A manufacturing center configured for use with a plurality of tools and a plurality of nests. The manufacturing center includes a base configured for coupling with one of the plurality of nests. The base includes a base electrical connector. The manufacturing center also includes an arm configured for coupling with one of the plurality of tools. The arm has an end movable with respect to the base, and the end includes an arm electrical connector. A controller is operable to control movement of the arm and is in communication with the base electrical connector and the arm electrical connector. The controller is operable to identify which one of the plurality of tools is coupled with the arm and which one of the plurality of nests is coupled with the base at least in part by way of communication with the arm electrical connector and the base electrical connector.

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

The numerical controller of the invention receives input of a technique for operating a plurality of tools and an operation condition of the operation technique, calculates movement command data including speed information and position information on the plurality of tools, such that respective cutting paths of the plurality of tools intersect, based on the input operation method and operation condition, generates interpolation data based on the movement command data, and controls a motor for driving a machine based on the interpolation data.

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

The scheduling problem of a multi-cluster tool with a tree topology whose bottleneck tool is process-bound is investigated. A method for scheduling the multi-cluster tool to thereby generate an optimal one-wafer cyclic schedule for this multi-cluster tool is provided. A Petri net (PN) model is developed for the multi-cluster tool by explicitly modeling robot waiting times such that a schedule is determined by setting the robot waiting times. Based on the PN model, sufficient and necessary conditions under which a one-wafer cyclic schedule exists are derived and it is shown that an optimal one-wafer cyclic schedule can be always found. Then, efficient algorithms are given to find the optimal cycle time and its optimal schedule. Examples are used to demonstrate the scheduling method.

The numerical controller of the invention receives input of a technique for operating a plurality of tools and an operation condition of the operation technique, calculates movement command data including speed information and position information on the plurality of tools, such that respective cutting paths of the plurality of tools intersect, based on the input operation method and operation condition, generates interpolation data based on the movement command data, and controls a motor for driving a machine based on the interpolation data.