A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.

A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.

An angular velocity detection circuit includes: an angular velocity signal generation unit that generates an angular velocity signal on the basis of an output signal of a differential amplifier unit that differentially amplifies a signal based on an output signal of a first conversion unit and a signal based on an output signal of a second conversion unit; and a correction signal generation unit that generates a correction signal for reducing an offset of the angular velocity signal which occurs due to leakage signals which are respectively included in the first detection signal and the second detection signal on the basis of a signal based on drive oscillation of the angular velocity detection element. The correction signal is input to a circuit that is located on a first signal path ranging from the first detection electrode of an angular velocity detection element to the differential amplifier unit.

Cyber-physical systems depend on sensors to make automated decisions. Resonant acoustic injection attacks are already known to cause malfunctions by disabling MEMS-based gyroscopes. However, an open question remains on how to move beyond denial of service attacks to achieve full adversarial control of sensor outputs. This work investigates how analog acoustic injection attacks can damage the digital integrity of a popular type of sensor: the capacitive MEMS accelerometer. Spoofing such sensors with intentional acoustic interference enables an out-of-spec pathway for attackers to deliver chosen digital values to microprocessors and embedded systems that blindly trust the unvalidated integrity of sensor outputs. Two software-based solutions are presented for mitigating acoustic interference with output of a MEMS accelerometer and other types of motion sensors.

A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.

A MEMS gyroscope comprises a first resonator with one or more first Coriolis element pairs, and a second resonator with one or more second Coriolis element pairs. The primary oscillation of these resonators is driven with the same drive signal, and a coupling arrangement between the first and second resonators synchronizes the primary oscillation of the one or more first Coriolis element pairs with the primary oscillation of the one or more second Coriolis element pairs. The coupling arrangement does not synchronize the secondary oscillation of the one or more first Coriolis element pairs with the secondary oscillation of the one or more second Coriolis element pairs. The secondary oscillations of the first and second electromechanical resonators are therefore independent of each other.

Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

A microelectromechanical gyroscope comprising first, second, third and fourth Coriolis masses, arranged in that order on an x-axis. In the primary oscillation mode, the Coriolis masses are configured to oscillate so that the second and third Coriolis masses move in linear translation along the x-axis away from a center point when the first and fourth Coriolis masses move in linear translation along the x-axis towards the first center point, and vice versa. When the gyroscope undergoes rotation about a y-axis which is perpendicular to the x-axis, the Coriolis masses are configured to oscillate so that the first, second, third and fourth Coriolis masses undergo vertical motion in a z-direction, wherein the first and third Coriolis masses move up when the second and fourth Coriolis masses move down, and vice versa.

A gyroscope which comprises first and second proof masses aligned on a first lateral axis, third and fourth proof masses are aligned on a second lateral axis, and central and peripheral anti-phase coupling structures which synchronize a first and a second oscillation mode in this four-mass system. Each central x-axis anti-phase structure and each central y-axis anti-phase structure comprises an in-plane seesaw with a central elongated bar which is suspended from at least one central anchor point with at least one central seesaw suspender which allows the central elongated bar to rotate in the device plane about an axis which is perpendicular to the device plane.