The present invention relates to an X-ray analysis apparatus and a method of X-ray analysis. The X-ray analysis apparatus enables a user to carry out a plurality of X-ray analysis applications, for analysing a sample by measuring X-ray diffraction and/or X-ray fluorescence, using the same X-ray source. The apparatus comprises an X-ray source for irradiating the sample with X-rays, the X-ray source comprising a solid anode and a cathode for emitting an electron beam. It also comprises a focusing arrangement for focusing the electron beam onto the anode, and a controller. The controller is configured to receive X-ray analysis application information and to control the X-ray analysis apparatus to selectively operate in either a first X-ray analysis mode or a second X-ray analysis mode based on the X-ray analysis application information. In the first X-ray analysis mode the X-ray source operates at a first operating power and has an effective focal spot size that is less than 100 μm. In the second X-ray analysis mode the X-ray source operates at a second operating power that is higher than the first operating power, and the area of the effective focal spot is larger than the area of the effective focal spot in the first X-ray analysis mode.

The X-ray inspection apparatus includes an X-ray source, a sample moving mechanism, an X-ray detector equipped with a line sensor with pixels detecting X-ray radiation passing through a sample, an image storage unit for storing X-ray radiation intensities, an intensity correction unit for correcting the X-ray radiation intensities stored in the image storage unit, and a defect detector for detecting a defect in the sample. The intensity correction unit sets an intensity of X-rays detected from the inspection initiation region after starting inspection of the sample or an intensity of X-rays preliminarily detected from the sample before starting the inspection as a reference radiation intensity, and corrects an intensity of X-rays detected from the subsequent inspection region based on a correction coefficient obtained from comparison between the intensity of X-rays detected from the subsequent inspection region and the reference radiation intensity.

In an X-ray inspection, a detection unit with a detector is provided. The detection unit detects transmitted amounts of the X-rays generated by an X-ray generator and transmitted through the object in each of n-number X-ray energy bins (n is a positive integer of 2 or more) which are set in advance to the X-rays, and outputs detection signals corresponding to the transmitted amounts. An information acquisition unit acquires, based on the detection signal, information showing a thickness t of the object and an average linear attenuation coefficient μ in a transmission direction of fluxes of the X-rays, in each of the energy bins. A pixel data calculation unit calculates, based on the acquired information, pixel data composed of pixel values each obtained by multiplying addition information by the thickness t. Addition information is obtained by mutual addition of the average linear attenuation coefficients μ in the respective energy bins.

A high-pass x-ray filter device is disclosed that includes a substrate defining an elongated opening. A reflecting membrane is positioned across the opening and supported, along all sides, by the substrate. The reflecting membrane is configured to transmit, from an incident x-ray beam, x-ray photons having an energy above about a threshold energy level and reflects, from the incident x-ray beam, x-ray photons having an energy below about the threshold energy level. The elongated opening of the substrate defines an exit path for the transmitted x-ray beam. A high-pass x-ray filter system including the high-pass filter device and a method of fabrication of the high-pass filter device are also disclosed.

A high-pass x-ray filter device is disclosed that includes a substrate defining an elongated opening. A reflecting membrane is positioned across the opening and supported, along all sides, by the substrate. The reflecting membrane is configured to transmit, from an incident x-ray beam, x-ray photons having an energy above about a threshold energy level and reflects, from the incident x-ray beam, x-ray photons having an energy below about the threshold energy level. The elongated opening of the substrate defines an exit path for the transmitted x-ray beam. A high-pass x-ray filter system including the high-pass filter device and a method of fabrication of the high-pass filter device are also disclosed.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

A photon counting X-ray CT apparatus according to an embodiment includes: data acquiring circuitry, and processing circuitry. The data acquiring circuitry is configured to allocate energy measured by signals output from a photon counting detector in response to incidence of X-ray photons to any of a plurality of first energy bins so as to acquire a first data group as count data of each of the first energy bins. The processing circuitry is configured to determine a plurality of second energy bins obtained by grouping the first energy bins in accordance with a decomposition target material that is a material to be decomposed in a imaging region, allocate the first data group to any of the second energy bins so as to generate a second data group, and use the second data group to generate an image representing a distribution of the decomposition target material.

A photon counting X-ray CT apparatus according to an embodiment includes: data acquiring circuitry, and processing circuitry. The data acquiring circuitry is configured to allocate energy measured by signals output from a photon counting detector in response to incidence of X-ray photons to any of a plurality of first energy bins so as to acquire a first data group as count data of each of the first energy bins. The processing circuitry is configured to determine a plurality of second energy bins obtained by grouping the first energy bins in accordance with a decomposition target material that is a material to be decomposed in a imaging region, allocate the first data group to any of the second energy bins so as to generate a second data group, and use the second data group to generate an image representing a distribution of the decomposition target material.

A method for inspecting an object made of plastic material and including at least one layer to be inspected, comprises the following steps: positioning the object in an inspection zone (Z); irradiating the inspection zone (Z) with electromagnetic radiation emitted by an emitter (2); detecting, with a 5 sensor (3), an absorption of the electromagnetic radiation by the layer to be inspected and accordingly generating an absorption signal (301) representing the absorption of the electromagnetic radiation by the layer to be inspected; processing the absorption signal (301) in a control unit (6) and generating inspection data accordingly. The electromagnetic radiation 10 includes X-rays.