A motion system includes a motion hardware system and a motion control system configured to control the movement of the motion hardware system. The hardware system includes a motion stage, a platform supporting the motion stage, and a machine frame resting on a ground surface. The platform includes a base and an active vibration isolation system arranged between the base and the machine frame. The active vibration isolation system includes actuators to provide together at least three degrees-of-freedom actuation of the base. The motion control system includes a feedforward control having a vibration isolation system controller for controlling the at least three DOF actuation of the active vibration isolation system to compensate, by exerting a counteracting force on the base, for expected reactions forces exerted by the motion stage on the base when operating. The feedforward control includes a memory for storing a string of characters defining the motion equations based on the topology of the motion stage, and a processing unit for processing the string of characters to compute the counteracting force.

An edge device monitors a mechanical system for changes in vibration state. When an overall vibration state of the mechanical system deviates by at least a threshold from an expected vibration state, the edge device can send the data to a server for diagnostic processing. The edge device can thus monitor for a pre-failure condition that suggests an upcoming failure or a need for service. With selective sending of sensor data, the bandwidth and processing associated with diagnostics can be reserved for situations more likely indicative of a condition needing diagnosing, rather than performing constant diagnostic processing.

A control system for actively damping an output of an adjustable speed drive (ASD) having a DC link thin film capacitor is programmed to calculate a d-axis damping coefficient and a q-axis damping coefficient for stabilizing an output of the ASD based at least on a voltage across the DC link thin film capacitor at a steady operating point. The control system is further programmed to extract d-axis and q-axis perturbations in d-axis and q-axis output currents of the ASD using a high pass filter, damp the d-axis perturbation and the q-axis perturbation with the d-axis damping coefficient and the q-axis damping coefficient, respectively, and calculate a damping frequency based on the damped d-axis perturbation and the damped q-axis perturbation. The control system is also programmed to damp an angle of rotation of a reference motor speed command for controlling the ASD using the damping frequency.

An active vibration isolator including a movable stage provides good vibration isolation performance. An active vibration isolator includes: a stage moving under thrust to position a mounted object; a vibration isolation table supporting the stage; a servo valve imparting, to the vibration isolation table, a control force that reduces vibrations of the vibration isolation table; a position/thrust obtaining unit obtaining a position of the stage on a movement track and the thrust actually applied to the stage with movement of the stage; and a vibration control FF control unit performing feed-forward control of the servo valve, based on what is obtained by the position/thrust obtaining unit, to allow the servo valve to generate a control force commensurate with vibrations of the vibration isolation table caused by the movement of the stage.

An example servo control system includes one or more components configured to be actuated for movement, a system controller including one or more processors for receiving feedback of the movement of the one or more components and for using the feedback within a control loop to cause an actuator to reduce error of the movement of the one or more components, and a tuned mass damper (TMD) physically connected to the one or more components. Parameters of the TMD are selected to add phase margin at a crossover frequency of the servo control system, and the TMD includes a mass coupled to the one or more components, a damper connected between the mass and the one or more components, and a spring component connected between the mass and the one or more components.

A method for attenuating load oscillations in a load mechanism having a controlled drive, wherein a load is coupled mechanically to a motor via a spring element, includes determining an actual motor torque value, determining an actual angular velocity value, determining a motor inertial torque, calculating a spring torque from the actual angular velocity value, the motor inertial torque and the actual motor torque value, and supplying the calculated spring torque to an attenuator connection for attenuating the load oscillations.

A method and robot controller configured to obtain an inertia-vibration model of the robot arm. The inertia-vibration model defines a relationship between the inertia of the robot arm and the vibrational properties of said robot arm and have been by setting the robot arm in a plurality of different physical configurations and for each of said physical configurations of said robot arm obtaining the vibrational properties and the inertia the robot arm. The inertia-vibration model makes it possible to in a simple and efficient way to obtain the vibrational properties of different physical configurations of the robot arm whereby the robot arm can be controlled according to the vibrational properties of the robot arm. This makes it possible to reduce the vibrations of the robot arm during movement of the robot arm.