The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.

An apparatus (100) for the production of a plaster slurry is described, the apparatus (100) comprising a mixer (102) for mixing at least plaster and water to form a plaster slurry, the mixer (102) comprising an outlet conduit (122), a foam generator (106) for mixing at least air, a foaming agent and water to produce a foam, the foam generator (106) in fluid communication with the mixer (102) via a fluid pathway (116) comprising a foam conduit (117); and a mass flow meter (124), wherein the mass flow meter (124) is configured to measure the density and mass flow rate of the foam within the foam conduit (117) or the plaster slurry within the outlet conduit (122). Additionally, a method of manufacturing a plaster slurry is described.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.

An aspect ratio flow metering device may comprise a concentrate inlet portion, one or more restricted flow portions of tubing fluidly connected to the concentrate inlet portion, and a metered concentrate outlet portion fluidly connected to the one or more restricted flow portion of tubing. The narrowest part of the one or more restricted flow portions of tubing may each have a length (R.sub.L): inner diameter (R.sub.ID) ratio of at least 10:1. The metered concentrate outlet portion may have an inner diameter (O.sub.ID) greater than R.sub.ID. The concentrate inlet portion may have an inner diameter (I.sub.ID) greater than R.sub.ID. The aspect ratio flow metering device may be structurally configured to limit flow of a concentrate into a hydrodynamic mixing apparatus. Also disclosed are methods for using the aspect ratio flow metering device to mix fluids.

An apparatus for measuring viscosities of fluids is described, comprising: a measuring system (1) having at least one measuring tube (5), which in measurement operation is filled with a fluid or through which fluid is flowing, and which has at least one tube section (4, 7) excitable to execute oscillations; an exciter system (1) for exciting at least two wanted oscillation modes of different frequencies, at each of which at least one of the tube sections (4, 7) is excited to execute oscillations, especially resonant oscillations; a sensing system (3), which is embodied in such a manner that it determines for the wanted oscillation modes excited in measurement operation, in each case, a frequency and a damping, especially a frequency, an amplitude and a damping, of a resulting oscillation of at least one tube section (4, 7) excited to execute oscillations of one of the wanted oscillation modes, and an evaluation system (15), which is embodied in such a manner that it determines based on calibration data stored in a memory (17) for the individual wanted oscillation modes excited in measurement operation, in each case, based on an excitation determined frequency and damping, especially frequency, amplitude and damping, of the resulting oscillation a measured shear rate value and a viscosity measured value, wherein the viscosity measured value corresponds to the dynamic viscosity of the fluid at a static shear rate corresponding to the shear rate value.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

A flow measurement apparatus can include a main flow passage, a bypass flow passage having an inlet and an outlet connected with the main flow passage, a mass flowmeter connected in the bypass flow passage between the inlet and the outlet, and a flow restrictor connected in the bypass flow passage between the inlet and the outlet. A method can include connecting the flow measurement apparatus, so that a fluid flow in the well also flows through the flow measurement apparatus, and determining at least one rheological parameter of a non-Newtonian fluid, based on an output of the flow measurement apparatus.

A flow measurement apparatus can include a main flow passage, a bypass flow passage having an inlet and an outlet connected with the main flow passage, a mass flowmeter connected in the bypass flow passage between the inlet and the outlet, and a flow restrictor connected in the bypass flow passage between the inlet and the outlet. A method can include connecting the flow measurement apparatus, so that a fluid flow in the well also flows through the flow measurement apparatus, and determining at least one rheological parameter of a non-Newtonian fluid, based on an output of the flow measurement apparatus.

A flow measuring device capable of measuring at least parameters of a multiphase flow and to quantify an effect of decoupling on an interpretation of the parameters based on at least one characteristic of the multiphase fluid is disclosed. The flow measuring system includes various augmentations and enhancements to a Coriolis meter. The flow measuring system is capable of determining decoupling parameters that can be used to improve the output of a Coriolis meter. A method of retrofitting a Coriolis meter is also disclosed.