A transportation stage for transporting a photomask is provided. The transportation stage includes a vacuum source and a supporting plate. The supporting plate has a number of passages connected to the vacuum source. The transportation stage further includes a membrane positioned on the supporting plate. A number of through holes are formed on a middle region of the membrane and communicating with the passages. The transportation stage also includes an acoustic wave transducer positioned on the membrane and is configured generate an acoustic wave along the membrane.

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

A compressed fluid source assembly may comprise: a pressure cylinder configured to receive a compressed fluid source therein; and a surface acoustic wave (SAW) sensor coupled to an external surface of the pressure cylinder.

A sensor system for determining deformation of an object subject to forces. The sensor system comprises an object upon which forces are exerted and a cavity within the object, a first substrate for supporting surface acoustic waves in an upper surface of the first substrate, the first substrate disposed in the cavity, a first surface acoustic wave transducer disposed on the upper surface and responsive to an interrogation signal for generating an incident surface acoustic wave in the upper surface, a first reflector array responsive to the incident surface acoustic wave for creating reflected surface acoustic waves on the upper surface, the reflected surface acoustic waves received by the transducer and having characteristics indicative of strain deformation of the object due to a force exerted on the object.

A fluid 10 is contained within a chamber 12. The chamber wall 14 has an inner surface 16 exposed to the fluid 10 and an outer surface 18 separated from the inner surface 18 by the material 20 of the wall 14. Ultrasound 22 is introduced into the material 20. Measurement of the time of flight of the ultrasound 22 through the body 20 allows a measurement to be made of the pressure of the fluid 10.

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

The present disclosure relates to systems, methods, devices for cantilever based pressuring monitoring, and the like. The systems and devices of the present disclosure can be used in caustic or harsh environments. Continuous pressure monitoring using the described devices can enable real-time adjustments for precise process control, contributing to improved efficiency and product quality.

A pressure sensing apparatus comprises an elongate first sensor device in a beam configuration supported at at least one longitudinal end by a rigid support structure and having a deflectable portion. A chamber is disposed adjacent a first, internally-facing, face of the first sensor device. An envelope hermetically seals the first sensor device and the chamber from an ambient environment external to the pressure sensing apparatus. The envelope comprises a flexible membrane disposed over and coupled to a second, externally-facing, face of the first sensor device and extending along at least one or two sides of the first sensor device and the chamber. The sensor device may be a surface acoustic wave device coupled to an RF antenna.