G01B9/02003

Laser interference device
11353315 · 2022-06-07 · ·

A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.

Laser interference device
11353315 · 2022-06-07 · ·

A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.

Optical distance measurement device and processing device

The optical distance measurement device is configured in such a manner that the frequency-swept light output unit outputs frequency-swept light during a time period from when frequency sweeping of frequency-swept light being output is completed to when the next frequency sweeping becomes possible, the frequency-swept light output during the time period being frequency swept at a different frequency from the frequency-swept light being output.

Configuration and Operation of Array of Self-Mixing Interferometry Sensors
20220155052 · 2022-05-19 ·

A sensor system includes a self-mixing interferometry sensor; a drive circuit configured to apply a modulated drive signal to an input of the self-mixing interferometry sensor; a mixer circuit configured to mix a modulated output of the self-mixing interferometry sensor with a local oscillator signal that is orthogonal to the modulated drive signal over a period of time; an integrator circuit configured to integrate an output of the mixer circuit over the period of time; and a processor configured to determine, using an output of the integrator circuit, at least one of a round-trip propagation time of electromagnetic radiation emitted by the self-mixing interferometry sensor and reflected back into the self-mixing interferometry sensor by an object or medium, or a velocity of the object or medium.

OPTICAL SYSTEMS WITH CONTROLLED MIRROR ARRANGEMENTS

An optical system can include a mirror that reflects incoming light to a sensor for detection. The position and/or orientation of the mirror can be controlled to reflect incoming light from different locations and/or directions. Position and/or orientation of the mirror may be tracked and/or detected by an optical position sensor. The position sensor can transmit a beam to a reflector on the mirror, and the reflected beam can be received by the position sensor. Characteristics of the reflected beam can be measured to determine the position and/or orientation of the mirror. For example, the beam can be used for interferometric and/or intensity measurements, which can then be correlated with a position and/or orientation of the mirror.

OPTICAL SYSTEMS WITH CONTROLLED MIRROR ARRANGEMENTS

An optical system can include a mirror that reflects incoming light to a sensor for detection. The position and/or orientation of the mirror can be controlled to reflect incoming light from different locations and/or directions. Position and/or orientation of the mirror may be tracked and/or detected by an optical position sensor. The position sensor can transmit a beam to a reflector on the mirror, and the reflected beam can be received by the position sensor. Characteristics of the reflected beam can be measured to determine the position and/or orientation of the mirror. For example, the beam can be used for interferometric and/or intensity measurements, which can then be correlated with a position and/or orientation of the mirror.

Method and system for interferometry

An interferometer system comprises a sample interferometer arm for guiding a first wave to a sample, and receiving a reflected wave from the sample and a phase amplifier for amplifying a phase shift of the reflected wave, to provide phase-shift-amplified intermediate wave. The interferometer system can also comprise an additional interferometer arm for guiding an additional wave to combine with the intermediate wave, to provide an output wave, and a detector for detecting the output wave.

Method and system for interferometry

An interferometer system comprises a sample interferometer arm for guiding a first wave to a sample, and receiving a reflected wave from the sample and a phase amplifier for amplifying a phase shift of the reflected wave, to provide phase-shift-amplified intermediate wave. The interferometer system can also comprise an additional interferometer arm for guiding an additional wave to combine with the intermediate wave, to provide an output wave, and a detector for detecting the output wave.

Swept frequency photonic integrated circuit for absolute metrology
11320255 · 2022-05-03 · ·

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a tunable laser source implemented on the photonic integrated circuit configured to sweep over a frequency range to provide multi-wavelength light, a first waveguide structure implemented on the photonic integrated circuit configured to direct a first portion of light from the laser source at a moving object and receive light reflected from the moving object, a second waveguide structure implemented on the photonic integrated circuit configured to combine a second portion of light from the laser source with the light reflected from the moving object to produce a measurement beam, and a first detector implemented on the photonic integrated circuit configured to detect intensity values of the measurement beam to measure a distance between the digital measuring device and the moving object.

Swept frequency photonic integrated circuit for absolute metrology
11320255 · 2022-05-03 · ·

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a tunable laser source implemented on the photonic integrated circuit configured to sweep over a frequency range to provide multi-wavelength light, a first waveguide structure implemented on the photonic integrated circuit configured to direct a first portion of light from the laser source at a moving object and receive light reflected from the moving object, a second waveguide structure implemented on the photonic integrated circuit configured to combine a second portion of light from the laser source with the light reflected from the moving object to produce a measurement beam, and a first detector implemented on the photonic integrated circuit configured to detect intensity values of the measurement beam to measure a distance between the digital measuring device and the moving object.