A leak detection device operable to measure fluid leaks in an element to be tested that is positioned in a first enclosure. In one example, a measuring module is positioned in a second enclosure and connected to the first enclosure and the element to be tested by an aeraulic connection. At least one of the first enclosure and the measuring module are thermally insulated using an insulating material.

The current invention mitigates the problem of incorrect determinations of leaking packages during vacuum decay leak detection testing. As described in this disclosure, a testing chamber used for vacuum decay leak detection testing is exposed to interferences when not under vacuum or at low pressure conditions between testing cycles. By measuring one or more exposure time intervals immediately preceding a present test cycle, it is possible to improve detection of leaking packages by adjusting raw measured pressure gathered during vacuum decay leak testing based upon the length of exposure times and create corrected pressure data used to improve vacuum decay leak detection.

There is disclosed an improved leak checking method which can accurately test a sealing performance of a substrate holder more than conventional leak check techniques. The leak checking method includes: holding a substrate with a substrate holder, the substrate holder including a first holding member and a second holding member, the second holding member having an opening through which a surface of the substrate is exposed; pressing a sealing projection of the second holding member against the surface of the substrate when holding the substrate with the substrate holder; covering the surface of the substrate, exposed through the opening, and the sealing projection with a sealing cap; forming a hermetic space between the sealing cap and the substrate holder; introducing a pressurized gas into the hermetic space; and detecting a decrease in pressure of the pressurized gas in the hermetic space.

There is disclosed an improved leak checking method which can accurately test a sealing performance of a substrate holder more than conventional leak check techniques. The leak checking method includes: holding a substrate with a substrate holder, the substrate holder including a first holding member and a second holding member, the second holding member having an opening through which a surface of the substrate is exposed; pressing a sealing projection of the second holding member against the surface of the substrate when holding the substrate with the substrate holder; covering the surface of the substrate, exposed through the opening, and the sealing projection with a sealing cap; forming a hermetic space between the sealing cap and the substrate holder; introducing a pressurized gas into the hermetic space; and detecting a decrease in pressure of the pressurized gas in the hermetic space.

Device for testing the sealing of at least one system for insulating two mediums in a sealed manner, the system including a flange and a sealed door mounted in the flange, the test device including a casing including an inflatable seal intended to contact, in the inflated state, with the system and to ensure a sealing enabling the definition of a test volume between the system and the casing, a pneumatic pump and a pneumatic circuit configured to connect, in a first step, the pump to the inflatable seal such that the pump inflates the inflatable seal, and in a second step the pump to the test volume such that the pump generates in the test volume a pressure at a given value, and sensor for measuring the pressure in the test volume.

Integrity of a flexible bag is verified by a testing system, using helium to detect existence of a possible hole. The flexible bag is preliminary placed in vacuum chamber of a fluid-tightly isolated enclosure. After connecting a port of the bag to a helium feeding pipe, vacuum suction is performed to obtain vacuum outside the bag in the enclosure. Then, a first amount of helium is diffused in the internal volume of the enclosure through a gas permeable wall, to increase helium partial pressure outside the flexible bag. After, in a test phase while said vacuum suction is still performed, the bag is filled with a second amount of helium. A detector detects information representative of helium partial pressure in the internal volume, to allow detection of helium escaping from the bag, by analysis of a helium partial pressure drop.

A method for detecting a leak in a test object, including inserting the test object into a test chamber; filling the test object with a test gas; and adjusting a pressure in the test chamber and a pressure in the test object such that the test chamber pressure is lower than the test object pressure. The test chamber contains air and the test object is filled exclusively with a gas containing no molecules with oxygen atoms. In order to detect a leak in the test object, an oxygen proportion of the air in the test chamber is measured with an oxygen sensor.

A method for testing a test specimen for the presence of a leak using a film chamber for accommodating the test specimen, wherein the film chamber comprises walls enclosing a film chamber volume, which walls include at least one flexible wall area, comprising the steps of: placing the test specimen into the film chamber, and closing the film chamber, characterized in that complete closing of the film chamber is determined on the basis of the signal of a position measuring device which detects the relative position of the film chamber walls with respect to each other.

The current invention mitigates the problem of incorrect determinations of leaking packages during vacuum decay leak detection testing. As described in this disclosure, a testing chamber used for vacuum decay leak detection testing is exposed to interferences when not under vacuum or at low pressure conditions between testing cycles. By measuring one or more exposure time intervals immediately preceding a present test cycle, it is possible to improve detection of leaking packages by adjusting raw measured pressure gathered during vacuum decay leak testing based upon the length of exposure times and create corrected pressure data used to improve vacuum decay leak detection.

Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring only one manual connection/disconnection step of the ampoule to the apparatus. The testing includes analyses for residual moisture, entrained particulate matter, differential pressure, and helium leak checking.