Aspects of the present disclosure include methods for modulating an intensity profile of a laser beam. Methods according to certain embodiments include irradiating an acousto-optic device with a laser to generate an output laser beam having a plurality of angularly deflected laser beams, capturing an image of the output laser beam, determining an intensity profile of the output laser beam along a horizontal axis from the captured image and adjusting one or more parameters of a waveform inputted into the acousto-optic device in response to the determined intensity profile to generate an output laser beam having a modulated intensity profile. Systems having a laser, an acousto-optic device, an imaging sensor and a waveform generator as well as non-transitory computer readable storage medium with instructions for practicing the subject methods are also described.

A light source apparatus can avoid double-counting of particles in a flow cytometer for measuring and analyzing a plurality of particles flowing in a flow cell. A light source apparatus for a flow cytometer includes a semiconductor laser for emitting a laser beam, a collimating lens for collimating the laser beam emitted from the semiconductor laser in a spread light state, a first beam conversion unit composed of prisms and a second beam conversion unit composed of prisms for matching a flow cell length direction with a slow axis direction of the collimated laser beam in a flow cell after reducing the beam diameter in a fast axis direction and increasing the beam diameter in the slow axis direction, and a focusing lens for focusing the laser beam passed through these beam conversion units in the flow cell.

Techniques for analyzing bioparticles are described. The techniques may involve a microchip for bioparticle analysis. The microchip may include at least one channel configured to provide a flow path for one or more biological particles and at least one optic configured to receive fluorescence generated by irradiating at least some of the one or more biological particles in the flow path with at least one light beam. The at least one optic may have a surface configured to direct the fluorescence. A first portion of the surface may be configured to receive the at least one light beam. The first portion may have a different curvature that at least one second portion of the surface.

The present disclosure provides apparatuses, systems, and methods for performing particle analysis through flow cytometry at comparatively high event rates and for gathering high resolution images of particles.

An apparatus to provide a label-free or native particle analysis comprises a light generating system producing first light pulses at a first wavelength and second light pulses at a second wavelength; and a flow cell coupled to the light generating system to convey particles for analysis. The light generating system is configured to chirp at least one of the first light pulses and the second light pulses to analyze the particles.

Examples disclosed herein generally relate to systems and methods for detecting the size of a particle in a fluid. In one example, a system for imaging a particle includes a first imaging device. The first imaging device includes a lens and a digital detector. The system further includes a laser source. He laser source is configured to emit a first laser beam and a second laser beam. The digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens. The accumulated light is scattered from the particle. The accumulated light includes light from the first laser beam and the second laser beam.

A slurry monitoring device, a CMP system and a method of in-line monitoring a slurry are provided. The slurry monitoring device incudes a slurry metrology cell, a plurality of light sources and at least one optical detector. The slurry metrology cell is configured to accommodating a slurry. The light sources are configured to emit light beams on the slurry in the slurry metrology cell. The light sources include a first light source configured to emit a first light beam having a first wavelength, and a second light source configured to emit a second light beam having a second wavelength longer than the first wavelength. The at least one optical detector is configured to detect an intensity of the light beams scattered by abrasive particles in the slurry.

A fractionated photoacoustic flow cytometry (PAFC) system and methods for the in vivo detection of target objects in biofluidic systems (e.g., blood, lymph, urine, or cerebrospinal fluid) of a living organism is described. The fractionated system includes a fractionated laser system, a fractionated optical system, a fractionated acoustic system, and combinations thereof. The fractionated laser system includes at least one laser or laser array for pulsing a target object within the circulatory vessel with fractionated focused laser beams. The fractionated optical system separates one or several laser beams into multiple beams in a spatial configuration on the skin above the circulatory vessel of the living organism. The fractionated acoustic system includes multiple focused ultrasound transducers for receiving photoacoustic signals emitted by the target object in response to the fractionated laser beams.

An inspection system (1600), a lithography apparatus, and an inspection method are provided. The inspection system (1600) includes an illumination system (1602), a detection system (1606), and processing circuitry (1622). The illumination system generates a first illumination beam (1610) at a first wavelength and a second illumination beam (1618) at a second wavelength. The first wavelength is different from the second wavelength. The illumination system irradiates an object (1612) simultaneously with the first illumination beam and the second illumination beam. The detection system receives radiation (1620) scattered by a particle (1624) present at a surface (1626) of the object at the first wavelength. The detection system generates a detection signal. The processing circuitry determines a characteristic of the particle based on the detection signal.

Aspects of the disclosure include methods for generating angularly deflected laser beams for irradiating a sample in a flow stream. Methods according to certain embodiments include generating a first set of angularly deflected laser beams and a second set of angularly deflected laser beams, propagating the first set of angularly deflected laser beams along a different optical path from the second set of angularly deflected laser beams, combining the first set of angularly deflected laser beams with the second set of angularly deflected laser beams and directing the combined sets of laser beams onto a sample in a flow stream and detecting light from the sample. Systems having a laser, an acousto-optic device and an optical adjustment component configured to generate a first set of angularly deflected laser beams and a second set of angularly deflected laser beams are also described.