A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.

A method for producing a mirror plate for a Fabry-Perot interferometer includes providing a substrate, which includes silicon, implementing a semi-transparent reflective coating on the substrate, forming a passivated region in and/or on the substrate by etching a plurality of voids in the substrate, and by passivating the surfaces of the voids, forming a first sensor electrode on top of the passivated region, and forming a second sensor electrode supported by the substrate.

A method for performing an X-ray diffraction analysis of a crystal sample using a multi-dimensional detector that integrates an X-ray diffraction signal while the position of the sample relative to an X-ray source is changed along a scan direction. The resulting image is compressed along the scan direction, but may be collected very quickly. The capture of both on-axis and off-axis reflections in a single image provides a common spatial frame of reference for comparing the reflections. This may be used in the construction of a reciprocal space map, and is useful for analyzing a sample with multiple crystal layers, such as a crystal substrate with a crystalline film deposited thereupon.

A compact dual pass interferometer for a plane mirror interferometer configured to receive an input radiation beam from a light source. An optical component has a partially reflective surface arranged to reflect a first portion of the input radiation beam to follow a first optical path directed towards an output terminal and further arranged to transmit a second portion of the input radiation beam to follow a second optical path, directed towards a first location on a reflective target surface and back to the partially reflective surface, then to a second location on the reflective target surface and back to the partially reflective surface, whereupon the second optical path is directed through the partially reflective surface to be recombined with the first optical path to provide a recombined optical path configured to provide an output radiation beam. The output terminal configured to deliver the output radiation beam to a detector.

A compact dual pass interferometer for a plane mirror interferometer configured to receive an input radiation beam from a light source. An optical component has a partially reflective surface arranged to reflect a first portion of the input radiation beam to follow a first optical path directed towards an output terminal and further arranged to transmit a second portion of the input radiation beam to follow a second optical path, directed towards a first location on a reflective target surface and back to the partially reflective surface, then to a second location on the reflective target surface and back to the partially reflective surface, whereupon the second optical path is directed through the partially reflective surface to be recombined with the first optical path to provide a recombined optical path configured to provide an output radiation beam. The output terminal configured to deliver the output radiation beam to a detector.

The present invention provides a measurement apparatus for measuring a position of an object, comprising a reflecting portion provided on the object and having a surface on which reflectors configured to retroreflect light are arrayed, an optical system configured to cause first light to be incident on the surface, receive second light as reflected light of the first light, cause third light generated from the second light to be incident on the surface, and receive fourth light as reflected light of the third light, and a processor configured to determine the position of the object based on a detection result of the forth light, wherein the optical system is configured such that a displacement between optical paths of the first light and the second light is corrected by a displacement between optical paths of the third light and the fourth light.

A device measures nanoscale displacements of an object positioned in an optical cavity aligned with each dimension sought to be measured. Each optical cavity receives light from a direction corresponding to a respective dimension, and includes an optical absorber for increasing sensitivity of the optical cavity.

A device measures nanoscale displacements of an object positioned in an optical cavity aligned with each dimension sought to be measured. Each optical cavity receives light from a direction corresponding to a respective dimension, and includes an optical absorber for increasing sensitivity of the optical cavity.

The present invention is the optical fiber sensor, that laser pulses from a laser source are separated into a reference path and a measurement path by the second optical coupler via the first optical coupler, the first FRM is provided at an end of the reference path, the second FRM is provided at an end of the measurement path, and the reference reflected light of the first FRM and the measurement reflected light of the second FRM are interfered at the second optical coupler and are converted into three phases. The first phase pulses are transmitted to the optical synthesis section via the first optical coupler, second phase pulses are transmitted to the optical synthesis section via the first delay section, and third phase pulses are transmitted to the optical synthesis section via the second delay section. The time division pulse train is outputted from the optical synthesis section.

The present invention is the optical fiber sensor, that laser pulses from a laser source are separated into a reference path and a measurement path by the second optical coupler via the first optical coupler, the first FRM is provided at an end of the reference path, the second FRM is provided at an end of the measurement path, and the reference reflected light of the first FRM and the measurement reflected light of the second FRM are interfered at the second optical coupler and are converted into three phases. The first phase pulses are transmitted to the optical synthesis section via the first optical coupler, second phase pulses are transmitted to the optical synthesis section via the first delay section, and third phase pulses are transmitted to the optical synthesis section via the second delay section. The time division pulse train is outputted from the optical synthesis section.