Patent classifications
G
PHYSICS
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G01
MEASURING; TESTING
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G01B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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9/00
Measuring instruments characterised by the use of optical techniques
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G01B9/02015
characterised by the beam path configuration
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G01B9/02029
Combination with non-interferometric systems, i.e. for measuring the object
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G01B9/0203
With imaging systems
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