A sensor support portion supports a physical quantity sensor. A flow path housing portion forms a measurement flow path, which accommodates a support tip end portion of the sensor support portion. The sensor support portion includes a support front surface, which includes a front fixed portion away from the support tip end portion and fixed to an inner surface of the flow path housing portion. The physical quantity sensor includes a sensor exposure surface exposed from the support front surface. A separation distance between an end portion of the front fixed portion and an end portion of the sensor exposure surface is smaller than a separation distance between the end portion of the sensor exposure surface and the support tip end portion.

A hydraulic control device for liquid-conducting appliances and systems is designed for connection between a source of liquid and an appliance or system using the liquid. The hydraulic control device (1) comprises: —a device body (2′, 3′) having a duct for the liquid (30a, 30b) that extends between an inlet connector (2a) and an outlet connector (3 a); —a flow meter (40, 50) associated to the device body (2\ 3′); and—a valve arrangement (31, 33-37) associated to the device body (2′, 3′), including a valve member (31), which is displaceable between an opening position and a closing position of the duct for the liquid (30a, 30b), and a control mechanism (33-37) for controlling the valve member (31). The control mechanism (33-37) is switchable on the basis of a detection made by the flow meter (40, 50) in order to displace the valve member (31) from the opening position to the closing position of the duct for the liquid (30a, 30b). The flow meter (40, 50) is a non-mechanical flow meter that includes at least two electrical detection elements (42) that are reachable by liquid that flows in the duct for the liquid (30a, 30b).

A hydraulic control device for liquid-conducting appliances and systems is designed for connection between a source of liquid and an appliance or system using the liquid. The hydraulic control device (1) comprises: —a device body (2′, 3′) having a duct for the liquid (30a, 30b) that extends between an inlet connector (2a) and an outlet connector (3 a); —a flow meter (40, 50) associated to the device body (2\ 3′); and—a valve arrangement (31, 33-37) associated to the device body (2′, 3′), including a valve member (31), which is displaceable between an opening position and a closing position of the duct for the liquid (30a, 30b), and a control mechanism (33-37) for controlling the valve member (31). The control mechanism (33-37) is switchable on the basis of a detection made by the flow meter (40, 50) in order to displace the valve member (31) from the opening position to the closing position of the duct for the liquid (30a, 30b). The flow meter (40, 50) is a non-mechanical flow meter that includes at least two electrical detection elements (42) that are reachable by liquid that flows in the duct for the liquid (30a, 30b).

Disclosed is a thermal flow sensor including a base member and a cover. The base member includes a heater. The cover is formed by an SOI substrate including a silicon substrate, a silicon dioxide film, and a silicon film. The silicon film has a recessed portion defined therein. A main flow passage portion is defined by an exposed surface of the silicon dioxide film which is exposed from the silicon film and which defines a bottom surface of the recessed portion, the silicon film defining a side surface of the recessed portion, and a first principal surface of the cover.

Disclosed is a thermal flow sensor including a base member and a cover. The base member includes a heater. The cover is formed by an SOI substrate including a silicon substrate, a silicon dioxide film, and a silicon film. The silicon film has a recessed portion defined therein. A main flow passage portion is defined by an exposed surface of the silicon dioxide film which is exposed from the silicon film and which defines a bottom surface of the recessed portion, the silicon film defining a side surface of the recessed portion, and a first principal surface of the cover.

A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.

A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.

An object of the present invention is to provide a sensor unit that can detect a wide range of physical quantity changes with a higher degree of freedom than in the conventional art and is capable of reporting detection information, and a multiple-type sensor using the sensor unit. A flow sensor in the present invention includes a board, a sensor that is arranged on the board and detects a physical quantity change, a plurality of external connection terminals that are electrically connected to the sensor, and a reporting part that reports detection information of the sensor to the outside. In the present invention, a wide range of physical quantity changes can be detected with a higher degree of freedom. Connecting a plurality of sensor units enables use for various applications.

A detection device for detecting characteristics of a mixed fluid containing different types of substances with different thermal properties within a prescribed range, includes: one or a plurality of heaters for heating the mixed fluid; a plurality of temperature detectors for detecting the temperature of the mixed fluid heated; a flow rate calculation unit for calculating the flow rate of the mixed fluid using the output from at least a portion of the plurality of temperature detectors; a correspondence relation storage unit that stores the correspondence relation between the output from the temperature detectors for a prescribed flow rate and the mixture ratio of the substances in the mixed fluid; and a mixture ratio calculation unit for calculating the mixture ratio of the substances in the mixed fluid on the basis of the output from the temperature detectors and the correspondence relation.

A detection device for detecting characteristics of a mixed fluid containing different types of substances with different thermal properties within a prescribed range, includes: one or a plurality of heaters for heating the mixed fluid; a plurality of temperature detectors for detecting the temperature of the mixed fluid heated; a flow rate calculation unit for calculating the flow rate of the mixed fluid using the output from at least a portion of the plurality of temperature detectors; a correspondence relation storage unit that stores the correspondence relation between the output from the temperature detectors for a prescribed flow rate and the mixture ratio of the substances in the mixed fluid; and a mixture ratio calculation unit for calculating the mixture ratio of the substances in the mixed fluid on the basis of the output from the temperature detectors and the correspondence relation.