Patent classifications
G01B9/02004
OPTICAL INTERFERENCE RANGE SENSOR
A light source projects a light beam. An interferometer includes a splitting unit that splits the light beam. The interferometer generates interference beams with the respective split light beams. Each of the interference beam is generated by interference between a measurement beam radiated toward the measurement target and reflected at the measurement beam and a reference beam passing through an optical path. A light-receiving unit receives the interference beams. A processor calculates a distance to the measurement target by associating at least one detected peak with at least one of the spots in accordance with a mirror surface mode or a rough surface mode. The optical path length difference is made different among the split light beams. In the mirror surface mode, the processor uses a distance calculated based on a peak corresponding to a spot for which the optical path length difference is shortest.
DISTANCE MEASUREMENT DEVICE, DISTANCE MEASUREMENT METHOD, AND MACHINE TOOL
A distance measurement device includes: a signal acquisition unit to acquire an electric signal based on interference light from an optical sensor device that splits sweep light having a periodically changing frequency into reference light and irradiation light to be emitted toward an object to be measured, irradiates the object with the irradiation light, generates interference light by causing the reference light to interfere with reflected light that is the irradiation light reflected by the object, and generates the electric signal based on the generated interference light; a frequency calculation unit to calculate, on the basis of the electric signal based on the interference light, a peak frequency of the electric signal using LASSO regression; a distance measurement unit to measure, on the basis of the peak frequency, a distance from a predetermined reference point to the object; and a distance output unit to output distance information indicating the distance.
Methods, systems and apparatus of interferometry for imaging and sensing
Various methods, systems and apparatus are provided for imaging and sensing using interferometry. In one example, a system includes an interferometer; a light source that can provide light to the interferometer at multiple wavelengths (λ.sub.i); and optical path delay (OPD) modifying optics that can enhance contrast in an interferometer output associated with a sample. The light can be directed to the sample by optics of the interferometer. The interferometer output can be captured by a detector (e.g., a camera) at each of the multiple wavelengths (λ.sub.i). In another example, an apparatus includes an add-on unit containing OPD that can enhance contrast in an interferometer output associated with a sample illuminated by light at a defined wavelength (λ.sub.i). A detector can be attached to the add-on unit to record the interferometer output at the defined wavelength (λ.sub.i).
Methods, systems and apparatus of interferometry for imaging and sensing
Various methods, systems and apparatus are provided for imaging and sensing using interferometry. In one example, a system includes an interferometer; a light source that can provide light to the interferometer at multiple wavelengths (λ.sub.i); and optical path delay (OPD) modifying optics that can enhance contrast in an interferometer output associated with a sample. The light can be directed to the sample by optics of the interferometer. The interferometer output can be captured by a detector (e.g., a camera) at each of the multiple wavelengths (λ.sub.i). In another example, an apparatus includes an add-on unit containing OPD that can enhance contrast in an interferometer output associated with a sample illuminated by light at a defined wavelength (λ.sub.i). A detector can be attached to the add-on unit to record the interferometer output at the defined wavelength (λ.sub.i).
CALCULATION OF REDUNDANT BEND IN MULTI-CORE FIBER FOR SAFETY
A fiber includes M primary cores and N redundant cores, where M an integer is greater than two and N is an integer greater than one. Interferometric circuitry detects interferometric pattern data associated with the M primary cores and the N redundant cores when the optical fiber is placed into a sensing position. Data processing circuitry calculates a primary core fiber bend value for the M primary cores and a redundant core fiber bend value for the N redundant cores based on a predetermined geometry of the M primary cores and the N redundant cores in the fiber and detected interferometric pattern data associated with the M primary cores and the N redundant cores. The primary core fiber bend value and the redundant core fiber bend value are compared in a comparison. The detected data for the M primary cores is determined reliable or unreliable based on the comparison. A signal is generated in response to an unreliable determination.
CALCULATION OF REDUNDANT BEND IN MULTI-CORE FIBER FOR SAFETY
A fiber includes M primary cores and N redundant cores, where M an integer is greater than two and N is an integer greater than one. Interferometric circuitry detects interferometric pattern data associated with the M primary cores and the N redundant cores when the optical fiber is placed into a sensing position. Data processing circuitry calculates a primary core fiber bend value for the M primary cores and a redundant core fiber bend value for the N redundant cores based on a predetermined geometry of the M primary cores and the N redundant cores in the fiber and detected interferometric pattern data associated with the M primary cores and the N redundant cores. The primary core fiber bend value and the redundant core fiber bend value are compared in a comparison. The detected data for the M primary cores is determined reliable or unreliable based on the comparison. A signal is generated in response to an unreliable determination.
High dynamic range picometer metrology systems and methods
Systems and methods for measuring displacements at the picometer level are provided. A system can include a Michelson interferometer having a fixed arm and a measurement arm. As the length of the measurement arm changes, the output supplied to the interferometer from a variable wavelength light source is changed until the intensity of the resulting inference pattern is maximized. The wavelength of the light at the point the interference pattern is maximized is then measured by mixing light from the light source with the output from a frequency comb generator. The resulting frequency measurement is then converted to a length measurement.
High dynamic range picometer metrology systems and methods
Systems and methods for measuring displacements at the picometer level are provided. A system can include a Michelson interferometer having a fixed arm and a measurement arm. As the length of the measurement arm changes, the output supplied to the interferometer from a variable wavelength light source is changed until the intensity of the resulting inference pattern is maximized. The wavelength of the light at the point the interference pattern is maximized is then measured by mixing light from the light source with the output from a frequency comb generator. The resulting frequency measurement is then converted to a length measurement.
Distributed Vibration Measuring Device and Method
The present disclosure provides a device that accurately measures vibration at a designated position of a sensing fiber without using digital signal processing to compensate for distance fluctuation. Digital signal processing for correcting fluctuation of a measurement distance due to a frequency offset of a beat signal due to vibration, which is a measurement target, is simplified. In the present disclosure, vibration at a designated position of the sensing fiber is accurately measured without using the digital signal processing to compensate for the distance fluctuation. A spectrum analysis length of an electrical field E(τn) of backscattered light is set to be larger than a delay deviation N.sub.d due to frequency modulation caused by dynamic strain. An index of tolerance of vibration distribution measurement to the delay deviation N.sub.d is also clarified.
METHOD AND APPARATUS FOR MAPPING AND RANGING BASED ON COHERENT-TIME COMPARISON
Provided is a system for range detection including at least one beam source arrangement configured to provide illumination of certain coherence length, an optical arrangement, and a detection arrangement including at least one detector unit.