A gyroscope which comprises first and second proof masses aligned on a first lateral axis, third and fourth proof masses are aligned on a second lateral axis, and central and peripheral anti-phase coupling structures which synchronize a first and a second oscillation mode in this four-mass system. Each central x-axis anti-phase structure and each central y-axis anti-phase structure comprises an in-plane seesaw with a central elongated bar which is suspended from at least one central anchor point with at least one central seesaw suspender which allows the central elongated bar to rotate in the device plane about an axis which is perpendicular to the device plane.

The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.

Angular sensor with vibrating resonator includes a supporting structure, a first mass and a second mass which are concentric, and mechanical springs arranged symmetrically in pairs, the pairs themselves being arranged symmetrically with respect to one another. Each spring comprises a first elastic leaf and a second elastic leaf which are connected to one another by one end, the first elastic leaf of one of the springs of each pair being parallel to the second elastic leaf of the other of the springs of the same pair. The four elastic leaves of at least one pair comprise two adjacent pairs of leaves making an angle of approximately 45° between them. The sensor is not provided with electrostatic springs.

A method for calibrating an inertial angular sensor, includes the steps of: A for at least two electrical angles (θj) of the vibration wave: A1 applying, via each of the three trim controls CTi, a sinusoidal stiffness disturbance PSi having a disturbance frequency fi, and for each applied disturbance: A11 determining and storing an estimated excitation force Fei to be applied to the resonator in the presence of said disturbance PSi, on the basis of excitation controls determined by the servo controls, B determining, on the basis of the three estimated excitation forces Fei i=1, 2, 3 stored in step A11, three 2×2 matrices M′i, a matrix M′i being representative of the response of the gyrometer to the disturbance PSi, C determining and storing an estimated inverse excitation matrix (formula (A)) and an estimated inverse detection matrix (formula (B)) on the basis of the three matrices M′i determined in step B, an excitation matrix E and a detection matrix D being respectively representative of the effects of the excitation chain and of the effect of the detection chain of the sensor.

A method for calibrating an inertial angular sensor, includes the steps of: A for at least two electrical angles (θj) of the vibration wave: A1 applying, via each of the three trim controls CTi, a sinusoidal stiffness disturbance PSi having a disturbance frequency fi, and for each applied disturbance: A11 determining and storing an estimated excitation force Fei to be applied to the resonator in the presence of said disturbance PSi, on the basis of excitation controls determined by the servo controls, B determining, on the basis of the three estimated excitation forces Fei i=1, 2, 3 stored in step A11, three 2×2 matrices M′i, a matrix M′i being representative of the response of the gyrometer to the disturbance PSi, C determining and storing an estimated inverse excitation matrix (formula (A)) and an estimated inverse detection matrix (formula (B)) on the basis of the three matrices M′i determined in step B, an excitation matrix E and a detection matrix D being respectively representative of the effects of the excitation chain and of the effect of the detection chain of the sensor.

A vibratory sensor with electronic balancing is provided. The vibratory sensor includes at least one pair of proof masses, at least one tunable spring having electro-thermodynamic characteristics for each first and second proof mass in the at least one pair of proof masses, and a steering circuit. Each pair of proof masses include a first proof mass and a second proof mass. The first proof mass and the second proof mass can move in opposing directions. Each tunable spring couples an associated one of the first and second proof masses to a substrate. The steering circuit is configured to selectively couple current from a power source to each tunable spring to adjust the stiffness of at least one tunable spring to balance relative movement between the first and second proof masses of the at least one pair of proof masses.

A vibratory sensor with electronic balancing is provided. The vibratory sensor includes at least one pair of proof masses, at least one tunable spring having electro-thermodynamic characteristics for each first and second proof mass in the at least one pair of proof masses, and a steering circuit. Each pair of proof masses include a first proof mass and a second proof mass. The first proof mass and the second proof mass can move in opposing directions. Each tunable spring couples an associated one of the first and second proof masses to a substrate. The steering circuit is configured to selectively couple current from a power source to each tunable spring to adjust the stiffness of at least one tunable spring to balance relative movement between the first and second proof masses of the at least one pair of proof masses.

A gyroscope comprises four Coriolis masses arranged around a center point where a lateral axis crosses a transversal axis orthogonally in the device plane. The first and second masses are aligned on the lateral axis, and the third and fourth masses are aligned on the transversal axis. The gyroscope further comprises four pairs of elongated mass elements. The mass elements of the first pair are transversally aligned on opposite sides of the lateral axis outside of the first mass. The mass elements of the second pair are transversally aligned on opposite sides of the lateral axis outside of the second mass. The mass elements of the third pair are laterally aligned on opposite sides of the first transversal axis outside of the third mass. The mass elements of the fourth pair are laterally aligned on opposite sides of the first transversal axis outside of the fourth mass.