A torque sensor chip including a semiconductor substrate, an acoustic reflector formed on the semiconductor substrate, and first and second Lamb wave resonators (LWRs). The first LWR is formed on a side of the acoustic reflector opposite the semiconductor substrate. The first LWR is at a first angle with respect to an axis of the IC. The second LWR also is formed on the side of the acoustic reflector opposite the semiconductor substrate. The second LWR is at a second angle, different than the first angle, with respect to the axis of the IC.

The invention relates to a component transducer (20) for sensing a torque component (Mx, My, Mz); wherein an element (21) made of piezoelectric crystal material comprises element surfaces; wherein a force component (Fx, Fy, Fz) produces electric polarization charges on the element surfaces; and wherein the torque component (Mx, My, Mz) to be sensed consists of at least one pair having force components (+Fx, Fx; +Fy, Fy; +Fz, Fz) wherein said force components (+Fx, Fx; +Fy, Fy; +Fz, Fz) of a pair have the same axis of action and opposite directions of action. The component transducer (20) receives the force components (+Fx, Fx; +Fy, Fy; +Fz, Fz) of a pair separately.

The invention relates to a method for measuring the torque of a drive unit (10), particularly a vehicle drive unit (10), said drive unit (10) comprising at least one bearing (20) for connecting to a fixed support point (21), and at least one sensor (22) being provided which measures a change in force and/or position, particularly a relative rotation of the drive unit (10), as a sensor value, wherein a torque at the drive unit (10) is determined as a measurement value on the basis of said sensor value.

A force sensor includes: a deformable body having a force receiving portion and a fixed portion; a displacement body configured to generate a displacement by elastic deformation generated in the deformable body; and a detection circuit configured to detect an applied force on the basis of the displacement generated in the displacement body, in which the deformable body includes: a tilting portion arranged between the force receiving portion and the fixed portion; a first deformable portion that connects the force receiving portion and the tilting portion; and a second deformable portion that connects the fixed portion and the tilting portion, the displacement body includes a displacement portion connected to the tilting portion and separated from the fixed portion, the detection circuit includes a first displacement sensor and a second displacement sensor arranged in the displacement portion, and the detection circuit outputs a first electric signal indicating an applied force on the basis of a detection value of the first displacement sensor, and outputs a second electric signal indicating an applied force on the basis of a detection value of the second displacement sensor, and then determines whether force detection is performed normally on the basis of the first electric signal and the second electric signal.

A torque sensor including an annular deformation body, left side support body, right side support body, left side connection members which connect left side connection points of the annular deformation body with the left side support body, and right side connection members which connect right side connection points of the annular deformation body with the right side support body. Orthogonal projection images of the left side connection points on the basic plane and orthogonal projection images of the right side connection points on the basic plane are formed at mutually different positions.

A torque sensor includes: an annular deformation body; first and second displacement electrodes which cause displacement by elastic deformation of the annular deformation body; first and second fixed electrodes arranged at positions opposite the first and second displacement electrodes; and a detection circuit that outputs an electric signal indicating a torque based on a variation amount of capacitance values of first and second capacitive elements each of which is configured of the displacement electrode and the fixed electrode. The annular deformation body includes a high elastic portion and a low elastic portion having a spring constant smaller than a spring constant of the high elastic portion. The detection circuit determines whether the torque sensor functions normally based on a ratio between first and second electric signals.

The present invention provides a torque sensor that is small and highly rigid and for which high production efficiency is possible. An annular deformation body (50) is disposed between a left side support body (10) and a right side support body (20). Protruding parts (11, 12) of the left side support body (10) are joined to two upper and lower sites on the left side surface of the annular deformation body (50), and protruding parts (21, 22) of the right side support body (20) are joined to two left and right sites on the right side surface of the annular deformation body (50). The annular deformation body (50) has, at four sites, detection parts (D1 to D4) that cause elastic deformation, the right side surface of each of the detection parts (D1 to D4) moves close to or moves away from the opposing surface of the right side support body (20) when torque around the Z axis is exerted on the left side support body (10) in a state that a load is applied to the right side support body (20). A displacement electrode is formed on a right side surface of each of the detection parts (D1 to D4) and a fixed electrode is formed on an opposing surface of the right side support body (20) to constitute four sets of capacitive elements, thereby detecting torque exerted as fluctuation in capacitance value thereof.

Disclosed is a device for measuring torque applied to a rotary shaft, including: a transmission, including a first part securely fastened to the shaft and receiving the torque applied to the shaft, and a second part securely fastened to the first part and able to move in relation to the first part when a torque is applied thereto; a first electrode securely fastened to the second part; a first support, securely fastened to the second part, including a second electrode situated facing the first electrode when no torque is applied to the shaft, the first and the second electrodes generating a first capacitance, the value of which varies according to a movement of the second part; a unit for measuring the first capacitance; and a unit for converting the first capacitance into a value of the torque applied to the shaft.

Provided herein is a capacitive torque sensor, which can completely offset forces/torques in all axial directions, except for force/torque in a direction of a central axis, by measuring variations in capacitances of four sensing cells arrayed at angular intervals of 90 degrees on the basis of a center of the sensor and can offer a sensing value for the torque in a central axis direction.

A force sensor includes: a deformable body having a force receiving portion and a fixed portion; a displacement body configured to generate a displacement by elastic deformation generated in the deformable body; and a detection circuit configured to detect an applied force on the basis of the displacement generated in the displacement body, in which the deformable body includes: a tilting portion arranged between the force receiving portion and the fixed portion; a first deformable portion that connects the force receiving portion and the tilting portion; and a second deformable portion that connects the fixed portion and the tilting portion, the displacement body includes a displacement portion connected to the tilting portion and separated from the fixed portion, the detection circuit includes a first displacement sensor and a second displacement sensor arranged in the displacement portion, and the detection circuit outputs a first electric signal indicating an applied force on the basis of a detection value of the first displacement sensor, and outputs a second electric signal indicating an applied force on the basis of a detection value of the second displacement sensor, and then determines whether force detection is performed normally on the basis of the first electric signal and the second electric signal.