Patent classifications
G06T7/0006
SETTING UP CARE AREAS FOR INSPECTION OF A SPECIMEN
Methods and systems for setting up care areas (CAs) for inspection of a specimen are provided. One system includes an imaging subsystem configured for generating images of a specimen and a computer subsystem configured for determining a number of defects detected in predefined cells within one or more of the images generated in a repeating patterned area formed on the specimen. The computer subsystem is also configured for comparing the number of the defects detected in each of two or more of the predefined cells to a predetermined threshold and designating any one or more of the two or more of the predefined cells in which the number of the defects is greater than the predetermined threshold as one or more CAs. In addition, the computer subsystem is configured for storing information for the one or more CAs for use in inspection of the specimen.
Shape characteristic value estimation apparatus, shape characteristic value estimation method, and storage medium
An apparatus includes: a processed-image acquisition part for acquiring a processed image including image information of a surface of a substrate having a target film formed thereon; an estimation part for estimating a shape characteristic value of the target film, by applying an estimation model for estimating the shape characteristic value of the target film to the processed image; an underlying influence model creation part for creating an underlying influence model associated with a correlation between a difference between an estimation result of the shape characteristic value of the target film and a shape characteristic value of the target film acquired without using the estimation model, and information related to a color of a surface of an underlying substrate before the target film is formed, and an estimated-result correction part for correcting the estimation result of the shape characteristic value of the target film based on the underlying influence model.
Systems and methods of high-resolution review for semiconductor inspection in backend and wafer level packaging
A review system and operation method directs a beam of light toward a sample on a stage. The sample is a wafer level packaging wafer or a backend wafer. Defect review is performed based on the light reflected from the sample. The review system can use one or more of: a fluid supplied by an immersion subsystem that includes a fluid supply unit and a fluid removal unit; an illumination pattern for differential phase contrast; or ultraviolet or deep ultraviolet wavelengths.
METHOD AND SYSTEM FOR OPTIMIZING IMAGE DATA FOR GENERATING ORTHORECTIFIED IMAGE
A method for optimizing image data for generating orthorectified image(s) related to an area of interest in an environment. The method includes receiving a first image dataset of the area of interest captured therein, identifying each of multiple objects in the area of interest, receiving attribute information related to each of the multiple identified objects, determining if one or more of the multiple identified objects satisfy at least one of a risk criteria based on the attribute information therefor, identifying a maximum relevant second area including at least the area of interest and each of the one or more of the multiple identified objects satisfying the at least one of risk criteria, and processing the first image dataset to either discard or down-sample areas other than the maximum relevant second area captured therein.
FIDUCIALS FOR USE IN REGISTRATION OF A PATTERNED SURFACE
Registration of a patterned flow cell may utilize fiducials comprising sets or groupings of features (e.g., sites, sample wells, nanowells) having known locations and in which the placement of the features is not in accordance with a periodic pattern or is otherwise distinguishable from the periodic pattern of sites present in non-fiducial regions of the flow cell substrate. In certain embodiments the positioning of the sites that are part of the fiducial represent a break or discontinuity in the periodic pattern of sites that are otherwise present on the surface of a patterned flow cell.
METHOD FOR CREATING A DIGITAL TWIN OF AN INFRASTRUCTURE COMPONENT
Systems and methods for creating a digital twin of an infrastructure component. The digital twin is a computerized, three-dimensional model of the component, typically a pipe, created after manufacture but before installation. The digital twin can be saved on a computer-readable storage medium for later retrieval, and can be loaded into three-dimensional modeling software for manipulation and viewing from various angles and perspectives. The twin is created from a plurality of imaging systems capturing different surfaces or different aspects, whose measurements are mapped to a uniform coordinate system to generate a three-dimensional model. Other data may also be added to or stored with the digital twin, such as manufacturing specifications, photographic data, and current or historical inspection data. The digital twin may be viewed on a mobile device programmed to receive, display, and allow the user to view and manipulate the digital twin.
Systems and methods for data collection and performance monitoring of transportation infrastructure
The present invention provides a data collection system comprising: a camera; a location module; a plurality of sensors; and a first processor communicatively coupled to the camera and the location module, the first processor programmed to: obtain a plurality of frames from the camera; obtain a plurality of locations from the location module; obtain a plurality of data measurements from the plurality of sensors; apply a previously trained first neural network model for identifying problematic road segments to frames captured by the camera; and if the first neural network model indicates that a frame is a problematic road segment, save the frame in association with a location provided by the location module.
METHOD AND APPARATUS FOR IMAGE PROCESSING, ELECTRONIC DEVICE, AND COMPUTER STORAGE MEDIUM
A method and apparatus for image processing, an electronic device, and a computer storage medium are provided. The method includes that: at least one frame of game platform image is acquired; the at least one frame of game platform image is detected to obtain a detection result of each of the at least one frame of game platform image, the detection result at least including position information of at least one money substitute; and under a condition that the position information of the at least one money substitute meets a preset alerting condition, first alert information is generated.
Method of defect classification and system thereof
There are provided system and method of classifying defects in a specimen. The method includes: obtaining one or more defect clusters detected on a defect map of the specimen, each cluster characterized by a set of cluster attributes comprising spatial attributes including spatial density indicative of density of defects in one or more regions accommodating the cluster, each given defect cluster being detected at least based on the spatial density thereof meeting a criterion. The defect map also comprises non-clustered defects. Defects of interest (DOI) are identified in each cluster by performing respective defect filtrations for each cluster and non-clustered defects.
DIE SYSTEM AND METHOD OF COMPARING ALIGNMENT VECTORS
Embodiments of the present disclosure include a die system and a method of comparing alignment vectors. The die system includes a plurality of dies arranged in a desired pattern. An alignment vector, such as a die vector, can be determined from edge features of the die. The alignment vectors can be compared to other dies or die patterns in the same system. A method of comparing dies and die patterns includes comparing die vectors and/or pattern vectors. The comparison between alignment vectors allows for fixing the die patterns for the next round of processing. The methods provided allow accurate comparisons between as-deposited edge features, such that accurate stitching of dies can be achieved.