Patent classifications
G01N2021/458
Measuring microscope for measuring masks for lithographic methods and measuring method and calibration method therefor
The present invention relates to a method for calibrating a measuring microscope which may be used to measure masks, in which a calibration mask is utilized in a self-calibration algorithm in order to ascertain error correction data of the measuring microscope, wherein, in the self-calibration algorithm, the calibration mask is imaged and measured in various positions in the measuring microscope in order to ascertain one or more portions of the error correction data, wherein the surface profile of the calibration mask is ascertained and utilized when determining the error correction. Moreover, the invention relates to a measuring microscope and a method for operating same.
WAVEGUIDE ENHANCED ANALYTE DETECTION APPARATUS
This disclosure provides photonic integrated chip that has an optical waveguide located on a photonic circuit substrate that includes a photonic circuit that is optically coupled to the waveguide. A microfluidic channel is in a silicon substrate and is attached to the photonic circuit substrate. The microfluidic channel is positioned over the optical waveguide such that its side surfaces and an outermost surface extend into the microfluidic channel. The microfluidic channel extends along a length of the optical waveguide, and nanoparticles are located on or adjacent the optical waveguide located within the microfluidic channel.
APPARATUS AND METHOD FOR BIOMOLECULAR ANALYSIS
An apparatus, and method of operating the same, detects changes in biomass accumulating on a surface of a substrate while minimizing bulk effect. The apparatus includes a sensor substrate and two illumination sources. A first illumination source generates a first light having a first central wavelength. A second illumination source generates a second light having a second central wavelength different than the first wavelength. The first and second light are mixed to produce a combined light. An analyte solution is introduced to the sensor substrate. Incident light of the combined light is reflected from the sensor substrate to produce a signal. The signal is imaged with a camera to obtain a reflectance. Reflectance produced by the combined light is not affected by variations in the dielectric properties of the analyte solution. A biomass accumulated on the substrate is computed based on the reflectance.
Method for detecting a local change in refractive index of a dielectric medium located on the surface of an optical sensor
The invention relates to a method for detecting a local change in refractive index of a dielectric medium located on the surface of an optical sensor, said optical sensor comprising for this purpose a waveguide comprising a region, called the active region, covered with at least one metallic layer in contact with the dielectric medium, said method comprising the following steps: a) emitting a light beam at the input of the waveguide so that this light beam can be propagated, within the waveguide, according to at least N propagation modes, where N is a natural integer such that N≥2; b) measuring the intensity of at least one zone of the spatial distribution of the intensity of the light beam reflected by said active region of the optical sensor; and c) detecting the local change in the refractive index of the dielectric medium by means of a database supplying the link between the intensity of said at least one zone of the spatial distribution of the intensity of the light beam reflected by the active region of the optical sensor and a change in refractive index of a reference medium.
SENSOR COMPRISING A WAVEGUIDE WITH OPTICAL RESONATOR AND SENSING METHOD
A sensor (10) comprises a waveguide (20) having a longitudinal axis and an end face (21), the waveguide (20) comprising a Bragg grating (23). The sensor comprises at least one reflector (24) on the end face (21) of the waveguide (20). An optical resonator (25) is formed by the Bragg grating (23), the at least one reflector (24), and an inner portion of the optical resonator (25) between the Bragg grating (23) and the at least one reflector (24). The inner portion of the optical resonator (25) extends within a portion of the waveguide (20). The sensor (10) comprises a detector (32) configured to detect at least one spectral characteristic of the optical resonator (25) or a change of at least one spectral characteristic of the optical resonator (25).
DEVICE FOR DETECTING AND/OR DETERMINING THE CONCENTRATION OF AN ANALYTE PRESENT IN A TISSUE AND A METHOD AND USE OF THIS DEVICE
The device for detecting and/or determining the concentration of an analyte present in a tissue includes a sensor which is an optical fibre interferometer, and one interferometer arm being coated with an immobilised binding agent enabling selective binding of the analyte. The interferometer arm is mounted inside a guide enabling puncturing the tissue and performing an in situ measurement without the necessity to collect or prepare a sample. The guide is provided with a closed guide face, longitudinal perforations on sidewalls enabling the analyte to reach the binding agent, and an opening in the input end of the guide for introducing the interferometer with the arm into the guide. At the input end, the opening is sealed, enabling the isolation of the interior of the guide from the surroundings. The interferometer is mounted in a position in which the interferometer does not touch the inside walls of the guide.
SENSOR BASED ON GRATING SLIT WAVEGUIDE COMPOSITE STRUCTURE
A sensor including: a substrate including a first surface and a second surface opposing to each other, the first surface being recessed to form a first groove, and the substrate further including at least two through holes penetrating through the second surface and a bottom surface of the first groove; a dielectric layer disposed to cover the first surface, and opposing to the first groove; a metal layer disposed on the bottom surface of the first groove and avoiding openings of the through holes on the bottom surface of the first groove, wherein the dielectric layer, the metal layer and an interval between the dielectric layer and the metal layer form a slit optical waveguide; and a grating formed on the dielectric layer, wherein the grating is used to implement wave vector matching of an incident light with a mode of the slit optical waveguide.
Sensor based on grating slit waveguide composite structure
A sensor including: a substrate including a first surface and a second surface opposing to each other, the first surface being recessed to form a first groove, and the substrate further including at least two through holes penetrating through the second surface and a bottom surface of the first groove; a dielectric layer disposed to cover the first surface, and opposing to the first groove; a metal layer disposed on the bottom surface of the first groove and avoiding openings of the through holes on the bottom surface of the first groove, wherein the dielectric layer, the metal layer and an interval between the dielectric layer and the metal layer form a slit optical waveguide; and a grating formed on the dielectric layer, wherein the grating is used to implement wave vector matching of an incident light with a mode of the slit optical waveguide.
Micro-resonator and fiber taper sensor system
A micro-resonator and fiber taper based sensing system, which uses mode splitting or frequency shift methods and polarization measurements for particle sensing.
IMAGING APPARATUS AND IMAGING METHOD
An imaging apparatus according to an aspect of the present disclosure includes: a waveguide that transmits light emitted from a light source; a detector that detects power of a speckle pattern generated by the light passing through the waveguide and applied to an object; at least one memory storing a set of instructions; and at least one processor configured to execute the set of instructions to reconstruct an image of the object based on the power obtained by making the light enter the waveguide under different conditions.