The present disclosure provides an inspection device for use in a mounting system including a mounting device for disposing a component on a board, including a control section configured to extract a mass area included in a captured image resulting from imaging a processing target object where a viscous fluid is formed at a predetermined part, obtain a center of gravity of the mass area so extracted, and determine whether the center of gravity is included in a normal range of the predetermined part as a reference of the captured image to thereby determine whether a bridge has occurred where the viscous fluid is formed over adjacent predetermined parts.

Embodiments of the present disclosure are directed to systems and methods for inspecting solar modules, and in particular systems and methods incorporating high-power light sources to impart ultraviolet fluorescence of solar modules. The systems and methods can include a filter and/or a camera.

A broadband light source includes a rotatable drum coated with plasma-forming target material, a rotational actuator configured to rotate the rotatable drum, and a rotary encoder connected to the rotatable drum. The broadband light source may include a linear actuator configured to axially translate the rotatable drum and linear encoder connected to the rotatable drum. The broadband light source includes a pulsed laser source configured to direct pulsed illumination to a set of spots on the material-coated portion of the rotatable drum for exciting the plasma-forming target material and emitting broadband light as the drum is actuated. The broadband light source includes a control system. The control system is configured to receive one or more rotational position indicators from the rotary indicator and control triggering of the laser source based on the one or more rotational position indicators from rotary encoder.

Disclosed is a method for a metrology measurement on an area of a substrate comprising at least a portion of a target structure. The method comprises receiving a radiation information representing a portion of radiation scattered by the are, and using a filter in a Fourier domain for removing or suppressing at least a portion of the received radiation information that does not relate to radiation that has been scattered by the target structure for obtaining a filtered radiation information for the metrology measurement, wherein characteristics of the filter are based on target information about the target structure.

According to one embodiment of the present invention, A sample inspection device may provided, a total inspection module scanning a first area comprising a plurality of samples; a precision inspection module performing inspection on a sample determined as a suspected defective sample by the total inspection module in the first area; and a controller processing each data obtained from the total inspection module and the precision inspection module, and detecting a defective sample in the first area, wherein the precision inspection module may include an emitter emitting terahertz wave to the first area, a guide wire guiding an irradiation direction of the terahertz wave, and a vibration unit vibrating the guide wire.

A surface defect inspection assembly that includes translation means configured to move a part in an advance direction in a first axis. The assembly also includes a structure that supports at least one mobile inspection head that is used for inspecting the surface of the part. The mobile inspection head including a light emitter configured to emit at least one light profile on the part and means for receiving the light reflected by the part. The assembly also includes a control unit that is configured to process the reflected light and to determine if a detect exists in the surface of the part. The control unit is additionally configured to activate one or more motors to move the mobile inspection head in response to the light reflected by the part while the translation means is moved in the advance direction, orienting the light profile towards the part.

A surface defect inspection assembly that includes translation means configured to move a part in an advance direction in a first axis. The assembly also includes a structure that supports at least one mobile inspection head that is used for inspecting the surface of the part. The mobile inspection head including a light emitter configured to emit at least one light profile on the part and means for receiving the light reflected by the part. The assembly also includes a control unit that is configured to process the reflected light and to determine if a detect exists in the surface of the part. The control unit is additionally configured to activate one or more motors to move the mobile inspection head in response to the light reflected by the part while the translation means is moved in the advance direction, orienting the light profile towards the part.

A pattering device inspection apparatus, system and method are described. According to one aspect, an inspection method is disclosed, the method including receiving, at a multi-element detector within an inspection system, radiation scattered at a surface of an object. The method further includes measuring, with processing circuitry, an output of each element of the multi-element detector, the output corresponding to the received scattered radiation. Moreover, the method includes calibrating, with the processing circuitry, the multi-element detector by identifying an active pixel area comprising one or more elements of the multi-element detector with a measured output being above a predetermined threshold. The method also includes identifying an inactive pixel area comprising a remainder of elements of the multi-element detector. Additionally, the method includes setting the active pixel area as a default alignment setting between the multi-element detector and a light source causing the scattered radiation.

A pattering device inspection apparatus, system and method are described. According to one aspect, an inspection method is disclosed, the method including receiving, at a multi-element detector within an inspection system, radiation scattered at a surface of an object. The method further includes measuring, with processing circuitry, an output of each element of the multi-element detector, the output corresponding to the received scattered radiation. Moreover, the method includes calibrating, with the processing circuitry, the multi-element detector by identifying an active pixel area comprising one or more elements of the multi-element detector with a measured output being above a predetermined threshold. The method also includes identifying an inactive pixel area comprising a remainder of elements of the multi-element detector. Additionally, the method includes setting the active pixel area as a default alignment setting between the multi-element detector and a light source causing the scattered radiation.

This disclosure relates generally to a system and method for monitoring performance of low-cost sensors plied in a field for soil moisture measurement. The low-cost sensors are calibrated to give useful derived parameters to support farming such as volumetric water content (VWC) of the soil. Further, the steps are being incorporated to de-noise their response to derive stable measurements similar to expensive rugged sensors. The calibration of the low-cost sensor and normalization of incoming values from the low-cost sensor are based on values determined through rugged sensors for soil moisture measurement. The normalization involves finding a minimum value and maximum value of soil moisture. Performance of the low-cost sensors are analyzed based on a range of values of the soil moisture. Finally, the performance analysis provides degradation stages and based on the degradation stages evaluated recommendations to modify the sensor are shared with the user.