G01L2009/0069

Resistive pressure sensor including piezo-resistive electrode

Provided is a pressure sensor including an elastic thin film including a first surface and a second surface that face each other, the elastic thin film including an elastomer material, a plurality of protruding deformable structures patterned on the first surface; a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures; and a counter electrode disposed to face the piezoresistive electrode.

Differential pressure sensor and differential pressure sensor manufacturing method
09581516 · 2017-02-28 · ·

A differential pressure sensor has a sensor chip that is, between a first inner wall surface and a second inner wall surface of a sensor chamber, joined by a first adhesive agent layer between one face of the sensor chip and the first inner wall surface of the sensor chamber and joined through a second adhesive agent layer between other face of the sensor chip and the second inner wall surface of the sensor chamber. The first adhesive agent layer is an adhesive agent layer that has a Young's modulus that is smaller than the Young's modulus of a material that structures a sensor diaphragm. The second adhesive agent layer is an adhesive agent layer that has a Young's modulus that is smaller than the Young's modulus of the material that structures the sensor diaphragm and larger than the Young's modulus of the first adhesive agent layer.

Pressure Measuring Cell
20250189395 · 2025-06-12 ·

A pressure measuring cell is described, including a support body and a circular-shaped membrane including a first surface and a second surface, the support body supporting the circular-shaped membrane, wherein the pressure measuring cell further includes a plurality of strain sensitive resistors arranged on the second surface of the circular-shaped membrane and connected in a Wheatstone bridge circuit, wherein at least one strain sensitive resistor is an arc-shaped resistor including an arc-shaped surface area that is radially delimited by an inner circular arc and an outer circular arc.