movement of the end effector.

A system and method of collision avoidance includes determining first positions of first joints of a first repositionable arm and second positions of second joints of a second repositionable arm. Distal ends of the first and second repositionable arms are configured to support first and second instruments, respectively. The system and method further include determining first and second virtual boundaries around the first and second repositionable arms, determining an overlap between the first and second virtual boundaries, determining an overlap force on the first repositionable arm due to the overlap, mapping the overlap force to virtual torques on the first joints proximal to the overlap, determining a tip force on a distal end of the first instrument, and applying the tip force as feedback on the first instrument.

A method operates the machinery of a plant having various machines. The method includes providing software-readable information relative to working areas each relating to at least an operation of one of the machines. At least part of the machines are operated by MES or MOM software reading the information so as to avoid operations with overlapping working areas being performed at a same time.

Devices, systems, and methods for providing a desired movement of one or more joints of a manipulator arm having a plurality of joints with redundant degrees of freedom while effecting commanded movement of a distal end effector of the manipulator. Methods include defining a constraint, such as a network of paths, within a joint space defined by the one or more joints and determining a movement of the plurality of joints within a null-space to track the constraints with the one or more joints. Methods may further include calculating a reconfiguration movement of the joints and modifying the constraints to coincide with a reconfigured position of the one or more joints. Various configurations for devices and systems utilizing such methods are provided herein.