A tunable infrared optical filter device, includes a first mirror and a second mirror bonded to each other to form a cavity therebetween. A surface of a position where the first mirror and the second mirror are bonded to each other is provided with an electrode for driving the first mirror or the second mirror to move, and each of the first mirror and the second mirror is a distributed Bragg reflector formed by bonding silicon films. The silicon film may be formed by machining the silicon film wafer, to form the distributed Bragg reflector composed of the two silicon films and the chambers therebetween. The distributed Bragg reflector may also be formed by bonding the silicon film and the silicon film of an SOI wafer.

An electronic device may have light-based components. The light-based components may include light sources, light detectors, and image sensors. The light-based components may be aligned with a window in the device. The window may be formed within an inactive area of a display or within other device structures. The window may have one or more window members mounted within an opening in a display layer in the inactive area. Visible light blocking material such as chalcogenide glass may be incorporated into the window to provide the window with an opaque appearance that matches the opaque appearance of surrounding portions of the inactive portion of the display. In configurations in which the light-based components include a visible image sensor or other visible light detecting component, the window may be provided with a portion that is transparent at visible wavelengths.

The present invention downsizes a radiation thermometer and increases a circuit scale, and includes: an infrared sensor; a signal processing unit that processes a signal of the infrared sensor; and a casing that accommodates the infrared sensor and the signal processing unit, in which the signal processing unit is configured by stacking a plurality of substrates with a spacer interposed therebetween.

The present invention downsizes a radiation thermometer and increases a circuit scale, and includes: an infrared sensor; a signal processing unit that processes a signal of the infrared sensor; and a casing that accommodates the infrared sensor and the signal processing unit, in which the signal processing unit is configured by stacking a plurality of substrates with a spacer interposed therebetween.

A thermal radiation light detection device includes: a housing including a plurality of wall portions; a light entrance unit attached to a wall portion and configured to cause thermal radiation light to enter the housing; a light extraction unit disposed inside housing and configured to extract light of a first wavelength and light of a second wavelength from the thermal radiation light, the second wavelength being different from the first wavelength; a first light detection unit attached to a wall portion and configured to detect the light of the first wavelength; a second light detection unit attached to a wall portion and configured to detect the light of the second wavelength; and a first temperature detection unit attached to a wall portion, the wall portion to which the first temperature detection unit is attached being different from the wall portion to which the first light detection unit is attached.

A wavelength selective structure for selectively reflecting or absorbing incident electromagnetic visible or infrared radiation. The wavelength selective structure includes a wavelength selective structure with a plurality of layers, including a compound layer forming a plurality of surface elements, an electrically isolating intermediate layer, wherein the compound layer is in contact with a first surface of the electrically isolating intermediate layer, and a continuous electrically conductive layer in contact with a second surface of the electrically isolating intermediate layer. The compound layer includes at least one metallic layer and at least one dielectric layer. The selective surface has at least one resonance band for selectively reflecting or absorbing visible or infrared radiation based on a resonant electromagnetic coupling between the plurality of surface elements and the continuous electrically conductive layer.

A sensor arrangement includes a reaction subassembly having a housing and a detector subassembly. The housing is a layered component arrangement encompassing a luminophore-containing reaction laminate excitable, by irradiation with a first electromagnetic radiation of a first wavelength, to emit a second electromagnetic radiation of a second wavelength different from the first wavelength; and a temperature-detection laminate emitting an infrared radiation. The housing includes an opening for introducing a fluid, a reaction window and a temperature-sensing window. The reaction window transmits the first and second electromagnetic radiation, and the temperature-sensing window is penetrable by infrared radiation. The detector subassembly encompasses a radiation source emitting the first electromagnetic radiation, a radiation detector detecting the second electromagnetic radiation, and an infrared detector detecting, through the temperature detection window, the infrared radiation emitted from the temperature detection laminate. The reaction laminate and the temperature-detection laminate are embodied separately.

A sensor arrangement includes a reaction subassembly having a housing and a detector subassembly. The housing is a layered component arrangement encompassing a luminophore-containing reaction laminate excitable, by irradiation with a first electromagnetic radiation of a first wavelength, to emit a second electromagnetic radiation of a second wavelength different from the first wavelength; and a temperature-detection laminate emitting an infrared radiation. The housing includes an opening for introducing a fluid, a reaction window and a temperature-sensing window. The reaction window transmits the first and second electromagnetic radiation, and the temperature-sensing window is penetrable by infrared radiation. The detector subassembly encompasses a radiation source emitting the first electromagnetic radiation, a radiation detector detecting the second electromagnetic radiation, and an infrared detector detecting, through the temperature detection window, the infrared radiation emitted from the temperature detection laminate. The reaction laminate and the temperature-detection laminate are embodied separately.

An apparatus and a method for determining the temperature of a substrate, in particular of a semiconductor substrate during the heating thereof by means of at least one first radiation source are disclosed. A determination of the temperature is based on detecting first and second radiations, each comprising radiation emitted by the substrate due to its own temperature and radiation emitted by the first radiation, which is reflected at the substrate and at least one of a drive power of the first radiation source and the radiation intensity of the first radiation source.

A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.