An optical foreign matter inspection device includes a rotation stage; a laser light source; a sensor that is a charge accumulation type sensor; a detecting circuit; a light emission timing signal generating circuit configured to generate a light emission timing synchronizing signal synchronized with laser emission; a trigger signal generating circuit configured to receive a first signal (a stage encoder signal) indicating a rotation state of a sample, and generate a trigger signal synchronized with the light emission timing synchronizing signal; a number-of-emitted-pulse calculating circuit configured to receive the light emission timing synchronizing signal and the first signal, and calculate the number of pulses in each period corresponding to a position in a radial direction of the sample; and a processing system configured to measure a state of each position on a surface of the sample by using a detection signal and the number of pulses.

At least some embodiments are directed to systems and methods to optimize relative signal delays in vision systems having illumination assemblies separate from a host. In an example embodiment there is a system that includes a host device having, an imaging assembly coupled to the host device and operable to capture image data, and an illumination assembly coupled to the host device and operable to provide illumination. The system is configured such that the host transmits, to the imaging assembly, a series of exposure signals causing the imaging assembly to capture a series of frames and transmits, to the illumination assembly, a series of illumination signals causing the illumination assembly to provide the illumination as a series of strobes. Thereafter the host evaluate each frame to identify a peak-brightness frame and from that, based on a corresponding illumination signal, determines an appropriate relative signal delay for future operations.

A stroboscopic stepped illumination defect detection system for appearance defect detection of a product is provided. The system includes an image extraction unit, a brightness adjustment unit, a data processing unit, and a stroboscopic control unit. The image extraction unit is connected to the stroboscopic control unit and used for obtaining stable and clear images in various transmission/reflection visual bright fields/dark fields; and the brightness adjustment unit is connected to the stroboscopic control unit and used for setting various transmission/reflection visual bright fields/dark fields and converting in the various transmission/reflection visual bright fields/dark fields.

An automatic optical inspection (AOI) device and method are disclosed. The device is adapted to inspect an object under inspection (OUI) (102) carried on a workpiece stage (101) and includes: a plurality of detectors (111, 112) for capturing images of the OUI (102); a plurality of light sources (121, 122) for illuminating the OUI (102) in different illumination modes; and a synchronization controller (140) signal-coupled to both the plurality of detectors (111, 112) and the plurality of light sources (121, 122). The synchronization controller (140) is configured to directly or indirectly control the plurality of detectors (111, 112) and the plurality of light sources (121, 122) based on the position of the OUI (102) so that each of them is individually activated and deactivated according to a timing profile, that each of the detectors (111, 112) is able to capture images of the OUI (102) in an illumination mode provided by a corresponding one of the light sources (121, 122), and that when any one of the light sources (121, 122) is illuminating the OUI (102), only the one of the detectors (111, 112) corresponding to this light source (121, 122) is activated. Through the timing control over the multiple light sources (121, 122) and detectors (111, 112) by the synchronization controller (140), inspection with multiple measurement configurations can be accomplished within a single scan, resulting in a significant improvement in inspection efficiency.

The amount of light to be emitted by an auxiliary light source for capturing an image to which correction processing is applied, as well as a parameter used in the correction processing, is determined based on a degree of shadows of an object to be captured using the auxiliary light source. In this way, shadows in an image obtained through image capture using the auxiliary light source can be appropriately corrected with a simple method.

At least some embodiments are directed to systems and methods to optimize relative signal delays in vision systems having illumination assemblies separate from a host. In an example embodiment there is a system that includes a host device having, an imaging assembly coupled to the host device and operable to capture image data, and an illumination assembly coupled to the host device and operable to provide illumination. The system is configured such that the host transmits, to the imaging assembly, a series of exposure signals causing the imaging assembly to capture a series of frames and transmits, to the illumination assembly, a series of illumination signals causing the illumination assembly to provide the illumination as a series of strobes. Thereafter the host evaluate each frame to identify a peak-brightness frame and from that, based on a corresponding illumination signal, determines an appropriate relative signal delay for future operations.

A displacement measurement device 10 is provided with: a laser light source 11 for emitting laser light to a measurement area R of a measurement target object S; a focusing optical system (the beam splitter 151, the first reflecting mirror 1521, the condenser lens 155) having a front focal point in the measurement area R and a rear focal point on a predetermined imaging surface (the detection surface 1561); a non-focusing optical system (the beam splitter 151, the diffuser 153, the second reflecting mirror 1522, and the condenser lens 155) in which light from a measurement area R of a correspondence point in the measurement area corresponding to each point of the imaging surface with respect to the focusing optical system is incident on the point of the imaging surface; and a photodetector (image sensor 156) configured to detect light intensity on the imaging surface for each point. Thus, corresponding to each of a large number of points in the measurement area R, main reflected light reflected at the point and reference light reflected at the surrounding range of the point are incident on each of a large number of points in the imaging surface, and the main reflected light and the reference light interfere at a large number of points in the imaging surface. Thus, an interference pattern is obtained.

A defect detection apparatus is provided that can inspect a measurement region of a target object at one time and without inconsistencies arising within the measurement region. A defect detection apparatus 10 includes: a generation unit (signal generator 11 and vibrator 12) for generating an elastic wave in a target object S; an illumination unit (pulsed laser light source 13 and illumination light lens 14) for performing stroboscopic illumination onto a measurement region of a surface of the target object S; and a displacement measurement unit (speckle shearing interferometer 15) for collectively measuring displacements in a normal direction at each point of the measurement region with respect to at least three mutually-different phases of the elastic wave by controlling a phase of the elastic wave and a timing of the stroboscopic illumination. Defects in the measurement region are detected based on the displacements in the normal direction at each point of the measurement region with respect to at least three phases that are obtained by the displacement measurement unit.

A container inspection device and a container inspection method for inspecting containers are provided. The container inspection device comprises at least one light fixture for illuminating containers at a predetermined inspection instant of time for inspecting the containers, and an electrical line for connecting the at least one light fixture to an electrical energy supply and to a bus system, so that the electrical line serves both to supply the at least one light fixture with electrical energy and to connect with a real time data network.

A processing system is configured to access an image of a system under analysis including a plurality of features of interest. The processing system determines a first angular position estimate of a first feature of interest in the image and determines a second angular position estimate of a second feature of interest in the image. The processing system determines a final angular position estimate for the system under analysis based on a relationship between the first angular position estimate and the second angular position estimate. The final angular position estimate is output