Methods, apparatuses and systems for providing dehumidification providing dehumidification for gas detecting components are disclosed herein. An example apparatus may comprise: a flow sensing component configured to detect a flow rate associated with a flowing media in a flow channel of the apparatus; and a controller component in electronic communication with the flow sensing component that is configured to receive a flow rate indication from the flow sensing component, and in response to determining that the flow rate indication satisfies a null condition threshold, apply an exponential smoothing function with a variable alpha value to condition an output signal of the apparatus.

Methods, apparatuses and systems for providing dehumidification providing dehumidification for gas detecting components are disclosed herein. An example apparatus may comprise: a flow sensing component configured to detect a flow rate associated with a flowing media in a flow channel of the apparatus; and a controller component in electronic communication with the flow sensing component that is configured to receive a flow rate indication from the flow sensing component, and in response to determining that the flow rate indication satisfies a null condition threshold, apply an exponential smoothing function with a variable alpha value to condition an output signal of the apparatus.

A flow sensing device includes a first body member defining an inlet port, an upstream sensor port, and a first connecting port; a second body member defining an outlet port, a downstream sensor port, and a second connecting port; a flow restricting element defining a flow restricting passage and including a first end connection coupled to the first connecting port and a second end connection coupled to the second connecting port, such that the flow restricting passage is disposed between the inlet port and the outlet port, and between the upstream sensor port and the downstream sensor port; a first fluid sensor assembled with the upstream sensor port; and a second fluid sensor assembled with the downstream sensor port.

A flow sensing device includes a first body member defining an inlet port, an upstream sensor port, and a first connecting port; a second body member defining an outlet port, a downstream sensor port, and a second connecting port; a flow restricting element defining a flow restricting passage and including a first end connection coupled to the first connecting port and a second end connection coupled to the second connecting port, such that the flow restricting passage is disposed between the inlet port and the outlet port, and between the upstream sensor port and the downstream sensor port; a first fluid sensor assembled with the upstream sensor port; and a second fluid sensor assembled with the downstream sensor port.

A method for determining flow rates and phase fractions within a throughbore is disclosed. The method includes providing a mixture of one or more fluids through a fluid flow path in a throughbore at a flow rate, reducing the flow rate, slidably moving a first and second sleeve along the throughbore to a first position of a plurality of positions, measuring a first and second differential pressure at the first position, calculating a first loss pressure ratio from the first and second differential pressure. The method further includes slidably moving the first sleeve and second sleeve to each of the others of the plurality of positions in succession after the first position, measuring a plurality of differential pressures and calculating a loss pressure ratio at each of the plurality of positions, and calculating a plurality of flow rates phase fractions of the fluids flowing through the fluid flow path.

A method for determining flow rates and phase fractions within a throughbore is disclosed. The method includes providing a mixture of one or more fluids through a fluid flow path in a throughbore at a flow rate, reducing the flow rate, slidably moving a first and second sleeve along the throughbore to a first position of a plurality of positions, measuring a first and second differential pressure at the first position, calculating a first loss pressure ratio from the first and second differential pressure. The method further includes slidably moving the first sleeve and second sleeve to each of the others of the plurality of positions in succession after the first position, measuring a plurality of differential pressures and calculating a loss pressure ratio at each of the plurality of positions, and calculating a plurality of flow rates phase fractions of the fluids flowing through the fluid flow path.

A method for determining flow rates and phase fractions within a throughbore is disclosed. The method includes providing a mixture of one or more fluids through a fluid flow path in a throughbore at a flow rate, reducing the flow rate, slidably moving a first and second sleeve along the throughbore to a first position of a plurality of positions, measuring a first and second differential pressure at the first position, calculating a first loss pressure ratio from the first and second differential pressure. The method further includes slidably moving the first sleeve and second sleeve to each of the others of the plurality of positions in succession after the first position, measuring a plurality of differential pressures and calculating a loss pressure ratio at each of the plurality of positions, and calculating a plurality of flow rates phase fractions of the fluids flowing through the fluid flow path.

A method for determining flow rates and phase fractions within a throughbore is disclosed. The method includes providing a mixture of one or more fluids through a fluid flow path in a throughbore at a flow rate, reducing the flow rate, slidably moving a first and second sleeve along the throughbore to a first position of a plurality of positions, measuring a first and second differential pressure at the first position, calculating a first loss pressure ratio from the first and second differential pressure. The method further includes slidably moving the first sleeve and second sleeve to each of the others of the plurality of positions in succession after the first position, measuring a plurality of differential pressures and calculating a loss pressure ratio at each of the plurality of positions, and calculating a plurality of flow rates phase fractions of the fluids flowing through the fluid flow path.

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.