Patent classifications
G01N21/6489
Die division method and inspection apparatus for avoiding defects locations on silicon carbide wafers
The present invention relates to defects inspection on a silicon carbide wafer or an epitaxial layer thereon to determine the location, and adjustment of the location of the scribe line, which is a separation line forming a gap between adjacent dies. The present invention can obtain high efficiency and economy in the semiconductor process using wafers containing various defects in the surface and thin film, by minimizing the effect of wafer defects on the final yield of the semiconductor chip or die, via adjustment of scribe line positions arranged on the wafer.
System and method for detecting contamination of thin-films
A thin-film deposition system deposits a thin-film on a wafer. A radiation source irradiates the wafer with excitation light. An emissions sensor detects an emission spectrum from the wafer responsive to the excitation light. A machine learning based analysis model analyzes the spectrum and detects contamination of the thin-film based on the spectrum.
Optical metrology system for spectral imaging of a sample
An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector collects the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector collects the broadband illumination reflected along the second illumination line. A signal collecting optic may collect the photoluminescence light and broadband light and focus it into a line, which is received by an optical conduit. The output end of the optical conduit has a shape that matches the entrance of the detector.
ELECTROMAGNETIC RADIATION SOURCE AND LIGHT SOAKING SYSTEM COMPRISING SUCH AN ELECTROMAGNETIC RADIATION SOURCE
An electromagnetic radiation source designed for a light-soaking treatment of a photovoltaic cell or a photovoltaic cell precursor, the source including a plurality of first radiation emitters and a plurality of second radiation emitters, the first and second radiation emitters being arranged in a plurality of rows, each first radiation emitter being configured to emit a first electromagnetic radiation having a spectrum comprised between 300 nm and 550 nm and each second radiation emitter being configured to emit a second electromagnetic radiation having a spectrum comprised between 800 nm and 1200 nm.
Apparatus with closed loop feedback for forming a nanostructured thin film with porosity gradient on an array of sloped outdoor panel surfaces using meniscus drag
A thin-film coating applicator assembly is disclosed for coating substrates in outdoor applications. The innovative thin-film coating applicator assembly is adapted to apply performance enhancement coatings on installed photovoltaic panels and glass windows in outdoor environments. The coating applicator is adapted to move along a solar panel or glass pane while applicator mechanisms deposit a uniform layer of liquid coating solution to the substrate's surface. The applicator assembly comprises a conveyance means disposed on a frame. Further disclosed are innovative applicator heads that comprise a deformable sponge-like core surrounded by a microporous layer. The structure, when in contact with a substrate surface, deposits a uniform layer of coating solution over a large surface.
MAGNETO-OPTICAL DEFECT CENTER MAGNETOMETER
A magneto-optical defect center magnetometer, such as a diamond nitrogen vacancy (DNV) magnetometer, can include an excitation source, a magneto-optical defect center element, a collection device, a top plate, a bottom plate, and a printed circuit board. The excitation source, the magneto-optical defect center element, and the collection device are each mounted to the printed circuit board
Fluorescence imaging of gemstone on transparent stage
Systems and methods here may be used for a setup of fluorescence image capturing of a gemstone, such as a diamond placed on a flat stage. Some examples utilize a setup that both sends light and captures the image from the table side of the gemstone by passing ultraviolet (UV) light between 10 nm and 400 nm to the gemstone and capturing the excited fluorescence image for analysis through a dichroic beam splitter. In some examples, the cutoff is 300 nm. The dichroic beam splitter arrangement allows for the camera to focus on the same interface of the stage and gemstone over and over for ease of use and without moving, changing, or adjusting the equipment for different samples.
APPARATUS AND METHOD FOR VISUALLY INSPECTING GEMSTONES
There is disclosed an apparatus for visually inspecting gemstones. The apparatus contains a first light source, a sample stage adapted to receive a gemstone thereon, and a rotating stage located below the sample stage. The rotating stage is adapted to rotate relative to the sample stage. Embodiments of the invention therefore provide a portable and automatic gemstone inspecting apparatus that provides multiple inspection methods centrally without the need to use other external devices.
MEASUREMENT SYSTEM AND METHOD FOR SWITCHING SET VALUE FOR ADJUSTMENT
A measurement system includes detachable parts, on which one filter module out of a plurality of filter modules including optical filters that each transmit different types of special light is detachably mounted, a specification part that specifies the optical filter of the one filter module mounted on the detachable parts, and a set value switching part that switches, according to the specified optical filter specified by the specification part, set values for adjustment used in a measurement using a specific optical filter.
RATIOMETRIC AND MULTIPLEXED SENSORS FROM SINGLE CHIRALITY CARBON NANOTUBES
A single chirality single walled carbon nanotubes (SWNT), and combinations thereof, can be used to detect trace levels of chemical compounds in vivo with high selectivity.