A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

The present invention relates to a shape measurement apparatus comprising: a driving body 130; a measurement arm part 110 having a stylus 111 coming into contact with an object to be measured, and an arm 113 for supporting the stylus 111 so that the stylus 111 comes into contact with the object to be measured; a measurement arm support part 120 coupled to an end of the arm 113; a pivot 121 for rotatably supporting the measurement arm support part 120 with respect to the driving body 130; and an actuator part 140 for controlling the measurement arm support part 120 to rotate up and down with respect to the pivot 121 so that the stylus 111 moves along the object to be measured. The actuator part 140 comprises: a casing 141 partitioned into an upper space and a lower space by a partition wall 141a; an arm coupling base 142 for connecting the casing and the measuring arm support part 120; an upper actuator 143 provided in the upper space; and a lower actuator 145 provided in the lower space, wherein the upper actuator and the lower actuator 145 each comprise: magnetic coupling plates 143a, 145a; first magnets 143b, 145b provided in an upper portion of the magnetic coupling plates 143a, 145a; second magnets 143c, 145c provided in a lower portion of the magnetic coupling plates 143a, 145a; and coils 143d, 145d coupled to the arm coupling base 142 and surrounding the magnetic coupling plates 143a, 145a.

There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.

There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.

Provided is a defect judging unit for a measuring probe including: a stylus; four detection elements; and a signal processing part. The defect judging unit includes a defect judging part configured to compare four judged signals corresponding to the generated signals with predetermined thresholds when the object to be measured and the contact part are out of contact with each other and judge that a defect exists if any of the judged signals is greater than the predetermined threshold, and a judged result output part configured to output a judged result of the defect judging part. According to this configuration, the defect judging unit of the measuring probe and the defect judging method thereof capable of ensuring measurement reliability with a simple configuration are provided.

An inductive position detection configuration for stylus position measurement in a scanning probe comprises a stylus position detection portion arranged along a central axis in the probe. The stylus position detection portion includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. A field generating coil coupling and crosstalk reducing configuration couples signal processing and control circuitry to the field generating coil configuration to provide a coil drive signal, and is configured to reduce crosstalk that would otherwise occur if the field generating coil configuration were directly connected to the signal processing and control circuitry without the field generating coil coupling and crosstalk reducing configuration.

The present invention relates to a shape measurement apparatus comprising: a driving body 130; a measurement arm part 110 having a stylus 111 coming into contact with an object to be measured, and an arm 113 for supporting the stylus 111 so that the stylus 111 comes into contact with the object to be measured; a measurement arm support part 120 coupled to an end of the arm 113; a pivot 121 for rotatably supporting the measurement arm support part 120 with respect to the driving body 130; and an actuator part 140 for controlling the measurement arm support part 120 to rotate up and down with respect to the pivot 121 so that the stylus 111 moves along the object to be measured. The actuator part 140 comprises: a casing 141 partitioned into an upper space and a lower space by a partition wall 141a; an arm coupling base 142 for connecting the casing and the measuring arm support part 120; an upper actuator 143 provided in the upper space; and a lower actuator 145 provided in the lower space, wherein the upper actuator and the lower actuator 145 each comprise: magnetic coupling plates 143a, 145a; first magnets 143b, 145b provided in an upper portion of the magnetic coupling plates 143a, 145a; second magnets 143c, 145c provided in a lower portion of the magnetic coupling plates 143a, 145a; and coils 143d, 145d coupled to the arm coupling base 142 and surrounding the magnetic coupling plates 143a, 145a.

An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. At least one misalignment compensation element is configured to reduce a signal offset that results from a misalignment of at least one coil of the coil board configuration (e.g., the coil board configuration may comprise a printed circuit board with a plurality of layers in which the coils are located and the misalignment of the at least one coil may result from a registration error, such as within manufacturing tolerances, in a layer to layer registration as part of a fabrication process).

A measuring system (15) includes a measuring arm receiving unit (18) mounted on the housing (49) or on an axial pin (30) connected to the housing (49) for conjoint rotation so as to be rotatable or pivotable about the axis of rotation (D). A measuring arm (16) can be arranged on the measuring arm receiving unit (18). A motor unit (24) generates a motor torque about the axis of rotation (D) on the measuring arm receiving unit (18). The measuring arm unit (18) is mounted by a ball bearing guide unit (39) to be rotatable about the axis of rotation (D) in the peripheral direction and displaceably along the axis of rotation (D) in the axial direction A. An axial position of the measuring arm unit (18) in the axial direction is defined with the aid of a magnetic axial bearing device (46) and is maintained during operation.

A measuring system (15) includes a measuring arm receiving unit (18) mounted on the housing (49) or on an axial pin (30) connected to the housing (49) for conjoint rotation so as to be rotatable or pivotable about the axis of rotation (D). A measuring arm (16) can be arranged on the measuring arm receiving unit (18). A motor unit (24) generates a motor torque about the axis of rotation (D) on the measuring arm receiving unit (18). The measuring arm unit (18) is mounted by a ball bearing guide unit (39) to be rotatable about the axis of rotation (D) in the peripheral direction and displaceably along the axis of rotation (D) in the axial direction A. An axial position of the measuring arm unit (18) in the axial direction is defined with the aid of a magnetic axial bearing device (46) and is maintained during operation.