Described herein is a technique capable of substantially cancelling out a machine difference of a pressure control valve. According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a sensor detecting a valve opening degree; a first control circuit outputting a valve opening degree control signal based on a valve opening degree value detected by the sensor and a deviation between a pressure of the process chamber and a target vacuum pressure value; a second control circuit outputting an electropneumatic control signal based on the valve opening degree control signal; and a span adjustment circuit adjusting the first or second control circuit so that an upper limit value of the valve opening degree is set to a predetermined full opening degree less than a physically defined full opening degree.

A valve device with pressure-reducing function, comprised of at least one logic valve (V1); one lock valve (V2); and one pressure-reducing valve (V3),
wherein the inlet (1) of the logic valve (V1) may be connected to a pressure supply source (HD), characterized in that the outlet (V1.2) of the logic valve (V1) and the outlet (V3.1) of the pressure reducing valve (V3) are connected together to an outlet or user port (A); and that the lock valve (V2) is connected with its inlet (V2.1) to the inlet (V1.1) of the logic valve (V1) as well as to a control side (V1.3) of the same, and with its outlet (V2.2) to an inlet (V3.2) of the pressure-reducing valve (V3).

Precision in proportional operation of pinch valves along an application-specific path of opening and/or of closing is provided in proportionally controlled pinch valves, systems and methods. Included is the advantageous feature that pinch valves and pinch valve controlling systems and methods can be enhanced by carefully controlling not only two primary operational positionseither fully open or fully closedbut also in-between positions as are required for an application of a user of the pinch valve. The effect on the fluid flowing through tubing that is engaged by the pinch valve head between fully open and fully closed is considered, determined and used to achieve pinch valve operation that is linear in flow change and/or linear in pressure change along the closing path and/or opening path through the tubing. The pinch valves can include a normally closed port that opens when the system experiences a shut-down condition.

A fluid system includes a controller, a control valve, and a fluid manifold. At least one solenoid may be connected to the fluid manifold, the control valve, and/or the controller. A first pressure sensor may be in fluid communication with an output of the control valve. A second pressure sensor may be in fluid communication with the fluid manifold. The controller may be configured to control operation of the control valve via the at least one solenoid according to a first fluid pressure obtained via the first pressure sensor and according to a second fluid pressure obtained via the second pressure sensor.

A pressure reducing valve (IOO) includes a displaceable throttling element (51) displaceable between a fully-open position in which fluid flows along a flow path from an inlet (11) to an outlet (45), and a closed position in which the flow path is blocked. A spring (6) acts to displace the displaceable throttling element to the fully-open position while pressure within a control chamber (54) acts on a pressure-actuated surface to displace the displaceable throttling element towards the closed position. A switchable hydraulic control circuit in fluid connection with the inlet, the outlet and the control chamber, is switchable between first state in which a pressure within the control chamber is equalized with the outlet pressure, and a second state in which the pressure within the control chamber is equalized with an inlet pressure.

An example valve includes: a sleeve; a first poppet configured to be seated on a first seat defined on an interior surface of the sleeve when the valve is in a closed state, and where the first poppet is configured to move axially within the sleeve; a second poppet disposed, at least partially, in the first poppet, where the second poppet is configured to be seated on a second seat defined on an interior surface of the first poppet, and where the second poppet is configured to move axially within the first poppet; a first spring that interfaces with the second poppet and applies a first force on the second poppet in a distal direction toward the second seat; and a second spring that interfaces with the second poppet and applies a second force on the second poppet in a proximal direction opposite the distal direction.

A fluid system includes a controller, a control valve, and a fluid manifold. A first solenoid may be connected to the fluid manifold, the control valve, and/or the controller. A second solenoid may be connected to the fluid manifold, the control valve, and/or the controller. A first pressure sensor may be in fluid communication with an output of the control valve. A second pressure sensor may be in fluid communication with the fluid manifold. The controller may be configured to control operation of the control valve via the first solenoid and the second solenoid according to a first fluid pressure obtained via the first pressure sensor and according to a second fluid pressure obtained via the second pressure sensor.

An example valve includes: a sleeve; a first poppet configured to be seated on a first seat defined on an interior surface of the sleeve when the valve is in a closed state, and where the first poppet is configured to move axially within the sleeve; a second poppet disposed, at least partially, in the first poppet, where the second poppet is configured to be seated on a second seat defined on an interior surface of the first poppet, and where the second poppet is configured to move axially within the first poppet; a first spring that interfaces with the second poppet and applies a first force on the second poppet in a distal direction toward the second seat; and a second spring that interfaces with the second poppet and applies a second force on the second poppet in a proximal direction opposite the distal direction.

A regulating piston for a pressure regulating shut-off valve comprises: a tubular sleeve; a first closed end; a second open end; a port defined in the tubular sleeve between the first and second ends, arranged to permit fluid flow between the exterior and interior of the regulating piston; and a support structure disposed within the piston arranged to direct fluid flow between the port and the second open end. The piston can be included in a pressure regulating shut-off valve, and methods for manufacturing the piston and valve.

A pressure regulating system includes a valve including a valve inlet and a valve outlet, a regulating piston positioned in a fluid pathway between the valve inlet and the valve outlet, a chamber in fluid communication with the regulating piston, a pressure setting valve in fluid communication with the chamber, a solenoid valve in fluid communication with the chamber and a sense line fluidly communicating with the valve inlet with the solenoid valve. The pressure setting valve is configured to vent gas to an ambient environment when a pressure within the chamber exceeds a threshold value. The solenoid valve is configured to move from a first position to a second position, the first position fluidly connecting the chamber with the sense line, and the second position fluidly connecting the chamber to the ambient environment (and thereby disconnecting the sense line from the chamber).