G01N2021/4711

Sensor for a virtually simultaneous measurement of a transmission and/or forward scattering and/or remission and for a simultaneous measurement of the transmission and forward scattering or transmission and remission of a liquid sample

Described herein is a sensor for a virtually simultaneous measurement of transmission and/or forward scattering and/or remission and for a simultaneous measurement of the transmission and forward scattering or the transmission and remission of a liquid sample. Further described herein is a method for a virtually simultaneous measurement of transmission and/or forward scattering and/or remission and for a simultaneous measurement of the transmission and forward scattering or the transmission and remission of a liquid sample using a sensor according to the invention. Further described herein is a method for using the sensor according to the invention in order to determine the color properties of painting agents such as lacquers, dyes, pastes, and pigments or dilutions thereof.

Complex spatially-resolved reflectometry/refractometry

Apparatus and methods for complex imaging reflectometry and refractometry using at least partially coherent light. Quantitative images yield spatially-dependent, local material information about a sample of interest. These images may provide material properties such as chemical composition, the thickness of chemical layers, dopant concentrations, mixing between layers of a sample, reactions at interfaces, etc. An incident beam of VUV wavelength or shorter is scattered off of a sample and imaged at various angles, wavelengths, and/or polarizations. The power of beam is also measured. This data is used to obtain images of a sample's absolute, spatially varying, complex reflectance or transmittance, which is then used to determine spatially-resolved, depth-dependent sample material properties.

Optical system for reference switching

Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultanous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein

A scatterometer performs diffraction based measurements of one or more parameters of a target structure. To make two-color measurements in parallel, the structure is illuminated simultaneously with first radiation (302) having a first wavelength and a first angular distribution and with second radiation (304) having a second wavelength and a second angular distribution. The collection path (CP) includes a segmented wavelength-selective filter (21, 310) arranged to transmit wanted higher order portions of the diffracted first radiation (302X, 302Y) and of the diffracted second radiation (304X, 304Y), while simultaneously blocking zero order portions (302, 304) of both the first radiation and second radiation. The illumination path (IP) in one embodiment includes a matching segmented wavelength-selective filter (13, 300), oriented such that a zero order ray passing through the illumination optical system and the collection optical system will be blocked by one of said filters or the other, depending on its wavelength.

CALIBRATING MEASURED FILL-LEVEL OF A CONTAINER BASED ON MEASUREMENT DISRUPTION EVENT DETECTION
20200284641 · 2020-09-10 ·

Substance level of a container at a moment may be measured. Filtered substance level for the moment may be determined based on multiple substance levels of the container at multiple moments preceding the moment. An occurrence of a measurement disruption event at the moment may be detected based on the substance level being smaller than the filtered substance level and the difference between the substance level and the filtered substance level exceeding a difference threshold. Responsive to detection of the occurrence of the measurement disruption event, the substance level may be calibrated.

Portable device for measuring the geometry of an object and its spatially varying surface reflectance on site

The invention concerns a portable device that, even for a device of small dimensions, increases the amount of the recorded imagery data of a measured object in a fixed position in order to obtain spatially varying surface reflectance data, i.e. Bidirectional Texture Function data, and the multidirectional imaging of real objects with the use of a basic three-dimensional object (2) equipped with first illumination units (4) and/or exit apertures of a light guiding system (21) in combination with multiplication of optical elements (11) contributing to the imaging on the acquisition system and/or second illumination units (9) and/or acquisition elements of the camera/detector type and/or third illumination units (12), by their placement on moveable arms (7, 8, 13) attached to the basic three-dimensional object (2). This principle is usable for small portable devices and allows for recording the visual appearance of surfaces on site without having to extract a sample from its environment.

Calibrating measured fill-level of a container based on measurement disruption event detection
10760942 · 2020-09-01 · ·

Substance level of a container at a moment may be measured. Filtered substance level for the moment may be determined based on multiple substance levels of the container at multiple moments preceding the moment. An occurrence of a measurement disruption event at the moment may be detected based on the substance level being smaller than the filtered substance level and the difference between the substance level and the filtered substance level exceeding a difference threshold. Responsive to detection of the occurrence of the measurement disruption event, the substance level may be calibrated.

MEASURING APPARATUS, MEASURING METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM

A measuring apparatus is provided with: an irradiator configured to irradiate fluid with light; a first light receiver configured to receive a forward scatter component of scattered light scattered by the fluid; a second light receiver configured to receive a backscatter component of the scattered light; a third light receiver configured to receive a side scatter component of the scattered light; and an outputting device configured to output fluid information about the fluid, which is obtained on the basis of light receiving signals of the first light receiver, the second light receiver, and the third light receiver. According to this measuring apparatus, it is possible to output accurate fluid information because of the use of the forward scatter component, the backscatter component, and the side scatter component of the scattered light.

Systems and methods for measuring reflectivity of a painted object

A system for measuring the reflectivity of a painted object includes an electromagnetic wave source that emits an electromagnetic wave, a panel that holds the painted object, with the panel being movable to adjust an incident angle of the electromagnetic wave onto the panel, a reflector to receive and direct electromagnetic waves that are reflected by the painted object towards the reflector, a detector to detect an intensity of electromagnetic waves, and a control unit. The control unit is communicatively connected to the panel and to the detector. The control unit determines the incident angle of the electromagnetic wave, receives the intensity of the electromagnetic wave detected by the detector, and determines the reflectivity of the painted object as a function of the intensity of the electromagnetic wave detected by the detector over a predetermined range of incident angle values.

Embedded particle depth binning based on multiple scattering signals
10732130 · 2020-08-04 · ·

An inspection system may include an illumination source to generate an illumination beam, illumination optics to direct the illumination beam to a sample. The system may further include a first collection channel to collect light from the sample within a first range of solid angles and at a first selected polarization. The system may further include a second collection channel to collect light from the sample within a second angular range, the second range of solid angles and at a second selected polarization. The system may further include a controller to receive two or more scattering signals. The scattering signals may include signals from the first and second collection channels having selected polarizations. The controller may further determine depths of defects in the sample based on comparing the two or more scattering signals to training data including data from a training sample having known defects at known depths.