The invention relates to a device for measuring a substrate for semiconductor lithography with a reference interferometer for ascertaining the change in the ambient conditions, wherein the reference interferometer comprises a means for changing the optical path length of a measurement section of the reference interferometer, wherein the means is configured to bring about a change in the refractive index.

Furthermore, the invention relates to a method for correcting cyclic error components of a reference interferometer, wherein the reference interferometer comprises a means for changing the optical path length of a measurement section of the reference interferometer, comprising the following method steps: starting up the reference interferometer, continuously detecting measurement values of the reference interferometer, changing the optical path length of the measurement section of the reference interferometer until a path length change of at least one quarter of the wavelength of the reference interferometer is detected, determining the cyclic errors on the basis of the continuously detected measurement values of the reference interferometer, and correcting the current measurement values ascertained by the reference interferometer on the basis of the cyclic errors ascertained.

A method is disclosed for operating an endpoint detection system of a processing chamber having a ceiling formed therein, a substrate support located internal to the processing chamber, and a substrate resting on the substrate support. A transparent panel is located in the ceiling of the processing chamber, the panel oriented at a first acute angle relative to the substrate and the substrate support. The transparent panel receives an incident light beam from the endpoint detection system at a second acute angle relative to the panel. The transparent panel transmits the incident light beam to the substrate within the processing chamber at an angle perpendicular to the substrate and the substrate support.

An interferometer system, including a heterodyne interferometer and a processing system. The heterodyne interferometer is arranged to provide a reference signal and a measurement signal. The reference signal has a reference phase. The measurement signal has a measurement phase and an amplitude. The processing system is arranged to determine a cyclic error of the heterodyne interferometer based on the reference phase, the measurement phase and the amplitude.

The invention relates to an OCT system with an OCT light source for emitting OCT light into an object beam path and a reference beam path. The system comprises a detector for detecting an interference signal produced by the object beam path and the reference beam path. A polarization-dependent delay element is arranged in the object beam path. The invention also relates to a corresponding OCT method. The invention allows the effects of parasitic reflections to be reduced.

The invention relates to an OCT system with an OCT light source for emitting OCT light into an object beam path and a reference beam path. The system comprises a detector for detecting an interference signal produced by the object beam path and the reference beam path. A polarization-dependent delay element is arranged in the object beam path. The invention also relates to a corresponding OCT method. The invention allows the effects of parasitic reflections to be reduced.

A probe for an optical measurement system includes a probe body arranged to be adjustably mounted in a measuring machine for optically measuring a test object. A polarizing fiber optically coupled within the probe body transmits a source beam having an instantaneous or sequentially established bandwidth spanning a range of wavelengths to the probe body and also transmits a measurement beam from the probe body toward a detector. An adjustable beam manipulator is provided for angularly redistributing the reference beam along the reference arm.

The present invention provides a reflective condensing interferometer for focusing on a preset focus. The reflective condensing interferometer includes a concave mirror set, a convex mirror, a light splitting element, and a reflecting element. The concave mirror set has first and second concave surface portions which are oppositely located on two sides of a central axis passing through the preset focus and are concave on a surface facing the central axis and the preset focus. Light is preset to be incident in parallel to the central axis in use. The convex mirror is disposed between the concave mirror set and the preset focus on the central axis, and is convex away from the preset focus. The light splitting element vertically intersects with the central axis between the convex mirror and the preset focus. The reflecting element is disposed between the light splitting element and the convex mirror.

An optical coherence tomography system, includes a swept-source laser, a Mach-Zehnder interferometer and a balanced detector. The interferometer includes a first fiber coupler, a second fiber coupler, a sample arm and a reference arm. The reference arm includes a reference arm front section, a reference arm rear section and a delay line. A tail end of the reference arm front section is connected to the reference arm rear section through the delay line. The first fiber coupler is configured to split the output light of the swept-source into a sample light and a reference light and distribute the returned sample light to the second fiber coupler. A difference between the optical path length of a parasitic reflected signal of the delay line reaching the second fiber coupler and the optical path length of the sample light is greater than 8 times the cavity length of the swept-source laser.

A heterodyne optical interferometer incorporates error correction elements to correct a cyclic error that may be present in an interferometric measurement. The cyclic error can be caused by various factors such as an imperfect polarization relationship between two wavelength components, deficiencies in optical propagation paths (such as light leakage), imperfect optical coatings, and/or imperfect components. The cyclic error, which typically manifests itself as erroneous displacement information characterized by a low velocity sinusoidal frequency component, can be reduced or eliminated by using birefringent optical elements and other optical elements to alter certain characteristics of one or both wavelength components and reduce light leakage components in one or more light propagation paths in the heterodyne optical interferometer.

A light interference unit includes a branching optical element, a multiplexing optical element, and at least one fiber device. The branching optical element branches a laser light with an emission wavelength temporally swept, into a measurement light and a reference light. The multiplexing optical element multiplexes the reference light and the measurement light reflected by a measured object, and causes them to interfere. The fiber device includes a reference light device. A transmission light path length is a light path length of the reference light transmitting the reference light device, from the reference light device to the multiplexing optical element. A reflection light path length is a light path length of the reference light reflected by a separation portion of the reference light device, from the reference light device to the multiplexing optical element. The transmission light path length is equal to or more than the reflection light path length.