The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a tunable laser source implemented on the photonic integrated circuit configured to sweep over a frequency range to provide multi-wavelength light, a first waveguide structure implemented on the photonic integrated circuit configured to direct a first portion of light from the laser source at a moving object and receive light reflected from the moving object, a second waveguide structure implemented on the photonic integrated circuit configured to combine a second portion of light from the laser source with the light reflected from the moving object to produce a measurement beam, and a first detector implemented on the photonic integrated circuit configured to detect intensity values of the measurement beam to measure a distance between the digital measuring device and the moving object.

The present description relates to a stabilized interferometric system comprising: a light source (210) for emitting an initial beam of coherent light; a spatial light modulator (220) configured to receive at least a first part of said initial beam and input data (203) and configured to emit a spatially modulated beam resulting from a spatial modulation of a parameter of said first part of said initial beam based on said input data; a scattering medium (230) configured to receive said spatially modulated beam; a detection unit (240) configured to acquire an interference pattern (IN.sub.0) resulting from the interferences between randomly scattered optical paths taken by the spatially modulated beam through the scattering material; a control unit (250) configured to vary the frequency of the laser source in order to at least partially compensate a change in said interference pattern resulting from a change in at least one environmental parameter.

An interferometer system comprises a light redirecting system for splitting an input light beam into two secondary light beams to respectively propagate along a first optical arm and a second optical arm, and for recombining the secondary light beams after exiting the optical arms. The interferometer system also comprises a multipass optical cell positioned at the second optical arm for effecting a predetermined optical path length within the second arm.

A processing head for a laser processing device adapted for processing a workpiece using laser radiation has: adjustable focusing optics to focus laser radiation in a focal spot having an adjustable distance from the processing head; an optical coherence tomograph to measure a distance between the processing head and the workpiece by measuring an optical interference between measuring light reflected by the workpiece and measuring light not reflected by the workpiece; a path length modulator that can change, synchronously with and dependent on a change of the focal spot distance from the processing head, an optical path length in an optical path along which measuring light propagates; a scanning device, which deflects the laser radiation in different directions; and a control device, which i) controls a focal length of the focusing optics in such a way that the focal spot is situated at a desired location on the workpiece, ii) receives, from the coherence tomograph, information representing the distance between the processing head and the workpiece, and iii) uses information received from the coherence tomograph for a continuous correction of a positioning of the focal spot on the workpiece.

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.

A swept-source OCT imaging system for imaging a region of an object, comprising: a swept light source which generates a beam of varying wavelength; a scanning element which scans the beam across the object; an interferometer which generates interference light by combining light scattered by the object (owing to the scan) with reference light; a photodetector which generates an electrical signal (S) having frequency components spanning a frequency band and caused by interference of the scattered light with the reference light; a band-pass filter module which band-pass filters the electrical signal; and a sample acquisition module which samples the filtered electrical signal. The band-pass filter module extracts at least some of the frequency components spanning the frequency band from the electrical signal. The sample acquisition module band-pass samples the filtered electrical signal.

An interferometer includes a coherent light source and an array of electrically coupled light-sensitive pixel elements. The interferometer is configured to direct an internal optical path of the coherent light source and an external optical path of the coherent light source into a monolithic unit cell. In addition, the monolithic unit cell is configured to direct the internal optical path first through the monolithic unit cell and then onto the array and also configured to direct the external optical path back outside the monolithic unit cell through an external environment and then back into the monolithic unit cell and finally onto the array. In addition, interferometer is further configured to combine the internal optical path and the external optical path at the array and produce a first interferogram on the array, the interferogram characterizing an optical property of the external environment.

Interferometer system including a first detector for receiving a first measurement beam travelling to a reference surface; a second detector for receiving a second measurement beam travelling to the target surface; a reference variable delay path and/or measurement variable delay path and a delay path controller for adapting a delay length. A reference spectral coherence pulse occurs at the first detector, at a reference coherence arrangement and a measurement spectral coherence pulse at the second detector at a measurement coherence arrangement. A control unit receives a reference coherence signal from the first detector, and a measurement coherence signal from the second detector, and determines a zero-position of the target surface based on the reference coherence signal and the measurement coherence signal, and based on the reference coherence arrangement and the measurement coherence arrangement and/or a delay path difference between the reference coherence arrangement and the measurement coherence arrangement.

A system and method for demodulation of a fiber optic interferometric sensor are provided. Another aspect pertains to a system and method employing a single laser to generate multiple quadratic wavelengths to demodulate fiber optic interferometric sensors with approximately sinusoidal fringes. Yet another aspect of the present system and method uses a single frequency laser which is split into multiple paths using a fiber optic coupler, with one path including an intensity modulator and another path including an acousto-optic modulator, whereafter the paths are recombined into a fiber which leads to an interferometric sensor, and the light reflected from the sensor is then directed to a photodetector. A further aspect employs a single frequency laser which is split into multiple paths, with the light in the paths being modulated at different frequencies, whereafter the paths are recombined into a fiber which leads to an interferometric sensor.