Patent classifications
G01L1/2212
Sensors with deformable conductors and selective deformation
A sensor may include a bladder, and a deformable conductor disposed on the bladder such that deformation of the bladder causes deformation of the deformable conductor, wherein the bladder is constrained so as to enhance the deformation of the conductor in response to the deformation of the bladder. A method may include applying a stimulus to a bladder having a deformable conductor attached thereto, detecting a change in an electrical characteristic associated with the deformable conductor in response to the stimulus, and selectively constraining the bladder to amplify the change in electrical characteristic in response to the stimulus.
STRAIN GAUGE SENSOR
A structure including an in-situ strain gauge sensor is provided. The in-situ strain gauge sensor is formed at a hybrid bonding interface between a carrier substrate and a device substrate. The strain gauge sensor leverages the piezoresistive effect where the resistance of conductive materials change in response to mechanical strain. The voltage output can be modeled to understand strain where resistance will change based on the applied strain on the structure that contains the in-situ strain gauge sensor.