Disclosed herein are methods, apparatus, and computer program code for determining a correcting mapping, comprising: locating a test object having a known linear dimension at a plurality of positions within a volume; at each of the plurality of positions, capturing a three-dimensional scan of the test object using a three-dimensional imaging device; and determining a difference between the known linear dimension and the linear dimension as obtained from the captured scan; and determining a correction mapping for the volume based on the determined differences, the correction mapping indicating variation from an expected location of the location as captured by the imaging device.

A three-dimensional shape measuring apparatus includes: a single projector device that projects a first light pattern whose luminance changes at a first cycle and a second light pattern whose luminance changes at a second cycle that is longer than the first cycle on a measured object; an image capture device that acquire an image of the measured object on which the first or second light pattern is projected; and an image processing device that processes the image acquired by the image capture device. The image processing device includes a relative phase value calculation unit that calculates a relative phase value on each part of the measured object based on a luminance value of an image of the measured object on which the first light pattern is projected, an absolute phase value calculation unit that calculates an absolute phase value on each part of the measured object based on a luminance value and the relative phase value of an image of the measured object on which the second light pattern is projected, and a three-dimensional coordinate calculation unit that calculates three-dimensional coordinates at each part of the measured object based on the absolute phase value.

One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

A coherent beam moves across a stationary line generator, allowing the speckle pattern projected through the diffuser onto the surface—for example using a MEMS mirror, or another arrangement that is free of a moving mass, such as solid state beam deflector (e.g. an AOM). Where an image sensor is employed, such as a DS, the beam is moved at a speed of at least ½ cycle per image frame so that the full length of the line within the imaged scene is captured by the image sensor. The distance traversed on the diffuser provides sufficient uncorrelated speckle patterns within an exposure time to average to a smooth line. The MEMS mirror can be arranged to oscillate in two substantially orthogonal degrees of freedom so that the line is generated along a first direction and the line moves along the working surface in a second direction.

To reliably measure a surface of an object to be measured having a wide width. A surface measurement apparatus that measures a surface of an object to be measured moving in a predetermined moving direction on a plane or a surface of an object to be measured moving in a predetermined moving direction along a curved surface of a roll, the surface being along the curved surface, the apparatus includes: N (N being an integer of two or more) light sources provided in a width direction, the light sources each emitting line beam over the width direction, which is a direction perpendicular to the moving direction; a screen on which reflected images of N pieces of the line beam reflected on reflection regions of the surface of the object to be measured respectively are projected; an image capturing device that captures the reflected image projected on the screen and acquires a captured image; and an arithmetic processing device that measures the surface of the object to be measured by using the captured image, in which the reflected images are projected on the screen to be distinguishable from each other.

The present disclosure provides a method for calibrating a rotation center based on a blade local leading-edge curve feature. The method acquires a blade local leading-edge curve feature before and after rotation, solves centroid coordinates according to maximum values in the blade local leading-edge curve features in the two times, and then solves a rotation center according to the centroid coordinates, thereby calibrating a coordinate of the rotation center. Compared with a point calibration method in the prior art, the present disclosure has a more accurate result by curve calibration and is more suitable for a real rotation center; and the method also has a more accurate blade measurement result when applied to measuring a blade cross-section curve feature.

An appearance inspection device (three-dimensional measuring device) includes a first measurement unit configured to measure three-dimensional information by a phase shift method, a second measurement unit configured to measure three-dimensional information by an optical cutting method, and a control device configured or programmed to acquire three-dimensional information on a measurement target based on measurement results of both the first measurement unit and the second measurement unit.

An imaging processing part 131 executes first imaging processing of causing a first illuminating part to emit structured light from a first direction to a measurement target, causing an imaging part 120 to generate image data, and causing a buffer memory 133 to store therein the generated image data. A computing processing part 132 executes first computing processing of generating, height data corresponding to the first direction. Concurrently with the first computing processing, the imaging processing part 131 executes second imaging processing of causing the second illuminating part to emit structured light from a second direction to the measurement target, causing the imaging part 120 to generate image data, and causing a buffer memory 134 to store therein the generated image data. The computing processing part 132 executes second computing processing of generating height data corresponding to the second direction.

A three-dimensional shape measuring apparatus includes a photoreceptor that receives measuring light which is reflected by a workpiece illuminated by an illuminator, and provides light-reception signals representing a light reception amount; and a processor that generates a set of shape data representing three-dimensional shape of a part of the workpiece which is included in the field of view at a particular position of the stage based on the signals, repeats movement of the stage by using a movement controller based on the generated data corresponding to the part of the workpiece to obtain a set of data corresponding to other part of the workpiece which is located in proximity to the part of the workpiece and the generation of a set of data of the workpiece at the position where the stage is moved, and generates combined data including the entire shape of the workpiece by combining the repeatedly obtained sets of data.

A surface shape measuring device measures the three-dimensional shape of a measurement surface in an object to be measured shaped as a rotating body or an approximate rotating body. The surface shape measuring device includes: a rotary table that rotates the object to be measured; an encoder that sequentially outputs signals according to the rotation angle of the rotary table; an optical sectioning sensor that irradiates light onto the measurement surface and acquires a plurality of optical section line image data by sequentially capturing optical section lines generated by the irradiated light, which move across the measurement surface as the rotary table rotates, triggered by a signal output from the encoder; and an image processing unit that generates an image showing the surface shape of the measurement surface by sequentially arranging the respective optical section line image data according to the corresponding rotation angle.