A film production method for producing a thin film on a surface of a workpiece, including the steps of: disposing the workpiece in a chamber; supplying a process gas into the chamber with the inside of the chamber being maintained at a predetermined pressure; applying a light having an energy between 3 eV and 10 eV to the surface of the workpiece to cause a photoelectron to be emitted from the surface of the workpiece; and applying an AC electric field to the surface of the workpiece, wherein the AC electric field has an electric field intensity causing a Townsend discharge to occur without generating a glow discharge plasma.

A magnetic recording medium includes a substrate, an underlayer formed on the substrate, and a magnetic layer formed on the underlayer. The magnetic layer includes an alloy having a L1.sub.0 structure. The underlayer includes a first underlayer and a second underlayer. The first underlayer includes Mo and Ru, the content of Ru in the first underlayer is in a range of 5 atom % to 30 atom %, and the second underlayer includes a material having a body-centered cubic (BCC) structure. The second underlayer is formed between the first underlayer and the substrate.

A magnetic recording cartridge includes a magnetic recording medium of which an average thickness t.sub.T is t.sub.T5.6 m, a dimensional change amount w in a width direction with respect to a tension change in a longitudinal direction is 660 ppm/Nw, and a squareness ratio in a vertical direction is 65% or more, in which the magnetic recording medium is accommodated in a state of being wound around a reel and (a servo track width on an inner side of winding of the magnetic recording medium)(a servo track width on an outer side of winding of the magnetic recording medium)>0 is satisfied.

A magnetic recording cartridge is provided and including a magnetic recording medium, wherein an average thickness of the magnetic recording medium t.sub.T is 3.5 mt.sub.T 5.6 m, a dimensional change amount w in a width direction of the magnetic recording medium with respect to a tension change in a longitudinal direction of the magnetic recording medium is 700 ppm/Nw 20000 ppm, the magnetic recording medium is accommodated in a state of being wound around the reel in the cartridge case and (a servo track width on an inner side of winding of the magnetic recording medium)-(a servo track width on an outer side of winding of the magnetic recording medium) > is satisfied, and a squareness ratio measured in a vertical direction of the magnetic recording medium is 65% or more.

A magnetic recording cartridge includes a magnetic recording medium of which an average thickness t.sub.T is t.sub.T5.6 m, a dimensional change amount w in a width direction with respect to a tension change in a longitudinal direction is 660 ppm/Nw, and a squareness ratio in a vertical direction is 65% or more, in which the magnetic recording medium is accommodated in a state of being wound around a reel and (a servo track width on an inner side of winding of the magnetic recording medium)(a servo track width on an outer side of winding of the magnetic recording medium)>0 is satisfied.

A heat-assisted magnetic recording (HAMR) medium has a non-magnetic multilayered overcoat on the recording layer. The overcoat includes a heat-dissipation layer, a diamond-like carbon (DLC) layer on and in contact with the heat-dissipation layer, and an optional interface layer between and in contact with the recording layer and the heat-dissipation layer. The heat-dissipation layer is a material with relatively high in-plane thermal conductivity, substantially higher than the in-plane thermal conductivity of both the DLC layer and the recording layer. The heat-dissipation layer laterally spreads the heat generated in the DLC layer by absorption of light from the near-field transducer to thereby reduce the temperature of the DLC layer. The optional interface layer is a material with relatively low thermal conductivity and increases the thermal resistance between the recording layer and the heat-dissipation layer.

A magnetic recording medium includes a layer structure including a magnetic layer, a base layer, and a back layer in this order, in which an average thickness t.sub.T is t.sub.T5.5 m, a dimensional variation w in a width direction to tension change in a longitudinal direction is 660 ppm/Nw, and a surface roughness R.sub.abe of the base layer on a side of the back layer is 4.2 nmR.sub.abe8.5 nm.

A magnetic recording cartridge is provided and including a magnetic recording medium, wherein an average thickness of the magnetic recording medium t.sub.T is 3.5 mt.sub.T5.6 m, a dimensional change amount w in a width direction of the magnetic recording medium with respect to a tension change in a longitudinal direction of the magnetic recording medium is 700 ppm/Nw20000 ppm, and the magnetic recording medium is accommodated in a state of being wound around the reel in the cartridge case and (a servo track width on an inner side of winding of the magnetic recording medium)(a servo track width on an outer side of winding of the magnetic recording medium)>0 is satisfied.

A plasma CVD device includes a chamber (102), an anode (104), a cathode (103), a holding portion which holds a substrate to be deposited (101) a plasma wall (88) an anti-adhesion member (91) which is arranged between a first gap (81) between the anode and the plasma wall and a first inner surface (102a) of the chamber and a pedestal (92) which is arranged between the anti-adhesion member and a back surface of the anode and which is electrically connected to the anode. The maximum diameter of each of the first gap, a second gap (82) between the anode and the anti-adhesion member, a third gap (83) between the back surface of the anode and the pedestal, a fourth gap (84) between the plasma wall and the anti-adhesion member and a fifth gap (85) between the anti-adhesion member and the pedestal is equal to or less than 4 mm.

A magnetic recording device includes a substrate, an intermediate layer disposed on the substrate, a magnetic recording layer disposed on the intermediate layer, and a graphene overcoat disposed on the magnetic recording layer. The graphene overcoat includes at least one layer of a graphene monoatomic layer which is a sheet-like monoatomic layer of sp2 bonded carbon atoms. A transition layer is interposed between the graphene overcoat and the magnetic recording layer. The transition layer includes carbon and at least one metal of the magnetic recording layer.