Patent classifications
G01D5/347
Sealed linear encoder and sealing lip for a sealed linear encoder
A sealed linear encoder apparatus provides a measure of relative displacement of two relatively movable members. The sealed linear encoder apparatus includes at least one elongate sealing lip wherein at least a sealing portion of the elongate sealing lip is held in tension along its length.
LIGHT-EMITTING UNIT, LIGHT-EMITTING AND LIGHT-RECEIVING UNIT AND PHOTOELECTRIC ENCODER
A light-emitting unit includes: a light source; and a reflector having reflection faces of first and second partial paraboloids, the first and second partial paraboloids being spaced from each other in an optical axis direction of the light source, the first and second partial paraboloids having a focal point on the light source, wherein: the second partial paraboloid is between the light source and the first partial paraboloid in the optical axis direction; the second partial paraboloid has a coefficient different from that of the first partial paraboloid; and the second partial paraboloid is positioned on a reflection direction side of a light from the light source reflected by the first partial paraboloid, with respect to a plane that is obtained on a presumption that the first partial paraboloid is extended to the light source side in accordance with the coefficient of the first partial paraboloid.
Encoder, servomotor, and servo system
An encoder includes a disc and a sensor. The disc has a circular surface with a central axis and is rotatable around the central axis. The disc has a slit row provided on the circular surface. The slit row includes slits arranged in a circumferential direction of the circular surface around the central axis and in a radial direction of the circular surface. The sensor is provided opposite to the slit row on circular surface. The sensor has a first light receiver and a second light receiver. The first light receiver is configured to output a first light receiving signal as the slit row rotates along the circumferential direction when the disc rotates around the central axis. The second light receiver is configured to output a second light receiving signal as the slit row moves along the radial direction when the disc rotates around the central axis.
Cylindrical retroreflector array for rotation tracking
An electronic device is described. The electronic device may include a housing, a rotatable crown, and a self-mixing interferometry (SMI) sensor positioned within the housing. The rotatable crown may include an array of retroreflective surface features that reflect incident light back to a light source. Each retroreflective surface feature of the array of retroreflective surface features may be formed as a corner-cube with three perpendicular faces. The SMI sensor or associated processing electronics may compare originally emitted light with reflected light to identify a movement or distance of the rotatable crown with respect to the SMI sensor.
Magnetically coupled optical encoder
Embodiments of the present disclosure provide an optical encoder that has magnetic elements embedded in a shaft or shaft of the optical encoder. Further, the optical encoder is hermitically sealed and is configured to rotate based on a magnetic field between the optical encoder and an actuation member.
Photoelectric rotary encoder
The photoelectric rotary encoder includes: a generally disk-shaped scale with a grating-like pattern formed with a predetermined period along a measurement direction, the measurement direction being a direction of rotation of a measurement target that rotates on a predetermined axis, the scale being plate-like and centered on an axis of rotation; and a head that detect, from the scale, the amount of displacement caused by the rotation of the measurement target. The head includes a light source, a diffraction unit with grating parts, and a light-receiving unit with light-receiving elements. The grating parts of the diffraction unit are formed as deformed grating parts that spread cut wide, from the center on the axis of rotation, along the grating-like pattern of the scale. The light-receiving elements are formed as linear grating parts.
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND CONTROL METHOD, OVERLAY MEASUREMENT METHOD AND DEVICE MANUFACTURING METHOD
A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.
POSITION DETECTING MEMBER
A position detecting member includes a base portion including a light-receiving surface having a black color tone and a back surface located on an opposite side to the light-receiving surface. A surface layer portion including at least the base portion is made of ceramic. An average value of root mean square slopes (RΔq) on the light-receiving surface in a roughness curve is larger than an average value of root mean square slope (RΔq) on the back surface.
ROTARY ENCODER WITH STAGGERED ENCODER WHEELS
A rotary encoder includes a rotating shaft, first and second encoder wheels, first and second detectors and a processor. The first encoder wheel includes coaxially disposed first and second portions. The first portion has first graduation features. The second portion has a first positioning structure. The second encoder wheel includes coaxially disposed third and fourth portions. The third portion has second graduation features. The fourth portion has a second positioning structure meshing with the first positioning structure, so that the first graduation features and the second graduation features are staggered, and the first encoder wheel and the second encoder wheel are coaxially mounted on the rotating shaft. The first and second detectors detect the first and second graduation features and output first and second signals, respectively. The processor calculates a rotating angle of the rotating shaft according to the first and second signals.
Contact laser encoding anti-theft lock
This invention provides a contact laser encoding anti-theft lock, comprising: a key for generating a set of light signals with different pulse repetition frequencies; a signal processing module for receiving a set of optical pulse signals, in which the optical signals are converted to a set of voltage signals at different voltage values, and for comparing the voltage signals with a predetermined voltage (the voltage signals within the predetermined voltage range can be output as usual otherwise the output voltage is set to be zero); an electrically controlled lock, for opening or locking anti-theft doors according to the output voltage from the signal processing module; and a power supply for the signal processing module and the electrically controlled lock. The contact laser encoding anti-theft lock of this invention shows higher security and duplication of the keys is more difficult compared with prior anti-theft locks.