G01B11/0658

QUALITY CONTROL OF SUBSTRATE COATINGS
20200182605 · 2020-06-11 ·

The present invention relates to devices and methods for detecting the amount (degree, extent) of material coating a medical device or substrate, in particular the present invention relates to devices and methods for detecting the amount of vaccine material coating a microarray patch.

Metrology for OLED manufacturing using photoluminescence spectroscopy

An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

Protective film thickness measuring method

A protective film thickness measuring method includes a step of applying light to a top surface of a wafer in a state in which no protective film is formed and measuring a first reflection intensity of the light reflected from the top surface, a step of forming the protective film including a light absorbing material, a step of irradiating the protective film with exciting light of a wavelength at which the light absorbing material fluoresces and measuring a second reflection intensity including fluorescence of the protective film and the light reflected from the top surface, and a step of excluding reflection intensity of patterns formed on the top surface, by subtracting the measured first reflection intensity from the measured second reflection intensity, and calculating fluorescence intensity of the protective film.

METROLOGY FOR OLED MANUFACTURING USING PHOTOLUMINESCENCE SPECTROSCOPY
20190317021 · 2019-10-17 ·

An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

QUALITY CONTROL OF SUBSTRATE COATINGS
20240159516 · 2024-05-16 ·

The present invention relates to devices and methods for detecting the amount (degree, extent) of material coating a medical device or substrate, in particular the present invention relates to devices and methods for detecting the amount of vaccine material coating a microarray patch.

INSPECTION APPARATUS, INSPECTION METHOD, COMPUTER PROGRAM AND RECORDING MEDIUM
20190234872 · 2019-08-01 ·

An inspection apparatus is provided with: an irradiating device configured to irradiate a sample in which a plurality of layers are laminated with a terahertz wave; a detecting device configured to detect the terahertz wave from the sample to obtain a detected waveform; and an estimating device configured to estimate a position of a first boundary surface on the basis of a second boundary surface pulse wave and a library, the second boundary surface pulse wave appearing in the detected waveform to correspond to a second boundary surface that is farther from an outer surface than the first boundary surface, the library representing an estimated waveform of the terahertz wave from the sample.

Method and system for measuring thickness of glass article

A method includes introducing light into a glass article such that at least a portion of the introduced light is emitted from an edge of the glass article. The light emitted from an edge of the glass article is detected. An intensity profile of the emitted light is an intensity of the emitted light as a function of axial position. A first intensity boundary of the intensity profile and a second intensity boundary of the intensity profile are determined. A thickness of a layer of the glass article is determined based on an axial distance between the first intensity boundary and the second intensity boundary.

System and method for improved visual detection of protective coatings
10260860 · 2019-04-16 · ·

The present disclosure provides a system and method for providing an improved protective coating for a substrate that may be inspected using the unaided eye or other apparatus under available light. The protective coating is mixed with an additive including flakes or particles that, when applied to the substrate as part of the protective coating, allow the user to empirically determine if the surface has received an adequate protective coat. The determination of whether or not any defects exist may include comparing the observed appearance of the specialty pigment particles with a comparative standard.

Determining the thickness of a submicron carbon coating on a carbon-coated metal base plate using Raman spectroscopy

A method of determining a thickness of a submicron carbon of a carbon-coated metal base plate that includes conducting Raman spectroscopy at a target location of the carbon-coated metal base plate to obtain a Raman shift spectrum for the target location. The Raman shift spectrum obtained at the target location is then converted into a calculated thickness of the submicron carbon coating at the target location. The conversion of the Raman shift spectrum into the calculated thickness of the submicron carbon coating at the target location may involve referencing a linear correlation that has been established over the defined wavenumber range between (1) an integrated intensity of a Raman carbon signal obtained from each of a series of reference plates that includes a submicron carbon coating having a verified thickness and (2) the verified thicknesses of the submicron carbon coatings of the series of reference plates.

DETERMINING THE THICKNESS OF A SUBMICRON CARBON COATING ON A CARBON-COATED METAL BASE PLATE USING RAMAN SPECTROSCOPY
20190078871 · 2019-03-14 ·

A method of determining a thickness of a submicron carbon of a carbon-coated metal base plate that includes conducting Raman spectroscopy at a target location of the carbon-coated metal base plate to obtain a Raman shift spectrum for the target location. The Raman shift spectrum obtained at the target location is then converted into a calculated thickness of the submicron carbon coating at the target location. The conversion of the Raman shift spectrum into the calculated thickness of the submicron carbon coating at the target location may involve referencing a linear correlation that has been established over the defined wavenumber range between (1) an integrated intensity of a Raman carbon signal obtained from each of a series of reference plates that includes a submicron carbon coating having a verified thickness and (2) the verified thicknesses of the submicron carbon coatings of the series of reference plates.