G11C11/223

Memory device, memory cell arrangement, and methods thereof
11508426 · 2022-11-22 · ·

Various aspects relate to a memory cell arrangement including: a field-effect transistor based capacitive memory cell including a memory element, wherein a memory state of the memory element defines a first memory state of the field-effect transistor based capacitive memory cell and wherein a second memory state of the memory element defines a second memory state of the field-effect transistor based capacitive memory cell; and a memory controller configured to, in the case that a charging state of the field-effect transistor based capacitive memory cell screens an actual threshold voltage state of the field-effect transistor based capacitive memory cell, cause a destructive read operation to determine whether the field-effect transistor based capacitive memory cell was, prior to the destructive read operation, residing in the first memory state or in the second memory state.

METHOD FOR MANUFACTURING SRAM MEMORY CIRCUIT

A method includes forming a first transistor, a second transistor, a third transistor, and a fourth transistor over a substrate, wherein at least the second and third transistors include ferroelectric materials; forming an interlayer dielectric (ILD) layer over the first to fourth transistors; forming a first metal line over the ILD layer to interconnect drains of the second and third transistors and a gate of the fourth transistor; forming a second metal line over the ILD layer to interconnect a drain of the first transistor and gates of the second and third transistors; forming a write word line over the ILD layer and electrically connected to a gate of the first transistor but electrically isolated from the fourth transistor; forming a word line over the ILD layer and electrically connected to a source of the first transistor; and forming a bit line electrically connected to the fourth transistor.

3D SYNAPSE DEVICE STACK, 3D STACKABLE SYNAPSE ARRAY USING THE 3D SYNAPSE DEVICE STACKS AND METHOD OF FABRICATING THE STACK

Provided is a 3D synapse device stack, a 3D stackable synapse array using the same, and a method for manufacturing the 3D synapse device stack. The 3D synapse device stack comprises: a channel hole provided along a vertical direction on a substrate; a semiconductor body formed by applying a semiconductor material to the surface of the channel hole; first insulating layers and sources alternately stacked on a first side surface of an outer circumferential surface of the semiconductor body; first insulating layers and drains alternately stacked on a second side surface of an outer circumferential surface of the semiconductor body; a source line electrode connected to and in contact with a plurality of sources; a drain line electrode connected to and in contact with the plurality of drains; a plurality of word lines alternately stacked with first insulating layers on a third side surface of an outer circumferential surface of the semiconductor body; and a plurality of insulator stacks positioned between the word lines and the semiconductor body, wherein the semiconductor body, the source, the drain, the insulator stack, and the word line positioned on the same layer on the surface of the channel hole constitute a synapse device or a part thereof. The synapse device stack may implement an AND-type or NOR-type synapse array.

PROBABILISTIC COMPUTING DEVICES BASED ON STOCHASTIC SWITCHING IN A FERROELECTRIC FIELD-EFFECT TRANSISTOR

A pbit device, in one embodiment, includes a first field-effect transistor (FET) that includes a source region, a drain region, a source electrode on the source region, a drain electrode on the drain region, a channel region between the source and drain regions, a dielectric layer on a surface over the channel region, an electrode layer above the dielectric layer, and a ferroelectric (FE) material layer between the dielectric layer and the electrode layer. The pbit device also includes a second FET comprising a source electrode, a drain electrode, and a gate electrode. The drain electrode of the second FET is connected to the drain electrode of the first FET.

Memory cell with a ferroelectric capacitor integrated with a transtor gate

Described herein are ferroelectric (FE) memory cells that include transistors having gates with FE capacitors integrated therein. An example memory cell includes a transistor having a semiconductor channel material, a gate dielectric over the semiconductor material, a first conductor material over the gate dielectric, a FE material over the first conductor material, and a second conductor material over the FE material. The first and second conductor materials form, respectively, first and second capacitor electrodes of a capacitor, where the first and second capacitor electrodes are separated by the FE material (hence, a “FE capacitor”). Separating a FE material from a semiconductor channel material of a transistor with a layer of a gate dielectric and a layer of a first conductor material eliminates the FE-semiconductor interface that may cause endurance issues in some other FE memory cells.

Antiferroelectric memory devices and methods of making the same

An antiferroelectric memory device includes at least one antiferroelectric memory cell. Each of the at least one antiferroelectric memory cell includes a first electrode, a second electrode and a stack containing an antiferroelectric layer and a doped semiconductor layer or a ferroelectric layer located between the first and the second electrodes.

FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME

A memory cell includes a transistor over a semiconductor substrate. The transistor includes a ferroelectric layer arranged along a sidewall of a word line. The ferroelectric layer includes a species with valence of 5, valence of 7, or a combination thereof. An oxide semiconductor layer is electrically coupled to a source line and a bit line. The ferroelectric layer is disposed between the oxide semiconductor layer and the word line.

Three-Dimensional Memory Device and Methods of Forming

A method for forming a memory device includes: forming a first layer stack and a second layer stack successively over a substrate, wherein each of the first and the second layer stacks comprises a dielectric layer, a channel layer, and a source/drain layer formed successively over the substrate; forming openings that extends through the first layer stack and the second layer stack, where the openings includes first openings within boundaries of the first and the second layer stacks, and a second opening extending from a sidewall of the second layer stack toward the first openings; forming inner spacers by replacing portions of the source/drain layer exposed by the openings with a dielectric material; lining sidewalls of the openings with a ferroelectric material; and forming first gate electrodes in the first openings and a dummy gate electrode in the second opening by filling the openings with an electrically conductive material.

METHODS OF OPERATING MULTI-BIT MEMORY STORAGE DEVICE

A method (of reading a ferroelectric field-effect transistor (FeFET) configured as a 2-bit storage device that stores two bits, wherein the FeFET includes a first source/drain (S/D) terminal, a second S/D terminal, a gate terminal and a ferroelectric layer, a second bit being at a first end of the ferroelectric layer, the first end being proximal to the first S/D terminal) includes reading the second bit including: applying a gate sub-threshold voltage to the gate terminal; applying a read voltage to the second S/D terminal; applying a do-not-disturb voltage to the first S/D terminal; and sensing a first current at the second S/D terminal; and wherein the read voltage is lower than the do-not-disturb voltage.

Memory Array Including Dummy Regions

3D memory arrays including dummy conductive lines and methods of forming the same are disclosed. In an embodiment, a memory array includes a ferroelectric (FE) material over a semiconductor substrate, the FE material including vertical sidewalls in contact with a word line; an oxide semiconductor (OS) layer over the FE material, the OS layer contacting a source line and a bit line, the FE material being between the OS layer and the word line; a transistor including a portion of the FE material, a portion of the word line, a portion of the OS layer, a portion of the source line, and a portion of the bit line; and a first dummy word line between the transistor and the semiconductor substrate, the FE material further including first tapered sidewalls in contact with the first dummy word line.