In some examples, a pressure regulating valve comprising a pressure chamber, a compressor configured to establish fluid communication with the pressure chamber, a vent valve configured to establish fluid communication with the pressure chamber, a pressure sensor, and a controller. The controller may determine a pressure based on the signal generated by the pressure sensor, and compare a pressure setpoint and the pressure. The controller may be configured to alter the pressure in the pressure chamber based on the comparison between the pressure setpoint and the pressure. For example, the controller may control the compressor to increase the pressure in the pressure chamber and/or control the vent vale to decrease the pressure in the pressure chamber. The altered pressure of the pressure chamber may generate movement of a restricting element within the pressure regulating valve.

A fluid pressure reducing valve apparatus includes a pressure reducing valve. The valve has: a body containing a fluid-flow chamber, a liquid supply orifice into the chamber, a liquid outlet from the chamber, a regulation plate opposed to the orifice, a spring acting to urge the plate towards the orifice, and a diaphragm between the plate and the body to close the chamber between them. A controllable motor drive acts between the body and an end of the spring remote from the plate. A flow meter is positioned downstream of the outlet. A controller is arranged to receive flow data from the flow meter and to control the motor drive for withdrawal of the remote end of the spring in accordance with flow rate measured by the flow meter. For an increase in demand flow, the plate is partially withdrawn to maintain downstream pressure on such increase and vice versa.

A pressure reducing valve (IOO) includes a displaceable throttling element (51) displaceable between a fully-open position in which fluid flows along a flow path from an inlet (11) to an outlet (45), and a closed position in which the flow path is blocked. A spring (6) acts to displace the displaceable throttling element to the fully-open position while pressure within a control chamber (54) acts on a pressure-actuated surface to displace the displaceable throttling element towards the closed position. A switchable hydraulic control circuit in fluid connection with the inlet, the outlet and the control chamber, is switchable between first state in which a pressure within the control chamber is equalized with the outlet pressure, and a second state in which the pressure within the control chamber is equalized with an inlet pressure.

A pressure regulator (10) including: a housing (12, 14) including a flow passage (44, 46, 48); a plunger (38) configured to move within the housing, wherein the plunger is hollow and has a plunger passage (46) included in the flow passage; a valve seat (52) in the housing and disposed in the flow passage immediately upstream of an inlet (44) to the plunger passage; a shuttle (42) within the housing configured to move between an upstream-most position at which the shuttle abuts the valve seat to close the flow passage and a downstream position displaced from the valve seat which opens the flow passage; a sealed chamber (26) within the housing and between the plunger and the shuttle, wherein the sealed chamber is configured to be operated at pressures other than at atmospheric pressure; and a port (66) in the housing and open to the sealed chamber, wherein the port is configured to be connected to a source (68) of a pressurized fluid.

Described herein is a technique capable of substantially cancelling out a machine difference of a pressure control valve. According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a sensor detecting a valve opening degree; a first control circuit outputting a valve opening degree control signal based on a valve opening degree value detected by the sensor and a deviation between a pressure of the process chamber and a target vacuum pressure value; a second control circuit outputting an electropneumatic control signal based on the valve opening degree control signal; and a span adjustment circuit adjusting the first or second control circuit so that an upper limit value of the valve opening degree is set to a predetermined full opening degree less than a physically defined full opening degree.

Solenoid-operated pressure-regulator modules, aircraft inflatable slide assemblies, and methods for assembling solenoid-operated pressure-regulator modules are described. The solenoid-operated pressure-regulator modules include a primary inflation valve, a secondary inflation valve, a secondary valve actuator, a solenoid, an inflatable slide, and a gas source. The solenoid-operated pressure-regulator modules are configured to selectively enable a fluid connection between a gas source and an inflatable slide to enable inflation of the inflatable slide. The primary inflation valve includes a main cavity, a command cavity, an inlet through which a gas enters the main cavity, an outlet, a poppet that controls a gas flow from the inlet to the outlet, and a valve divider separating the main cavity from the command cavity. The secondary inflation valve is fluidly coupled to the outlet of the primary inflation valve. The primary and secondary inflation valves are configured to be simultaneously operated by operation of the solenoid.

Solenoid-operated pressure-regulator modules, aircraft inflatable slide assemblies, and methods for assembling solenoid-operated pressure-regulator modules are described. The solenoid-operated pressure-regulator modules include a primary inflation valve, a secondary inflation valve, a secondary valve actuator, a solenoid, an inflatable slide, and a gas source. The solenoid-operated pressure-regulator modules are configured to selectively enable a fluid connection between a gas source and an inflatable slide to enable inflation of the inflatable slide. The primary inflation valve includes a main cavity, a command cavity, an inlet through which a gas enters the main cavity, an outlet, a poppet that controls a gas flow from the inlet to the outlet, and a valve divider separating the main cavity from the command cavity. The secondary inflation valve is fluidly coupled to the outlet of the primary inflation valve. The primary and secondary inflation valves are configured to be simultaneously operated by operation of the solenoid.

A vacuum pressure control system that can easily calculate an optimum valve open degree of a vacuum control valve for making a pressure value of a vacuum chamber agree with a target value is provided. A controller approximates a relation between the pressure value in the vacuum chamber and a flow rate of process gas to linear functions, and the system includes a mapping program and a valve-open-degree calculation program stored in the controller to calculate the optimum valve open degree of the vacuum control valve for making the pressure value in the vacuum chamber agree with the target value based on the linear functions when the process gas at the predetermined flow rate is supplied. The valve open degree of the vacuum control valve is adjusted based on the optimum valve open degree so that the pressure value in the vacuum chamber is made agree with the target value.

A valve device includes a valve body that defines flow paths, a diaphragm provided so as to be capable of opening and closing the flow paths, an operation member provided so as to be capable of moving in opening and closing directions that open and close the flow paths by operating the diaphragm, a main actuator that applies a driving force corresponding to an operating pressure applied in the opening direction or the closing direction of the opening and closing directions with respect to the operation member, a switching mechanism capable of selectively switching a position of the operation member that regulates a degree of opening of the flow paths between a first open position and a second open position in accordance with a magnitude of the operating pressure, and regulating mechanisms capable of independently regulating the first open position and the second open position.

A piston for an electromagnetically actuatable hydraulic valve wherein the piston is configured cylindrical and axially movable along a central opening that extends along a longitudinal axis of a housing of the electromagnetically actuatable hydraulic valve, wherein plural connections of the housing are opened or closed according to a position of the piston wherein the plural connections are flow connected with the central opening, wherein the hydraulic valve is hydraulically actuatable by a signal element, wherein a damping system is provided for reducing oscillations of a signal pressure of the signal element that impacts the piston, and wherein the damping system is configured in the piston that includes a receiving cavity for receiving the damping system.