Apparatus and methods are described for optically analyzing an object having a plurality of layers, without needing to use a reference mirror. An extended broadband light source produces light, and directs the light toward the object, such as to create respective images of the light source on the respective layers of the object. An imaging system gathers light that is reflected from a point of the object into a conjugate point in the detector. The detector determines the thicknesses of the plurality of layers at the point of the object by analyzing, within the gathered light, interference between light reflected from the plurality of layers of the object at the point. Other applications are also described.

A differential filtering chromatic confocal microscopic system comprises a chromatic dispersion objective for receiving and axially dispersing a broadband light from a light source and projecting dispersed lights onto an object thereby forming an object light reflected therefrom; an optical modulation module for dividing the object light into a first and a second object lights; a pair of optical intensity sensing module, respectively having a spatial filter with a different pinhole diameter or a slit width from each other, for detecting the first and second object lights, thereby obtaining a plurality of first and second optical intensity signals; and a signal processor for respectively processing the plurality of first and second optical intensity signals thereby obtaining a plurality of differential rational values of optical intensity and determining a corresponding object depth associated with each differential rational value according to a relation between signal intensity ratio and object surface depth.

A system for measuring the topography of a surface including a carriage assembly and a base assembly. The carriage assembly comprising a plurality of displacement-measuring probes coupled to a carriage support structure. The base assembly positioned adjacent to the carriage assembly and comprising at least one reference object with an opening sized to receive a test object. At least one of the carriage assembly or the base assembly is configured to translate with respect to the other in at least two directions to enable at least one of the displacement-measuring probes to measure a displacement to a reference surface of the reference object and at least another one of the displacement-measuring probes to measure a displacement to a target surface of the target object whose topography is measured.

Aspects concern an optical coherence tomography (OCT) system for imaging of a sample, comprising: a sample arm for directing light onto the sample, the sample arm comprises sample arm optics comprising a dispersive element to generate an extended source for illuminating the sample: a reference arm: a detector for detecting an interference signal from light that is reflected from the reference arm and light that is back-reflected or back-scattered from the sample; and a scanner for scanning the extended source across the sample along a fast axis and a slow axis such that a plurality of partial-spectrum frames is obtained at the detector: wherein the dispersive element is orientable such that the extended source is disposed at a non-zero angle to the fast axis.

A system for measuring the topography of a surface including a carriage assembly and a base assembly. The carriage assembly comprising a plurality of displacement-measuring probes coupled to a carriage support structure. The base assembly positioned adjacent to the carriage assembly and comprising at least one reference object with an opening sized to receive a test object. At least one of the carriage assembly or the base assembly is configured to translate with respect to the other in at least two directions to enable at least one of the displacement-measuring probes to measure a displacement to a reference surface of the reference object and at least another one of the displacement-measuring probes to measure a displacement to a target surface of the target object whose topography is measured.

Apparatus and methods are described for optically analyzing an object having a plurality of layers, without needing to use a reference mirror. An extended broadband light source produces light, and directs the light toward the object, such as to create respective images of the light source on the respective layers of the object. An imaging system gathers light that is reflected from a point of the object into a conjugate point in the detector. The detector determines the thicknesses of the plurality of layers at the point of the object by analyzing, within the gathered light, interference between light reflected from the plurality of layers of the object at the point. Other applications are also described.

A system (10) for measuring a physical characteristic of an object (11) using dual path, two-dimensional Optical Coherence Tomography (OCT) includes an extended broadband light source (13) producing an incident light beam (14) and an interferometer (15) having a beam splitter (16) that splits the incident beam into first and second component (17, 18) beams and directs the second component beam (18) on to a moveable mirror (19) for creating an optical path difference between the first component beam (17) and a reflection (20) of the second component beam. A focusing lens (21) having a focal plane (22) focuses the first component beam and the reflection of the second component beam to form a fringe pattern (23) on the focal plane, and a configurable imaging system (25) images the fringe pattern on to a plane (12) of the object to allow two-dimensional measurement of the object without spatial scanning.

A device to perform a method for confocal function determination and/or correction in an OCT imaging system, characterized in that the device determines a confocal function and/or corrects the influence of the confocal function and/or corrects the confocal function, achieves the object of the invention to overcome the drawbacks of the state of the art. system and a method are further disclosed.