An inspection master can perform three- and five-axis measurements wherein measurement in a rotation axis or/and turning axis direction for a five-axis processing machine is added. In one aspect, peripheral-surface spherical reference portions protrudes laterally on a peripheral surface of a master main body having a tubular shape, including the peripheral surface and an upper surface, and an upper reference ball for detection of an inclination angle of the body protrudes upward on the upper surface. The reference portions are provided at two or more portions of the peripheral surface in a circumferential direction thereof. In another aspect, an upper reference ball protrudes upward on the upper surface, and upper-surface spherical reference portions protrudes upward at one or more portions of the upper surface on an outer side with respect to the ball. In another aspect, both the peripheral-surface and upper-surface spherical reference portions are on the master main body.

An inspection master can perform three- and five-axis measurements wherein measurement in a rotation axis or/and turning axis direction for a five-axis processing machine is added. In one aspect, peripheral-surface spherical reference portions protrudes laterally on a peripheral surface of a master main body having a tubular shape, including the peripheral surface and an upper surface, and an upper reference ball for detection of an inclination angle of the body protrudes upward on the upper surface. The reference portions are provided at two or more portions of the peripheral surface in a circumferential direction thereof. In another aspect, an upper reference ball protrudes upward on the upper surface, and upper-surface spherical reference portions protrudes upward at one or more portions of the upper surface on an outer side with respect to the ball. In another aspect, both the peripheral-surface and upper-surface spherical reference portions are on the master main body.

Provided are a displacement detector, a surface shape measuring apparatus, and a roundness measuring apparatus capable of measuring displacement in a plurality of directions, having a simple configuration, and capable of highly accurate measurement. A displacement measurer includes: a detector body; a substantially L-shaped stylus having a contactor to be in contact with a measuring surface of an object to be measured; a stylus holding part that is provided in the detector body and holds the stylus in a swingable manner, with a swing plane being a plane including a first direction and a second direction that are perpendicular to each other; and a displacement detecting unit that is provided in the detector body and detects displacement of the contactor associated with contact between the contactor and the measuring surface.

Provided are a displacement detector, a surface shape measuring apparatus, and a roundness measuring apparatus capable of measuring displacement in a plurality of directions, having a simple configuration, and capable of highly accurate measurement. A displacement measurer includes: a detector body; a substantially L-shaped stylus having a contactor to be in contact with a measuring surface of an object to be measured; a stylus holding part that is provided in the detector body and holds the stylus in a swingable manner, with a swing plane being a plane including a first direction and a second direction that are perpendicular to each other; and a displacement detecting unit that is provided in the detector body and detects displacement of the contactor associated with contact between the contactor and the measuring surface.

Provided is a defect judging unit for a measuring probe including: a stylus; four detection elements; and a signal processing part. The defect judging unit includes a defect judging part configured to compare four judged signals corresponding to the generated signals with predetermined thresholds when the object to be measured and the contact part are out of contact with each other and judge that a defect exists if any of the judged signals is greater than the predetermined threshold, and a judged result output part configured to output a judged result of the defect judging part. According to this configuration, the defect judging unit of the measuring probe and the defect judging method thereof capable of ensuring measurement reliability with a simple configuration are provided.

Provided is a defect judging unit for a measuring probe including: a stylus; four detection elements; and a signal processing part. The defect judging unit includes a defect judging part configured to compare four judged signals corresponding to the generated signals with predetermined thresholds when the object to be measured and the contact part are out of contact with each other and judge that a defect exists if any of the judged signals is greater than the predetermined threshold, and a judged result output part configured to output a judged result of the defect judging part. According to this configuration, the defect judging unit of the measuring probe and the defect judging method thereof capable of ensuring measurement reliability with a simple configuration are provided.

An inductive position detection configuration for stylus position measurement in a scanning probe comprises a stylus position detection portion arranged along a central axis in the probe. The stylus position detection portion includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. A field generating coil coupling and crosstalk reducing configuration couples signal processing and control circuitry to the field generating coil configuration to provide a coil drive signal, and is configured to reduce crosstalk that would otherwise occur if the field generating coil configuration were directly connected to the signal processing and control circuitry without the field generating coil coupling and crosstalk reducing configuration.

Probes are provided with caps, the caps comprise rolling bearing elements so that the probes can be slid along a surface to be measured, without damaging the surface or wearing away the tip of the probe or a sacrificial cap. The rolling bearing elements can be arranged in a ring around the probe tip, with the plane of the foremost edges of the rolling bearing elements a predetermined distance from the probe tip. The caps can comprise a housing with a grip, to encourage users to grip the cap, which comprises the rolling bearing elements, rather than the probe.

Probes are provided with caps, the caps comprise rolling bearing elements so that the probes can be slid along a surface to be measured, without damaging the surface or wearing away the tip of the probe or a sacrificial cap. The rolling bearing elements can be arranged in a ring around the probe tip, with the plane of the foremost edges of the rolling bearing elements a predetermined distance from the probe tip. The caps can comprise a housing with a grip, to encourage users to grip the cap, which comprises the rolling bearing elements, rather than the probe.

A coordinate measuring machine for measuring coordinates or properties of a workpiece includes an extended stylus. The extended stylus includes an extension element and a connection element. The extension element includes a carrier portion mounted at the connection element so as to be rotatable about an axis of rotation. The extension element includes, on a side remote from the connection element, a shaft portion that is aligned so as to deviate from the axis of rotation. The coordinate measuring machine includes a measurement head to which the extended stylus is attached. The measurement head is configured to measure deflections of the stylus resulting from contacts of the extended stylus to the workpiece.