The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of smaller scale. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration incorporating an optimal microscope that re-detects defects, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration incorporating an optimal microscope that re-detects defects, and a distribution filter is inserted at the pupil plane when making dark-field observations using this optical microscope.

A method includes obtaining a dark-field signal generated from a dark-field CT scan of an object, wherein the dark-field CT scan is at least a 360 degree scan. The method further includes weighting the dark-field signal. The method further includes performing a cone beam reconstruction of the weighted dark-field signal over the 360 degree scan, thereby generating volumetric image data. For an axial cone-beam CT scan, in one non-limiting instance, the cone-beam reconstruction is a full scan FDK cone beam reconstruction. For a helical cone-beam CT scan, in one non-limiting instance, the dark-field signal is rebinned to wedge geometry and the cone-beam reconstruction is a full scan aperture weighted wedge reconstruction. For a helical cone-beam CT scan, in another non-limiting instance, the dark-field signal is rebinned to wedge geometry and the cone-beam reconstruction is a full scan angular weighted wedge reconstruction.

A photomultiplier tube (PMT) detector assembly includes a PMT and an analog PMT detector circuit. The PMT includes a photocathode configured to emit an initial set of photoelectrons in response to an absorption of photons. The PMT includes a dynode chain with a plurality of dynodes. The dynode chain is configured to receive the initial set of photoelectrons, generate at least one amplified set of photoelectrons, and direct the at least one amplified set of photoelectrons. The PMT includes an anode configured to receive the at least one amplified set of photoelectrons, with a digitized image being generated based on a measurement of the final amplified set of photoelectrons. The digitized image is corrected by applying an output of the signal measured by the analog PMT detector circuit to the digitized image.

Provided is an inspection device or a manufacturing method for a separator having a thermoplastic polymer layer. A separator S includes a substrate, and a thermoplastic polymer layer disposed on a portion of one side or both sides of the substrate. The present invention is characterized by including a step for inspecting the surface of the separator S, wherein the separator is inspected by using an inspection device having a camera 2 and a light source 1 that irradiates an inspection portion of the separator with light at an incident angle of 60° to 90°.

A method of detecting an abnormal growth of graphene includes: preparing an inspection target having a graphene film formed on a substrate by CVD; receiving light from the graphene film by using a dark field optical system; and inspecting the received light, thereby detecting the abnormal growth of the graphene.

A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.

An illumination module may include a laser diode array configured to emit laser radiation; a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation; a multiple-angle illumination unit; and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit. The multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.

Methods for detecting areas of localized tilt on a sample using imaging reflectometry measurements include obtaining a first image without blocking any light reflected from the sample and obtaining a second image while blocking some light reflected from the sample at the aperture plane. The areas of localized tilt are detected by comparing first reflectance intensity values of pixels in the first image with second reflectance intensity values of corresponding pixels in the second image.

A device comprises a housing, a detector for receiving solar irradiance and for providing a detector signal providing an indication of an amount of solar irradiance received by the detector and a shield transparent to at least part of the solar irradiance to be detected, the shield and the housing providing a detector space for housing at least part of the detector. The device further comprises a first light source for emitting light to the shield and a first light sensor arranged to receive light from the first light source, arranged to provide a first signal providing an indication for an amount of light received by the first light sensor. Particles will and reflect light back to the detector space. The reflected light is received by the light sensor. Hence, a signal generated by the sensor is an indication for pollution of the shield.

A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.