An optical imaging and processing system includes an optical element and a processor configured to process the plurality of image frames to generate a three-dimensional model of at least a portion of the turbine component interior. The system may also include a display coupled to the processor to display the three-dimensional model. An operator may view and analyze the three-dimensional model on the display for defects. The processor may further be configured to automatically navigate the three-dimensional model to determine defects within the turbine component interior. The system may also include a repositioning device configured to reposition the optical element such that the optical element may capture the plurality of image frames from multiple vantage points within the turbine component interior.

A method of inspecting a semiconductor processing chamber includes providing a vision sensor into the semiconductor processing chamber, aligning the vision sensor on a target in the semiconductor processing chamber, obtaining an object image of the target using an image scanning module of the vision sensor, generating a three dimensional model of the target based on the object image, and obtaining a physical quantity of the target from the three dimensional model. The obtaining of the object image of the target includes projecting a pattern onto the target using an illuminator of the image scanning module, and scanning an image of the target in which the pattern is projected, using a camera of the image scanning module.

A method of inspecting a semiconductor processing chamber includes providing a vision sensor into the semiconductor processing chamber, aligning the vision sensor on a target in the semiconductor processing chamber, obtaining an object image of the target using an image scanning module of the vision sensor, generating a three dimensional model of the target based on the object image, and obtaining a physical quantity of the target from the three dimensional model. The obtaining of the object image of the target includes projecting a pattern onto the target using an illuminator of the image scanning module, and scanning an image of the target in which the pattern is projected, using a camera of the image scanning module.

A borescope includes an electronic image capturing unit having at least one image capturing sensor with a receiving cone at a first end of a shaft, the shaft having a shaft axis and through which data and supply lines for the image capturing unit are led. The image capturing unit is arranged on a rotary head. The rotary head is secured to the first end so as to be rotatable about the shaft axis such that an axis of the receiving cone is not parallel to the shaft axis at the first end and so that the rotating head is arranged to capture a panoramic image.

A borescope includes an electronic image capturing unit having at least one image capturing sensor with a receiving cone at a first end of a shaft, the shaft having a shaft axis and through which data and supply lines for the image capturing unit are led. The image capturing unit is arranged on a rotary head. The rotary head is secured to the first end so as to be rotatable about the shaft axis such that an axis of the receiving cone is not parallel to the shaft axis at the first end and so that the rotating head is arranged to capture a panoramic image.

Some implementations described herein provide techniques and apparatuses for inspecting interior surfaces of a vessel of a radiation source for an accumulation of a target material. An inspection tool, including a laser-scanning system and a motor system supported by an elongated supported member, may be inserted into the vessel to generate an accurate three-dimensional profile of the interior surfaces. Use of the inspection tool is efficient, with short setup and scan times that substantially reduce a duration associated with evaluating the interior surfaces of the vessel for the accumulation.

The present invention relates generally to the inspection of pipes, and the like, and more particularly to the remote inspection of ferromagnetic pipes. The invention teaches apparatus comprising, in combination: a vehicle equipped with a plurality of wheels capable of propelling the vehicle within a predetermined ferromagnetic environment to be inspected; means for remotely applying drive forces to said wheels; said wheels including a plurality of passive non-driven rollers; said passive rollers including magnetized means; means for acquiring visual images of the condition of said pipes; and means for remotely accessing said visual images; thereby enabling remote inspection of said pipes. An immediate environment in which the use of the present invention is contemplated is in inspection of ferromagnetic pipes which are located above and/or below ground.

The present invention relates generally to the inspection of pipes, and the like, and more particularly to the remote inspection of ferromagnetic pipes. The invention teaches apparatus comprising, in combination: a vehicle equipped with a plurality of wheels capable of propelling the vehicle within a predetermined ferromagnetic environment to be inspected; means for remotely applying drive forces to said wheels; said wheels including a plurality of passive non-driven rollers; said passive rollers including magnetized means; means for acquiring visual images of the condition of said pipes; and means for remotely accessing said visual images; thereby enabling remote inspection of said pipes. An immediate environment in which the use of the present invention is contemplated is in inspection of ferromagnetic pipes which are located above and/or below ground.

A sensor interface module for an inspection robot includes a scissor lift for varied radial positioning of, and a universal sensor mount for mounting, a selected one of a plurality of different sensors. A visual inspection module for the robot includes an inspection unit for simultaneously visually inspecting a first surface facing a first direction and a spaced, second surface facing an opposing, second direction toward the first surface. The inspection unit includes a first visual sensor and a second visual sensor, each visual sensor facing in a direction different than the first and second directions. A first reflector reflects an image of the first surface to the first visual sensor, and a second reflector reflects an image of the second surface to the second visual sensor. A robot system may include the sensor interface module and the inspection unit.

Portable pipe inspection video systems are disclosed. The system may include a camera head, a push-cable, a cable reel, and a camera controller having a built-in transmitter for energizing a pipe-inspection cable for magnetic field tracing applications.