A rotary structural body includes a rotation body that rotates in cooperation with a rotation shaft. The rotation body includes an engaging portion engaged with an engaged portion arranged on one of the rotation shaft and a transmission member that transmits rotation of the rotation shaft to the rotation body. The rotary structural body further includes a detector that detects a rotation angle of the rotation shaft in accordance with rotation of the rotation body and a support arranged on the engaged portion to extend across a circumferential gap between the engaged portion and the engaging portion.

Provided is equipment for transferring a vacuum chamber that solves a problem of heat dissipation of a driver by (i) placing a permanent magnet, which is a stator structure of a linear motor and causes linear motion, inside a vacuum chamber and (ii) by placing a coil of a driver structure outside the vacuum chamber, Under this structure, (i) no cable is installed in inside the chamber, and (ii) heat generated from the driver structure can be smoothly dissipated. The transfer equipment includes; a first-axis linear coil (24) that is fixed to an outside of the vacuum chamber at a bottom surface of the housing (11) of the vacuum chamber (10); a first-axis slider (60) that is installed inside the vacuum chamber (10) and moves in a first-axis direction relative to a bottom of an inner space of the vacuum chamber (10); and a first-axis linear permanent magnet (63). The first-axis linear permanent magnet (63) is arranged in the first-axis direction, is installed in a lower portion of the first-axis slider (60), and slidingly moves together with the first-axis slider (60).

The magnetic encoder includes: a core member of annular shape having a press-fitting portion which bends and extends from an edge of a track formation surface, and to which a rotary shaft is press-fitted and fixed; and two or more rows of magnetic tracks arranged adjacent to each other on a magnetic member provided on the track formation surface, each track having N poles and S poles alternately magnetized thereon. The two or more rows of magnetic tracks include a main track that has a largest number of magnetic poles and is used for calculating an angle of rotation, and a sub track used for calculating a phase difference from the main track. The main track is located on a side more distant from the press-fitting portion than the sub track.

Shielding members having different thicknesses can be easily attached. A magnetism detection device includes a magnet (Mr) magnetized, an angle sensor (Sr) as a magnetic sensor configured to detect a magnetic flux from the magnet (Mr), a magnet holder holding the magnet (Mr), and a second layshaft gear shaft. The magnetism detection device includes a case including a plurality of outer wall portions and a lid portion and configured to accommodate the magnet (Mr) and the magnetic sensor (Sr) inside and a shielding member having a flat plate shape and a shape corresponding to the lid portion and attached to the lid portion. The shielding member includes a protruding portion protruding outward from an outer peripheral portion. The case includes a recessed portion opening inward at an end portion outside of the lid portion and configured to accommodate the protruding portion. The recessed portion includes a plurality of sidewall portions having different widths and a plurality of upper wall portions having different heights.

A radial-type magnetic encoder includes: an annular fixing member; and an annular plastic magnet attached to the annular fixing member. The annular fixing member includes the cylindrical portion, an outward flange portion extending outward in a radial direction from an edge of the cylindrical portion, and a sensor opposed portion bent from an edge of the outward flange portion and opposed to a magnetic sensor which detects rotation of the magnetic encoder, and the annular fixing member has a substantially U-shaped sectional shape along a plane including the radial direction and an axial direction. The annular plastic magnet has a shape that covers a front surface, a back surface, and an end edge of the sensor opposed portion, and an outer-diameter-side part of the outward flange portion.

A hollow type rotation detecting device has a 2-pole magnet ring and a multi-pole gear, the 2-pole magnet being coaxially fixed to the outer circumferential surface of the shaft end part of a hollow motor shaft that extends coaxially inside a cylindrical cover. In an annular gap between the cylindrical cover and the 2-pole magnet ring and multi-pole gear, rigid boards are arranged with an orientation facing in a tangential direction at prescribed intervals along the circumferential direction. The rigid boards are electrically connected to one another by flexible printed wiring boards. It is possible to obtain a rotation detecting device suitable to be incorporated into the narrow annular gap between a motor house and the shaft end part of the hollow motor shaft in a hollow motor having a large hollow diameter.

A cover having a container portion whose one end is opened and whose other end is closed by a bottom surface, includes: an annular groove formed into an annular shape along an outer circumference of an opening of the container portion; a plurality of communicating portions that are formed in a side wall partitioning the annular groove and the container portion so as to connect the annular groove and the container portion in a radial direction; and an annular seal member fitted to the annular groove.

A bearingless angular measurement device includes an angle scale, a scanning unit, and an evaluation electronics. The scanning unit and the angle scale are located at a scanning distance relative to each other and are rotatable about an axis, so that the scanning unit is capable of generating angle-dependent output signals, which may be further processed in the evaluation electronics. The scanning distance is able to be determined on the basis of the output signals. In addition, the angular measurement device includes a compensation coupling that is attachable to a machine component and is elastically deformable in the direction of the axis.

Provided is a working machine including first and second members, an angle detection device and a connection pin connected to the first and second members to rotate integrally with the second member relative to the first member. The angle detection device has a marker, an angle sensor and a guard member, which has a main guard portion covering the angle sensor and including an inner opposite surface opposed to an end surface of the projecting end portion and a guard-member-side engagement portion. One of the angle sensor and the marker is disposed on the inner opposite surface, the other disposed on the end surface. The first member has a first-member-side engagement portion engaging with the guard-member-side engagement portion to restrain the main guard portion from relative rotation. The guard member can contact with the connection pin to restrain the guard member from relative displacement to the projecting end portion.

A radial-type magnetic encoder includes: an annular fixing member; and an annular plastic magnet attached to the annular fixing member. The annular fixing member includes the cylindrical portion, an outward flange portion extending outward in a radial direction from an edge of the cylindrical portion, and a sensor opposed portion bent from an edge of the outward flange portion and opposed to a magnetic sensor which detects rotation of the magnetic encoder, and the annular fixing member has a substantially U-shaped sectional shape along a plane including the radial direction and an axial direction. The annular plastic magnet has a shape that covers a front surface, a back surface, and an end edge of the sensor opposed portion, and an outer-diameter-side part of the outward flange portion.