There is provided a tubular body inner surface inspection apparatus that detects a defect existing on an inner surface of a tubular body, the apparatus including: a tubular body imaging apparatus including N (N2) imaging units each including a laser light source that applies laser light, an optical element that reflects laser light applied from the laser light source in a circumferential direction of the inner surface of the tubular body, as annular laser light, an area camera that images a region of the inner surface of the tubular body where the annular laser light is applied, and thereby generates an annular beam image, and a linking member that links together and fixes the laser light source and the area camera, in which the imaging units are linked in series along a tube axial direction of the tubular body in such a manner that positions of the linking members in a plane orthogonal to a tube axis are different from each other; a movement apparatus that moves the tubular body imaging apparatus along the tube axial direction of the tubular body; and an arithmetic processing apparatus that, while moving the tubular body imaging apparatus by means of the movement apparatus, performs image processing on a plurality of annular beam images generated in each of the imaging units and assesses whether a defect exists on the inner surface of the tubular body or not.

A first light source is directed at an outer surface of a workpiece in an inspection module. The light from the first light source that is reflected from the outer surface of the workpiece is directed to the camera via a first pathway. The light from the first light source transmitted through the workpiece is directed to the camera via a second pathway. A second light source is directed at the outer surface of the workpiece 180 from that of the first light source. The light from the second light source that is reflected from the outer surface of the workpiece is directed to the camera via the second pathway. The light from the second light source transmitted through the workpiece is directed to the camera via the first pathway.

A semiconductor inspection tool system is disclosed. The system comprises a first illumination setup for generating at least one first illumination radiation and for directing the at least one first illumination radiation to at least one bonding region non-filled volume formed between two layers of a multi-layer stack. The system also comprises a second illumination setup being for generating at least one second illumination radiation and for directing the at least one second illumination radiation at multi-layer stack edges. The second illumination radiation is configured for illuminating at least a normal edge of at least two layers, the second illumination setup has different radiation parameters than the first illumination setup. The system further includes a bonding region sensor unit for collecting reflected electromagnetic radiation from a bonding region volume and generating at least one sensing data being indicative of the bonding region.

A Lidar system includes an illumination system that includes a optical element and a light emitter aimed at the optical element. An exit window is positioned to receive light directed from the optical element. The illumination system may include a light-receiving element including a beam dump and/or a photodetector. The light-receiving element is positioned to receive light directed from the optical element. The light-receiving element and the exit window are on the same side of the optical element. The illumination system may include a light shield between the photodetector and the exit window. The light shield is positioned to shield the photodetector from light passing through the exit window.

A cover glass inspecting apparatus may include a transfer module for transferring a cover glass. The cover glass may include a flat plate portion extending in first and second directions crossing with each other and edge portions protruding in a third direction perpendicular to the first and second directions and connected to outer circumference of the flat plate portion, wherein the flat plate portion may include first and second surfaces facing each other. The cover glass inspecting apparatus may further include a first optical module for photographing the first surface, a second optical module for photographing the second surface, and a control module for reading images of the cover glass taken by the first optical module and the second optical module. The first optical module may include a first sub optical module for photographing the first surface and a second sub optical module for photographing the edge portions.

An apparatus for measurement of surface relief provides a phase sensitive camera and processing to reconstruct a wavefront profile matching the surface when illuminated with a known light source thereby providing noncontact surface relief measurements.

A testing device for bottom-emitting or bottom-detecting optical devices may comprise a support structure to support a lower transparent chuck and an upper transparent chuck that includes a set of vacuum holes. In some implementations, a vacuum may be formed in a space between the lower transparent chuck and the upper transparent chuck when a vacuum pump is applied to an opening in a sidewall of the support structure. For example, the vacuum may create suction to cause an optical device under test to be mechanically secured on a top surface of the upper transparent chuck. The testing device may further comprise a photodetector disposed below the lower transparent chuck to detect light that travels through the upper transparent chuck and the lower transparent chuck when one or more probes complete an electrical path that causes the optical device under test to emit the light.

It is therefore an objective to provide an object multi-perspective inspection apparatus and a method therefor. The apparatus includes an image capture device; an inspection site and at least two reflection devices, being arranged for reflecting simultaneously to the image capture device at least two different side views of the object located in the inspection site; wherein: the image capture device has a field of view including the at least two different side views of the reflection. By introducing reflection devices into the inspection apparatus to enable the image capture device to see the part from multiple views at once, multiple surfaces can be inspected at once, in one image frame, without having the need to reposition the reflection device, the camera and/or the object for every single surface. There are more than one reflection devices placed in the camera's field of view to assist the inspection process by exploiting otherwise hidden surfaces of any given solid object. The effort inspecting every single part form multiple sides is reduced. Therefore, the period of the inspection cycle time can be reduced and inspection on the level of multi-surfaces becomes possible increasing overall quality.

A dosage hybrid inspection system includes a plurality of cameras selectively installed in sides of a rotating plate and a counter-rotating plate configured to vacuum suction a dosage along a circumference thereof. The cameras include a first camera unit including one or more camera arranged in the side of the rotating plate to photograph a top surface of a tablet when a bottom surface of the tablet is suctioned to the rotating plate, a second camera unit including a plurality of cameras arranged in the side of the rotating plate to photograph a portion of a circumferential surface of the tablet when the bottom surface of the tablet is suctioned to the rotating plate, a third camera unit including one or more camera arranged in the side of the counter-rotating plate to photograph the bottom surface of the tablet when the top surface of the tablet is suctioned to the counter-rotating plate, a fourth camera unit including a plurality of cameras arranged in the side of the counter-rotating plate to photograph another portion of the circumferential surface of the tablet when the top surface of the tablet is suctioned to the counter-rotating plate, wherein one or more camera of the second and fourth camera units is configured to photograph both edges of a capsule when a side surface of the capsule is suctioned to the rotating plate, and one or more camera of the first and third camera units is configured to photograph a circumferential surface of the capsule, and fifth and sixth camera units including a plurality of cameras further provided in the sides of the rotating plate and the counter-rotating plate to photograph another portion of the circumferential surface of the capsule which has not been photographed by the first and third camera units.

Methods, systems, and apparatus for detection of a condition in a hole defined by a transparent material that is at least partially enclosed by one or more substantially opaque materials. The method may include positioning a light source in a first hole in the transparent material, directing light from the positioned light source through the transparent material and toward a second hole that is adjacent to the first hole. A prism may be positioned so that the light transmitted from the light source through the machined inner surface of the second hole is visible through a viewing face of the prism. By observing the transmitted light, a surface condition of the machined inner surface of the second hole may be determined.