A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels having a sample arm and a reference arm having a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms, the detection unit for detecting a combined light beam formed by a light beam reflected from the reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by spectral interference signatures, and the control unit for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.

An interferometer system comprises a light redirecting system for splitting an input light beam into two secondary light beams to respectively propagate along a first optical arm and a second optical arm, and for recombining the secondary light beams after exiting the optical arms. The interferometer system also comprises a multipass optical cell positioned at the second optical arm for effecting a predetermined optical path length within the second arm.

The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.

The disclosure relates to an interferometer including a substrate, and an intermediate layer region applied on the substrate. A first mirror device and a second mirror device are aligned plane-parallel with one another and are separated from one another by a first distance and are framed in or on the intermediate layer region, the intermediate layer region removed in at least one of an inner region below the first mirror device and below the second mirror device. A laterally structured electrode including a first subregion and a second laterally separated subregion which are configured to be connected to different electrical potentials. The electrode arranged at a second distance from the first or the second mirror device, the first subregion extending in the inner region and arranged on the intermediate layer region and the second subregion extending in an outer region of the intermediate layer region.

The present invention relates to a housing of a Michelson interferometer that may facilitate optical alignment of a plurality of optical components by applying a two-part structured housing to the Michelson interferometer. The present invention may provide a Michelson interferometer housing system including a first housing including a first surface on which a fixed mirror is installed, a second surface perpendicular to the first surface, and a first diagonal surface on which a beam splitter assembly to which light is incident from the outside is installed, the first diagonal surface being formed at 45 degrees with respect to the second surface; and a second housing including a third surface on which a movable mirror is installed, a fourth surface perpendicular to the third surface, and a second diagonal surface corresponding to the first diagonal surface, wherein the first and second housings are combined such that the first and second diagonal surfaces face each other to allow the light entering from the outside to be divided through the beam splitter assembly and incident to the fixed mirror and the movable mirror.

A Fourier spectroscopic analyzer includes: a first light source that emits light including a wavelength component in a first wavelength band which is a wavelength band in which a spectrum of light passing through a sample is acquired and a wavelength component in a second wavelength band different from the first wavelength band; a second light source that emits light including the wavelength component in the second wavelength band; an interferometer that acquires an interferogram which is coherent light from the light emitted from the first light source; a first light coupling optical system that couples light emitted from the second light source to at least one of light emitted from the first light source and the interferogram acquired by the interferometer; a light receiver that outputs a first light-reception signal acquired by receiving light including the wavelength component in the first wavelength band out of the wavelength components included in the light passing through the sample and a second light-reception signal acquired by receiving light including the wavelength component in the second wavelength band; and a signal processor that performs a Fourier transform process on the first light-reception signal and the second light-reception signal to acquire a spectrum of the wavelength component in the first wavelength band with noise removed therefrom.

The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.

In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.

A wavelength-swept light source is configured to generate light to be measured that is wavelength-swept coherent light with a wavelength periodically changed. The light to be measured is separated into a measurement section and a reference section that have different optical path lengths, and is then coupled in an interference section to generate interfering light. An analyzer performs a Fourier transform of interference signals of the interfering light, and acquires an actual measured noise floor value for each of the optical path length differences based on a point spread function. An estimated coherence time is determined so that an actual measured amplitude value of the noise floor value and a calculated amplitude value coincide with each other. Linewidth of the light emitted from the coherent light source is measured based on the estimated coherence time.