Patent classifications
G06T2207/10061
SAMPLE OBSERVATION DEVICE AND METHOD
In learning processing performed before sample observation processing (steps S705 to S708), the sample observation device acquires a low-picture quality learning image under a first imaging condition for each defect position indicated by defect position information, determines an imaging count of a plurality of high-picture quality learning images associated with the low-picture quality learning image for each defect position and a plurality of imaging points based on a set value of the imaging count, acquires the plurality of high-picture quality learning images under a second imaging condition (step S702), learns a high-picture quality image estimation model using the low-picture quality learning image and the plurality of high-picture quality learning images (step S703), and adjusts a parameter related to the defect detection in the sample observation processing using the high-picture quality image estimation model (step S704).
Dimension measuring device, dimension measuring method, and semiconductor manufacturing system
The present disclosure relates to a dimension measuring device that shortens a time required for dimension measurement and eliminates errors caused by an operator. A dimension measuring device that measures a dimension of a measurement target using an input image is provided, in which a first image in which each region of the input image is labeled by region is generated by machine learning, an intermediate image including a marker indicating each region of the first image is generated based on the generated first image, a second image in which each region of the input image is labeled by region is generated based on the input image and the generated intermediate image, coordinates of a boundary line between adjacent regions are obtained by using the generated second image, coordinates of a feature point that defines a dimension condition of the measurement target are obtained by using the obtained coordinates of the boundary line, and the dimension of the measurement target is measured by using the obtained coordinates of the feature point.
Material properties from two-dimensional image
A method for analyzing a rock sample includes segmenting a digital image volume corresponding to an image of the rock sample, to associate voxels in the digital image volume with a plurality of rock fabrics of the rock sample. The method also includes identifying a set of digital planes through the digital image volume. The set of digital planes intersects with each of the plurality of rock fabrics. The method further includes machining the rock sample to expose physical faces that correspond to the identified digital planes, performing scanning electron microscope (SEM) imaging of the physical faces to generate two-dimensional (2D) SEM images of the physical faces, and performing image processing on the SEM images to determine a material property associated with each of the rock fabrics.
Method, device and program for processing diffraction images of a crystalline material
The invention relates to a method for processing images obtained by a diffraction detector, of a crystalline or polycrystalline material, in which a first image of the material is acquired in a state of reference as well as a second image of the material in a deformed state. The invention is characterised in that, in a calculator, during a first step (E6, E12), a current elastic deformation gradient tensor F.sup.e is given a value determined by calculation, during a second step (E7), the current displacement field induced by the tensor F.sup.e is calculated, during a third step (E8), third digital values of a deformed image {hacek over (g)}(x)=g(x+u(x)) corrected by the current displacement field are calculated, and during an iterative algorithm, iterations of the second and third steps (E12, E7, E8) are carried out on modified values of the tensor r F.sup.e until a convergence criterion is met in relation to the correction to the current value of F.sup.e.
Method of defect classification and system thereof
There are provided system and method of classifying defects in a specimen. The method includes: obtaining one or more defect clusters detected on a defect map of the specimen, each cluster characterized by a set of cluster attributes comprising spatial attributes including spatial density indicative of density of defects in one or more regions accommodating the cluster, each given defect cluster being detected at least based on the spatial density thereof meeting a criterion. The defect map also comprises non-clustered defects. Defects of interest (DOI) are identified in each cluster by performing respective defect filtrations for each cluster and non-clustered defects.
Method for displaying index values in generation of mask pattern verification model
According to one embodiment, a method for displaying an index value in generation of a mask pattern verification model includes: calculating a first index value using a plurality of images; estimating a model on the basis of the first index value and pattern information; calculating a second index value using the model; and displaying at least one of the first index value and the second index value.
METHOD BASED ON IMAGE CONDITIONING AND PREPROCESSING FOR HUMAN EMBRYO CLASSIFICATION
The invention relates to a method that allows a set of embryos to be ranked on the basis of ploidy potential and/or pregnancy generation potential, to aid the process of selecting embryos for transfer in an in-vitro fertilisation procedure. The method measures properties or characteristics of the entire blastocyst; extracts characteristics by identifying different cell types, mainly blastocyst structures and patterns, without extracting characteristics of the first cell divisions and the behaviour thereof over time; and predicts the prognosis of pregnancy and/or ploidy (result of genetic study and successful implantation), using micrographs standardised for the management thereof and by means of sequential preprocessing and machine learning algorithms implemented in a computer in order to rank the potential of a set of embryos, to obtain a successful, live, full-term pregnancy.
SEMANTIC UNDERSTANDING OF DYNAMIC IMAGERY USING BRAIN EMULATION NEURAL NETWORKS
Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for receiving sensor data generated by one or more sensors that characterizes motion of an object over multiple time steps, providing the sensor data characterizing the motion of the object to a motion prediction neural network having a brain emulation sub-network with an architecture that is specified by synaptic connectivity between neurons in a brain of a biological organism, and processing the sensor data characterizing the motion of the object using the motion prediction neural network having the brain emulation sub-network to generate a network output that defines a prediction characterizing the motion of the object.
System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control
In one embodiment, a method includes generating a model trained to predict a low-probability stochastic defect, using the model to predict the low-probability stochastic defect, determining a process window based on the low-probability stochastic defect, and controlling, based on the process window, a lithography tool to manufacture a device.
MULTI-STEP PROCESS INSPECTION METHOD
An image analysis method for identifying features in an image of a part of an array of features formed by a multi-step process, the method comprising: analyzing variations in features visible in the image; and associating features of the image with steps of the multi-step process based at least in part on results of the analyzing.