A sensor comprises a substrate having a first surface; a cap structure connected to the substrate, the cap structure configured to define a cavity between an inner surface of the cap structure and the first surface of the substrate, the cap structure configured to block infrared radiation from entering the cavity from outside the cap structure; a plurality of absorbers, each absorber in the plurality of absorbers being connected to the first surface of the substrate and arranged at a respective position within the cavity and configured to absorb infrared radiation at the respective position within the cavity; and a plurality of readout circuits, each readout circuit in the plurality of readout circuits being connected to a respective absorber in the plurality of absorbers and configured to provide a measurement signal that indicates an amount of infrared radiation absorbed by the respective absorber.

A thermal flowmeter comprises a heating element thermally coupled to a flowing medium, a first temperature sensor and second temperature sensor. The first temperature sensor detects a flowing medium temperature in a region not affected by the heating element. The second temperature sensor detects a temperature of the heating element and also serves as a heating element. A control unit controls heating power of the heating element based on the difference between the detected temperatures at a predetermined time. The control unit provides a square wave signal to the second temperature sensor so that in a high phase it acts as heating element and in a low phase as a temperature sensor.

A thermal flowmeter comprises a heating element thermally coupled to a flowing medium, a first temperature sensor and second temperature sensor. The first temperature sensor detects a flowing medium temperature in a region not affected by the heating element. The second temperature sensor detects a temperature of the heating element and also serves as a heating element. A control unit controls heating power of the heating element based on the difference between the detected temperatures at a predetermined time. The control unit provides a square wave signal to the second temperature sensor so that in a high phase it acts as heating element and in a low phase as a temperature sensor.

A measuring apparatus including a tubular member, a sensor fixed to an outer peripheral surface of the tubular member, and a circuit board that relays a detection signal from the sensor, the circuit board being fixed to the outer peripheral surface in an area different from an area where the sensor is fixed and being separated from the sensor, and a wire that electrically connects the sensor and the circuit board.

A measuring apparatus including a tubular member, a sensor fixed to an outer peripheral surface of the tubular member, and a circuit board that relays a detection signal from the sensor, the circuit board being fixed to the outer peripheral surface in an area different from an area where the sensor is fixed and being separated from the sensor, and a wire that electrically connects the sensor and the circuit board.

A thermal flow sensor for determining a gas or the composition of a gas mixture as well as its flow velocity, comprising: a substrate onto which at least a first dielectric layer is applied; at least one heating structure that is applied onto the first dielectric layer and serves to heat the gas or the gas mixture; at least a first temperature sensor element that is applied onto the first dielectric layer at a distance from the heating structure and captures the temperature of the gas or gas mixture heated at the heating structure; a control device that controls the heating structure in a first operating mode in such a way that the heating structure shows a predetermined temperature, and controls the heating structure in a second operating mode in such a way that a power input into the heating structure corresponds to a predetermined power; and an evaluation unit which determines at least one physical characteristic of the gas present or the gas mixture on the basis of the operating modes and determines the gas present or the composition of the gas mixture as well as its flow velocity on the basis of this physical characteristic.

A thermal flow sensor for determining a gas or the composition of a gas mixture as well as its flow velocity, comprising: a substrate onto which at least a first dielectric layer is applied; at least one heating structure that is applied onto the first dielectric layer and serves to heat the gas or the gas mixture; at least a first temperature sensor element that is applied onto the first dielectric layer at a distance from the heating structure and captures the temperature of the gas or gas mixture heated at the heating structure; a control device that controls the heating structure in a first operating mode in such a way that the heating structure shows a predetermined temperature, and controls the heating structure in a second operating mode in such a way that a power input into the heating structure corresponds to a predetermined power; and an evaluation unit which determines at least one physical characteristic of the gas present or the gas mixture on the basis of the operating modes and determines the gas present or the composition of the gas mixture as well as its flow velocity on the basis of this physical characteristic.

A thermal type flow meter includes a first resistor (R1) which is disposed along a flow path through which a fluid flows, generates heat when a current is applied, and outputs a first output signal indicating a heat generation temperature, a second resistor (R2) which is disposed at a position different from that of the first resistor along the flow path and outputs a second output signal indicating a temperature of the fluid, and a current application unit configured to apply a current to the first resistor so that the first output signal indicates a predetermined temperature. A parameter for converting the difference between the first output signal and the second output signal when a predetermined input is received if the current is applied into a target value is determined. The flow rate is acquired using the parameter, the difference detected after the parameter is determined, and a predetermined function.

A thermal type flow meter includes a first resistor (R1) which is disposed along a flow path through which a fluid flows, generates heat when a current is applied, and outputs a first output signal indicating a heat generation temperature, a second resistor (R2) which is disposed at a position different from that of the first resistor along the flow path and outputs a second output signal indicating a temperature of the fluid, and a current application unit configured to apply a current to the first resistor so that the first output signal indicates a predetermined temperature. A parameter for converting the difference between the first output signal and the second output signal when a predetermined input is received if the current is applied into a target value is determined. The flow rate is acquired using the parameter, the difference detected after the parameter is determined, and a predetermined function.

A device for determining the mass flow of a fluid includes a line for conducting the fluid in a flow direction to a contact with a heat exchanger. The heat exchanger has a surface temperature which is constant in the flow direction. The device also includes a first temperature measuring position upstream from the exchanger for determining a first fluid temperature, a second temperature measuring position downstream from the heat exchanger for determining a second fluid temperature, and a third temperature measuring position for detecting the surface temperature of the heat exchanger.