An embodiment of the present disclosure provides a backlight detection device, comprising: a carrier plate, having a backlight detection region for carrying a backlight to be detected; a light property detection plate with a plurality of brightness sensors arranged thereon, configured for detecting light properties of different regions of a backlight to be detected which is positioned in the backlight detection region; and a data processing unit, in signal connection with the plurality of brightness sensors, configured for judging whether the light property of the backlight to be detected is qualified or not according to a plurality of brightness signals of different regions of the light source to be detected which are detected by the plurality of brightness sensors.

A light detection device includes a light detector including a first detector and a second detector; a light coupling layer disposed on or above the light detector; and a polarizer array that is disposed on the light coupling layer. The light coupling layer includes a first low-refractive-index layer, a first high-refractive-index layer including a first grating and a second grating adjacent to the first grating, and a second low-refractive-index layer in this order. The polarizer array includes a first polarizer that transmits light polarized in one direction and a second polarizer that is adjacent to the first polarizer and blocks the light polarized in the one direction. The first grating and the first polarizer face the first detector, and the second grating and the second polarizer face the second detector.

A photon detector system for detecting photons emitted from an optical fiber, the photon detector system comprising a receiving mechanism for receiving the optical fiber; a photon detector comprising a superconducting element and aligned with the receiving mechanism, the photon detector having an active area for detecting photons emitted from an end-face of the optical fiber received in the receiving mechanism and an urging mechanism for urging together the photon detector and the optical fiber.

System and method for accurately measuring alignment of every exposure field on a pre-patterned wafer without reducing wafer-exposure throughput. Diffraction grating disposed in scribe-lines of such wafer, used as alignment marks, and array of encoder-heads (each of which is configured to define positional phase(s) of at least one such alignment mark) are used. Determination of trajectory of a wafer-stage scanning during the wafer-exposure in the exposure tool employs determining in-plane coordinates of such spatially-periodic alignment marks by simultaneously measuring position-dependent phases of signals produced by these marks as a result of recombination of light corresponding to different diffraction orders produced by these marks. Measurements may be performed simultaneously at all areas corresponding to at least most of the exposure fields of the wafer, and/or with use of a homodyne light source, and/or in a wavelength-independent fashion, and/or with a pre-registration process allowing for accommodation of wafers with differently-dimensioned exposure fields.

The present invention relates to a light baffle assembly including a base baffle member comprising a base wall portion positioned substantially parallel to a longitudinal axis, an upper baffle member comprising an upper wall portion coupled to an upper blade portion, the upper wall portion positioned substantially parallel to the longitudinal axis, and the upper blade portion positioned to extend inwards from the upper wall portion towards the longitudinal axis, and a resilient member configured to extend the upper baffle member away from the base baffle member.

A light sensor includes a primary lens, and a light device spaced from the primary lens. A control structure is disposed between the primary lens and the light device. An actuator is coupled to the control structure to move the control structure relative to the primary lens and the light device to control the passage of light between the primary lens and the light device. The light sensor may include a light emitting sensor having an array of individual light emitters, or a light detecting sensor having a light detector. The control structure may include an array of secondary bi-telecentric lenses for use with the light emitting sensor, or a plate having an aperture extending therethrough for use with the light detecting sensor.

A method and apparatus for protecting an optical sensor is disclosed. A fixed filter having a fixed passband for light transmission is placed in front of the optical sensor. A programmable filter having a variable passband for light transmission is placed in front of the fixed filter. A controllable voltage source controls a voltage at the programmable filter that shifts the passband of the programmable filter from a first state in which the passband of the programmable filter is substantially the same as the passband of the fixed filter and a second state in which the passband of the programmable filter is different than the passband of the fixed filter.

A spot shape detection apparatus for detecting the spot shape of a laser beam oscillated from a laser oscillator includes: a focusing leans for focusing the laser beam oscillated by the oscillator; a rotary body (mirror holder) in which a plurality of mirrors for reflecting the laser beam having passed through the focusing lens are disposed on concentric circles; a drive source (motor) for rotating the rotary body at a predetermined period; a beam splitter for branching return beams of the laser beam reflected by the plurality of mirrors of the rotary body; an imaging unit which is disposed in a direction in which the return beams are branched by the beam splitter and which images spot shapes of the return beams; and a display unit for displaying images obtained by imaging by the imaging unit, in relation with the plurality of mirrors.

A device is disclosed for monitoring power from a laser diode. The device includes a substrate having a top surface and a first facet perpendicular to the top surface through which light enters the substrate. The device further includes a second facet onto which light that has entered the substrate through the first facet along an optical axis that is non-normal to the first facet is incident. The device further includes a photodiode fabricated on the top surface of the substrate for measuring an intensity of the light that enters the first facet of the substrate along the optical axis that is non-normal to the first facet. The light that has entered the substrate through the first facet along the optical axis that is non-normal to the first facet is reflected by the second facet toward a photoactive region of the photodiode.

The disclosure discloses an electromagnetic driving module which includes a base, two magnetic elements, a wiring assembly, a reference element, and a sensor element. The two magnetic elements are arranged along a reference line and positioned at two sides of the base. The wiring assembly is connected to the base and arranged adjacent to the two magnetic elements. The reference element is positioned on the base. The sensor element is adjacent to the reference elements and configured to detect the movement of the reference element to position the base. A lens device using the electromagnetic driving module is also disclosed.